CHKD/CHKG

wire 12 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit Relay PLC 24 V 3-wire (PNP) 2-wire Yes Grommet 12 V 3-wire (NPN) 5 V, 12 V 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 A96V A96 3-wire (NPN) IC circuit 5 V 100 V 24 V Yes A93V 2 A90V A93 Grommet Relay PLC 2-wire 12 V A90 IC circuit No 100 V or less

VKF300

Symbol (A) 2 Construction 3 (R) 1 (P) 1(P) 2(A) 3(R) P R Description Parts list Note Material Die-cast aluminum Die-cast aluminum Aluminum Resin Stainless steel Steel No. 1 2 3 4 5 6 7 Solenoid coil assembly Sub plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly (with mounting screw) For VKF334: VKF300-S-F or M5 01 For VKF332: VKF300-13A-2 For VKF333:

ZB-OM00301

() 0.005MPa5kPa4 1000 P28 31 - No.ZB-OM00301 -550 2/ 1 30m/s 2 20m/s 2/ 2 150m/s 2 100m/s 110500Hz XYZ 2 () 2XYZ 3 3 1 / 1 ZB1-VQ110UZB1-VQ120UZB1-VQ110LZB1-VQ110N.C. 1 N.C.

VER2000/4000

and fluid temperature (1) (2) A port setting pressure range 0.1 to 0.9 MPa 0.1 to 0.9 MPa 0.1 to 0.9 MPa 16 mm2 (0.9) 52 mm2 (2.9) Max. effective area (Cv factor) VER4000 Response time 0.06 s 0.04 s Hysteresis 3% F .S.

q"s

a %silrc q"s cAT.ES60-15o Electro-Pneumatic Regu lator Sensitivitfo;, 2 Xp^(l00 kpa speciricarions) Linearity: Within *,tg6-{f.S.)

ncq8mp

NCQ8B056-S-PS NCQ8B056-S-PS 056 (9/16") NCQ8B075-S-PS NCQ8B075-S-PS 075 (3/4") NCQ8B106-S-PS NCQ8B106-S-PS 106 (1 1/16") Piston seal is included. NCQ8B150-S-PS NCQ8B150-S-PS 150 (1 1/2") NCQ8B200-S-PS NCQ8B200-S-PS 200 (2") NCQ8B250-S-PS NCQ8B250-S-PS 250 (2 1/2") Construction Single Acting Spring Extend 11 12 10 Seal Kit Parts List No.

VNB

G E C T D DL S Z L 1, 2, 3, 4 (Only G)(Except G) 5, 6, 7 (Except DL)(Only T) (Only T) 17-4-13 2 Series VNB How to Order Seal material Body option Nil V Standard Vacuum pilot A B C NBR seals FKM seals EPR seals Thread type Bracket (valve size: 1/2/3/4.)

Ejector Valve Unit, Series ZYY/ZYX

Note 2) V, S and R specifications are 45T or 45T1 only.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Note 2) Intermediate strokes are available as a special order. Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Guide Table Series MGF

/s Select MGF100 from Graph 7. 2) When MGF63 is operated with a load weight 30kg and 100mm eccentric distance From Graph 6, the cylinder can be used at a maximum speed of 100mm/s or less. 12

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Nil S n 12mm 16mm 20mm 25mm 2 pcs. 1 pc. "n" pcs.

Refrigerated Air dryer Series IDU/IDF

Note 2) Combinations of H and M, R and S, S and T, L and M are not available. Note 3) Option "T" is not available for IDU6D, 8D-4 and -6.

5 Port Solenoid Valve Series SV

N.C. valve N.C. valve 3(EB) SOL.b SOL.a 1 2 SV A00 5(EA) 1(P) 4(A) 2(B) N.O. valve N.O. valve 1 2 Tie-rod base manifold (for SV1000/2000/3000/4000) Conventional tie-rod base type manifolds are also available. The use of 34 pin connector allows up to 16 stations with double solenoids.

Smooth Vent Valve

Description Part no. 1 Bonnet assembly XVD2-02A-30-1 XVD2-02V-30-2 (For VCR) 2 Body assembly XVD2-02S-30-2 (For Swagelok) 3 Exterior seal AS568-024V 526

CP95

of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Dimensions inside are for rubber seal. 6-1/2, 3/4 1, 3, 5 port 32 (35) 32 (35) 35 35 3-11-9 10 Series EVS7Dimensions EVS7-10-FG-S-M0 1/2, 3/4-5 port 1, 4, 2, 5, 3 port 200 124 124 45 (14 port) 76 39 37 2-8.5 mouting hole 45 (12 port) 5 1 3 22 (4 port) 22 (2 port) 22 12 2 4 14 14 80 26 33 80 95 50 B A 4 2 19 19 5 1 3 1/8-2 port 12, 14 port 47 47 Manual override 8 71 65 2-8.5 mounting hole

Table of Contents

to cylinder, Needle fully open (2) Load ratio {(Load weight x 9.8) Theoretical output} x 100% Speed at the end (u) Time (s) SOL: ON(OFF) 1-2-4 1-2-5 4 Series SV Air Cylinders Drive System Full Stroke Time and Speed at the End Air Cylinders Drive System Full Stroke Time and Speed at the End Series SV3000 Applicable bore size: 50, 63, 80, 100 Series SV4000 Applicable bore size: 63, 80, 100

Series VCL

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

3 Port Air Operated Valve Series SYJA300

pilot Flow Characteristics Flow characteristics Effective area (mm2) Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(s bar)] 1(P), 3(R) Port 2(A) Port b Cv C [dm3/(s bar)] b Cv Body ported for internal pilot M3 x 0.5 0.9 Type SS3YJ3-20 SYJ32 M5 x 0.8 Type SS3YJ341 S41 SYJ34 M3 x 0.5 M5 x 0.8 1.5 0.17 0.36 0.3 0.17 Type SS3YJ3-42-M5 Base mounted for internal pilot M5 x 0.8 0.31 0.33 0.32