Body Class: ø10 Orifice, Valve Type: N.C., Fitting Type: LQ2 Body Class: 2, 3, 4, 5, Fitting Size: Tubing O.D. 1/2, Pilot Port Thread: LQ1 Integral Fitting, 4mm, Pilot Port Direction: Direction 1, Option 1: Flow Rate Adjustment, Option 2: for High Temperature
Body Class: ø16 Orifice, Valve Type: N.C., Fitting Type: LQ2 Body Class: 2, 3, 4, 5, Fitting Size: Tubing O.D. 3/4, Pilot Port Thread: LQ1 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: Indicator, Option 2: -
Body Class: ø4 Orifice, Valve Type: N.C., Fitting Type: LQ2 Body Class: 2, 3, 4, 5, Fitting Size: Tubing O.D. 1/4, Pilot Port Thread: LQ1 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: Flow Rate Adjustment, Option 2: -
Body Class: ø22 Orifice, Valve Type: N.C., Fitting Type: LQ2 Body Class: 2, 3, 4, 5, Fitting Size: Tubing O.D. 1, Pilot Port Thread: LQ1 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: Flow Rate Adjustment, Option 2: -
Body Class: ø4 Orifice, Valve Type: N.C., Fitting Type: LQ2 Body Class: 2, 3, 4, 5, Fitting Size: Tubing O.D. 1/4, Pilot Port Thread: LQ1 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: Indicator, Option 2: -
Body Class: ø4 Orifice, Valve Type: N.C., Fitting Type: LQ1, Body Class: 2, 3, 4, 5, 6, Fitting Size: Tubing O.D. 1/4, Pilot Port Thread: Thread Type 1/8 Rc, Pilot Port Direction: -, Option 1: -, Option 2: -
Body Class: ø16 Orifice, Valve Type: N.C., Fitting Type: LQ1, Body Class: 2, 3, 4, 5, 6, Fitting Size: Tubing O.D. 3/4, Pilot Port Thread: Thread Type 1/8 Rc, Pilot Port Direction: Direction 1, Option 1: High Back Pressure w/Flow Rate Adjustment, Option 2: -
Body Class: ø22 Orifice, Valve Type: N.C., Tube Size: 1" or ø25, Pilot Port Thread: LQ1 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: High Back Pressure, 0.42 MPa, Option 2: High Flow Spec, LVQ6* Only
Body Class: 20, Fitting Type: LQ1, Tube Size: Inch: 1/8" O.D.; Metric: 3 x 2, Thread Type: -
Body Class: 20, Fitting Type: LQ1, Tube Size: Inch: 1/8" O.D.; Metric: 3 x 2, Thread Type: NPT
Body Class: 20, Fitting Type: LQ1, Tube Size: 1/4" O.D., Thread Type: -
Body Class: 20, Fitting Type: LQ1, Tube Size: 1/4" O.D., Thread Type: NPT
Body Class: 40, Fitting Type: LQ1, Tube Size: 3/8" O.D., Thread Type: -
Body Class: 40, Fitting Type: LQ1, Tube Size: 3/8" O.D., Thread Type: NPT
Body Class: 40, Fitting Type: LQ1, Tube Size: 1/2" O.D., Thread Type: -
Body Class: 40, Fitting Type: LQ1, Tube Size: 1/2" O.D., Thread Type: NPT
Body Class: 40, Fitting Type: LQ1, Tube Size: 12 x 10, Thread Type: NPT
Body Class: ø4 Orifice, Valve Type: N.C., Fitting Type: LQ2, Body Class: 2, 3, 4, 5, Tube Size: 1/4", Output Tube Size: None, Pilot Port Thread: LQ1 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: Flow Rate Adjustment, Option 2: -
Function (Relief): No, Supply Side Connection Type: [One-Touch] Straight Fitting, Supply Side, Connection Diameter: Ø2, Operating Pressure Range(MPa): null~0.5, Control Side Connection Type: [One-Touch] Straight Fitting, Control Side, Connection Diameter: Ø2, Pressure Gauge: [Not Provided] No, Size of Body: 1, Custom-made Specifications: Standard, Pilot Port Screw Type: Rc 1/8, Fitting Type: LQ1
The LVD valves have PFA body materials and integral fittings (Hyper Fitting series LQ1 and clean series KP). High purity, compact type with integral fittings; Mounting base dimensions conform to SEMI standard F65-1101 (Except for LVD10); New PFA body; Piping from 4 directions are possible; Variety of tubing sizes available