Tamper Proof and Flat Head Screw

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Models Metric sizes 10, 12 8 6 6 6 8 12 10 3.2, 4, 6 4 Tubing O.D.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

9.5 9 9.5 9.5 9.5 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 3 5 5.5 6 6 7 D-A7/A80 D-A7H/A80H D-A73C/A80C 12 12 12 11 10 D-A79W D-F7/J79 D-F7V/J79C D-F7W/J7WV D-F7BAL/F7BAVL D-F79F/F7NTL 13 13 13 14 14 6 5.5 6 6 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

HRX-OM-T002

Option . 6-1 6.1 Option M [DI water (Pure water) piping] . 6-1 6.1.1 Option M [DI water (Pure water) piping] . 6-1 HRS090 Series HRX-OMT002 Contents 6.2 Option J [Automatic fluid filling] . 6-2 6.2.1 Option J [Automatic fluid filling] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm

Modular F.R.L. Unit

Features 5 Feature 6 F.R.L.

Electric Actuator

supply connector Servo motor power connector CN1 CN2 6 156 168 CN3 CN6 CN2 CN4 Battery 6 Battery included.

CG1

6 !7 !8 !

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

7 5.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 12 12 6 16 6 16 10 10 12.5 12.5 17.5 17.5 6 6 9.5 9.5 9 9 Note) Adjust the auto switch after confirming the operating condition in the actual setting.

SZ3000

Note Description C6 C8 SZ3000-50-1ASZ3000-53-1A SX3000-113-1 SZ3000-114-3A SZ3000-114-1A VZ1000-11-1SZ3000-40Supply/exhaust block assembly C6: with 6 One-touch fitting, C8: with 8 One-touch fitting 1 End block assembly 2 Housing holder 3 Bushing assembly 4 Bushing assembly 5 Refer to page 6. DIN rail 6 Refer to the connector block assembly part no. table below.

MG

6 !7 !8 !

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

linear scaled Channel parameter Channel 0 to 1 0..2 (Ch0 in) Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 3 4..6 (Ch1 in) Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0..2 (Ch0 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA

/

Model Voltage L (With light) Voltage symbol 5 6 24 VDC 12 VDC VXE21 0 1 2 3 VX021N-12A VXE22 0 2 3 4 VXE23 0 2 3 4 VX022N-12A VXE22 0 5 6 VXE23 0 5 6 VX023N-12A-L Dimensions P. 17 (Single unit) 8 Series VXE21/22/23 For Oil /Manifold Fluid and Ambient Temperature Solenoid Valve for Manifold/Valve Specifications N.C.

Compact Cylinder Series CQS

6 4 4 0 0 19 6 2 2 (4.5) 2 25 7.5 7.5 2.5 10 10 6 3.5 1.5 (1) 6 3.5 22.5 9.5 27 11 11 9.5 0.5 24.5 7 5.5 3.5 (1) 7 5.5 ( ): Denotes the values of D-A93.

Cylinder

> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o ! 5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

24

JMGP MGP MGP Operating Range MGPW [mm] Auto switch model Bore size 12 16 20 25 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 3.5 5 5 5 6 6 6 6.5 6 7 MGQ MGG D-A9/A9V 7 9 9 9 9.5 9.5 9.5 11 10.5 10.5 D-Z7/Z80 10 10 10.5 10.5 10.5 11.5 11.5 12 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BA MGC MGF 7.5 7 6.5 6 7 8 9.5 10 MGZ D-P3DWA 5.5 6.5 6 6 6.5 6 7 D-P4DW 5 4 4 5 4 4 MGT *: Values which

CXS

8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts No. Description No. Description Note Material Note Material Hard anodized Aluminum alloy Polyurethane !

CXS

8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !

Combination Cylinder

6 !

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-23 5-23 HRX-OM-X010 Chapter 5 System Operation 5.3.21 Initial Setting screen 6 POWER ON 1 2 Figure 5-24 Initial Setting screen 6 Table 5-21 Initial Setting screen 6 No.

VQZ1000/2000/3000

One-touch fitting assembly for 4 (22.5) 0.5 2n-C3, C4, C6, M5 C3: One-touch fitting assembly for 3.2 C4: One-touch fitting assembly for 4 C6: One-touch fitting assembly for 6 C6: One-touch fitting assembly for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24 stations) 21.5 L n 1 2 7.5 3 4 5 6 7 8 11 9 10 12 29 18 31 42 53 64 75 86 97