Ionizer Gun

1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350

HRX-OM-I051

Table 7-1 Water Quality Standards for Fresh Water (Tap Water) Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) *Circulating fluid 1 to 500 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 2-/L) Max.200 Max.50 Sulfate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (mgCaCO3/L

Electric Actuator / Low profile slider type

LEMH 25 25 LEMHT32 LEMH32 20 20 Workload m[kg] Workload m[kg] 15 15 LEMHT25 LEMH25 10 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 0 200 400 600 800 1000 1200 1400 Support spacing [mm] Support spacing [mm] 6.2 Handling Caution 1.

10

Mounting side Closed C B A A Open D Open E F F Mounting side MHL2-25DZ-X86/X86A MHL2-25D Z-X86/X86A 1 2 200 200 160 160 Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 120 120 0.5 MPa 0.4 MPa 0.4 MPa 80 80 0.3 MPa 0.3 MPa Closed F (Fingers closed) 40 40 0 0 40 80 120 160 200 0 0 40 80 120 160 200 [mm] Model A B C D E F Weight [g] MHL2-25DZ-X86(A) 9 106 128

MHL2

200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

10 10 0 0 200 400 600 0 0 200 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 2 Series ZFC Construction Component Parts Description Material Quantity PC Resin PBT Sintered resin HNBR Resin PBT OUT No. 1 2 3 4 5 Case Cover Element Seal Bracket 1 2 1 2 1 One-touch fittings w Replacement Element Part No. e q Part no.

Air Slide Table

500 100 200 300 400 500 800 200 400 600 Load (N) Load (N) Load (N) 7 Series MXQR Dimensions: MXQR 6 For detailed dimensions about the stroke adjuster, refer to Adjuster Options.

PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

C92

160, 200, 250, 320, 400, 500 2900 125 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 CA1 2900 160 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Intermediate strokes are available.

Digital Flow Switch (Integrated display type)

to 4200 Setting of OUT1 output value (Hysteresis mode) Setting of OUT1 hysteresis (Hysteresis mode) 2 R/W Hysteresis S16 200 Y Setting range 0 to 4400 Setting of OUT1 output value (Lower limit of window comparator mode) 3 R/W Lower limit of window comparator S16 1200 Y Setting range -200 to 4200 OUT1 setting 1220 0x04C4 Setting of OUT1 output value (Upper limit of window comparator mode)

AS

Made to Order (Refer to page 479 for details.) 478 Series AS-FG Speed Controller with One-touch Fitting Stainless Steel Series In-line Type How to Order AS 200 1 F G 06 Made to Order (Refer to the below for details.) Body size 100 200 205 300 400 M5 standard 1/8 standard Applicable tubing O.D.

155

Voltage symbol 24 VDC V100-61-3-05 DC 24 VZ 12 VDC V100-61-3-06 DC 12 VZ 100 VAC V100-61-2-01 100/110 VZ 200 VAC V100-61-2-02 200/220 VZ 110 VAC V100-61-2-01 100/110 VZ 220 VAC V100-61-2-02 200/220 VZ 240 VAC V100-61-2-07 240 VZ If an AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector.

Process Valve Series VNA

VO307 00 Q CE compliant VO301 00 X302 Coil rated voltage 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Component Parts No.

Smooth Cylinder

0 CG1YB20 -200 Example Smooth cylinder combined with precision regulator (e.g.

Information

200 Ambient 5C Ambient 5C 0 5 10 15 20 25 30 35 40 45 0 5 10 15 20 25 30 35 40 45 [50 Hz] Circulating fluid temperature [C] [60 Hz] Circulating fluid temperature [C] 012 018 024 A W HRS -20 (Single-phase 200 to 230 VAC) 1000 1000 Ambient 40C Ambient 32C Ambient 25C Ambient 40C 800 800 600 600 Ambient 32C 400 400 Ambient 5C Ambient 20C Ambient 25C Ambient 5C Ambient 20C 200 200 0 5 10 15

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

200 100 100 200 0 10 20 30 40 10 20 30 40 Data Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 10-9-19 Series RSA Dimensions mFX+0.2 FZ 4-N through 8-O counter bore Workpiece transfer direction L CZ S X CT CT Y V U FT CD Conveyor lower limit position T R H Stroke 2-Rc P G D A Q Rear pressure port Front pressure port B WB W (width across corners I) E (mm) Bore size (mm) N CD

Air Cylinder Series MB

Order Made 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 Symbol Specifications/Descriptions 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 XA 100 Change of rod end shape 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450,

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.