25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns240 g1/2

Direct Operated Precision Regulator Modular Style Series ARP3000 1

0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL ARX20 ARX21

RSQ

4-O counterbore 2-N through MK(2) X F Stroke Q 2-P Y RS Q G RS H A G D T RZQ U W V L M MI W S 10 (11) 20 (22) H + Stroke B + Stroke A + 2 stroke Workpiece transfer direction CEP1 CE1 32 40 50 RSQB -R Bore size: 32, 40, 50 CE2 Stroke Q F Z 2-P X ML2B S J I C J G5-S W E D T G CV U L V MVGQ 10 (11) 20 (22) M 0.2 E B + Stroke H + Stroke 4-N through 8-O counterbore CC A + 2 stroke RB Built-in

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

D MIW Double finger type 32 50 1 A S D M9B MIS Single finger type Scraper Cylinder bore 8 12 20 25 32 Nil S No Yes 8 mm 12 mm 10 mm 25 mm 32 mm Number of auto switches Nil S 2 pcs. 1 pc.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Yes 8 mm 12 mm 10 mm 25 mm 32 mm Number of auto switches Nil S 2 pcs. 1 pc.