AIR COMBINATION

16 56 59.9 11 28 25 12.5 25 20 27 4.5 6.8 3 24.5 AC20B-B 1/8 83.2 87.6 26.5 41.6 25 28.5 2 30 24 33 5.5 12 3.5 29 Note) 1/81/4 1/43/8 1/43/8 AC25B-B 1/8 110.2 115.1 28 30 55.1 35 27.5 0 41 35 7 14 4 41 AC30B-B 1/8 110.2 115.1 30.7 30 55.1 35 29.4 3.5 41 35 7 14 4 41 AC40B-B 1/8 145.2 147.1 35.8 38.4 72.6 40 33.8 3.5 50 40 9 18 5 48 1/43/81/2 AC40B-06-B 1/8 155.2 149.1 35.8 38.4 77.6

Digital Flow Switches

Tightening torque Nm 28 to 30 36 to 38 48 to 50 48 to 50 Tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 Thread Rc 3/4 Rc 1 Rc 1, 1/2 Rc 2 Thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Supply voltage > Internal voltage drop of switch Minimum operating voltage of load 2. Apply a wrench only to the metal part of the piping when installing the flow switch onto the system piping.

Compact Type Dual-Rod Cylinder Series CXSJ

freezing) 30 to 700 mm/s 30 to 800 mm/s 30 to 600 mm/s Rubber bumper at both ends 0 to 5 mm compared to the standard stroke M3 0.5 M5 0.8 Rc (NPT, PF) 1/8 The maximum piston speed shown in the table above is for extension.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

0 @1 Stopper Resin !1 Replacement Parts Cover !

A_HEC-OM-J017

) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

Digital Flow Switch ( compatible)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Flow diagnosis 0: Within range 1: Out of range (HHH/LLL). 9 Fixed output 0: Normal output 1: Fixed output (for checking output) 15 Error diagnosis 0: Error is not generated 1: Error is generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

Thermo-con/Rack Mount Type

400 W (Tap water)*1 510 W (Tap water)*1 800 W (Tap water)*2 1 kW (Tap water)*2 Heating capacity 600 W (Tap water)*1 1 kW (Tap water)*1 1.2 kW (Tap water)*1 1.4 kW (Tap water)*2 2 kW (Tap water)*2 Temperature stability*3 0.01 to 0.03C Pump capacity Refer to the performance charts.

5 Port Air Operated Valve

Manifold base model EXH port type Applicable stations Applicable valve model Series SYA VFA1000 VV5FA1-30 SYJA 4 (A) , 2 (B) port M5, 1/8 Common EXH VZA VFA VFA 5/3 (R) port 1/8 1 (P) port 1/8 2 to 20 stations VFRA VFA130 VV5FA1-31 4 (A), 2 (B) port M5, 1/8 VPA4 Individual EXH SYJA VZA 1 (P) port 1/8 5 (EA), 3 (EB) port M5 x 0.8 VTA VFA3000 VV5FA3-30 4 (A), 2 (B) port 1/8, 1/4 VGA Body ported

240

NS 20 20 25 25 40 40 50 70 70 LT 64 64 74 74 84 84 94 104 114 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 D-X 27 MXH Series Auto Switch Mounting Minimum Stroke for Auto Switch Mounting Applicable auto switch model (mm) Number of auto switches mounted D-A9, A9V D-M9, M9V D-M9W, M9WV D-M9A, M9AV 1 pc. 2 pcs. 5 10 5 5 5 10 Auto Switch Proper

Sine Cylinder Series REC

5.5 10.5 8 30 D32 M10 x 1.25 26 22 19.5 13 12 17 10 9 19 11 45 6 46.5 5.5 10.5 10 30 40 M14 x 1.5 32 24 21 16 14 22 15 10 30 12.5 50 8 56.2 7 13.5 12 39 -X NA NN P RR N S U Z ZZ Bore (mm) 20 M20 x 1.5 1/8 9 146 14 217 226 20 30 Individual -X 25 M26 x 1.5 1/8 9 146 14 221 230 20 34.5 32 M26 x 1.5 1/8 9 159 14 234 243 22 42.5 40 M32 x 2 1/4 11 181 18 270 281 26.5 51 1033 Series REC Dimensions

Sine Cylinder Series REC

5.5 10.5 8 30 D32 M10 x 1.25 26 22 19.5 13 12 17 10 9 19 11 45 6 46.5 5.5 10.5 10 30 40 M14 x 1.5 32 24 21 16 14 22 15 10 30 12.5 50 8 56.2 7 13.5 12 39 -X NA NN P RR N S U Z ZZ Bore (mm) 20 M20 x 1.5 1/8 9 146 14 217 226 20 30 Individual -X 25 M26 x 1.5 1/8 9 146 14 221 230 20 34.5 32 M26 x 1.5 1/8 9 159 14 234 243 22 42.5 40 M32 x 2 1/4 11 181 18 270 281 26.5 51 1033 Series REC Dimensions

Sine Cylinder Series REC

5.5 10.5 8 30 D32 M10 x 1.25 26 22 19.5 13 12 17 10 9 19 11 45 6 46.5 5.5 10.5 10 30 40 M14 x 1.5 32 24 21 16 14 22 15 10 30 12.5 50 8 56.2 7 13.5 12 39 -X NA NN P RR N S U Z ZZ Bore (mm) 20 M20 x 1.5 1/8 9 146 14 217 226 20 30 Individual -X 25 M26 x 1.5 1/8 9 146 14 221 230 20 34.5 32 M26 x 1.5 1/8 9 159 14 234 243 22 42.5 40 M32 x 2 1/4 11 181 18 270 281 26.5 51 1033 Series REC Dimensions

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

CS1

X 1.5 M45 X 1.5 2 39 26 46 226 182 18.5 20 111 265 115 63 60 50 74 48 17 59 45 30 to 1200 M24 X 1.5 M56 X 2 3 30 49 277 225 25 56 141 335 23 140 20 71 67 60 86 60 69 56 30 to 1200 1 M30 X 1.5 M64 X 2 4 49 36 65 330 270 23 30 146 400 140 20 76 60 80 70 96 79 67 35 to 1200 With auto switch/125 to 200 only (mm) W/o rod boot W/rod boot (mm) W/o rod boot W/ rod boot Stroke range (mm) Style Bore

3 Port Solenoid Valve

1 i r P A R For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Nil 6 10 15 20 25 30 50 Without lead wire: (with connector and 2 sockets) 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm 2 Series V100 How to Order Standard type Base mounted V1 4 M 1 5 3 port Port size Nil: Without sub-plate M5

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

Compact Cylinder with Air Cushion

Example) RQA 20-30 does not exist.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 With XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 High temperature Without XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 With XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 Temperature

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 With XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 High temperature Without XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 With XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 Temperature