CEx-OMB0060

9 D8 Digit of 10 Bit0 27 D20 Digit of 103 Bit0 10 D9 Digit of 10 Bit1 28 D21 Digit of 103 Bit1 11 D10 Digit of 10 Bit2 29 D22 Digit of 103 Bit2 12 D11 Digit of 10 Bit3 30 D23 Digit of 103 Bit3 13 (+/-) Sign 31 N.C.

IDX-OM-W019

Conditi on Inlet Air Temperature 100 F (37.8C) Ambient Temperature 100 F (37.8C) Voltage 115V 60Hz Working Fluid Compressed Air Operating Range Inlet Air Temperature 41-122 F (5-50C) MIN.

ALF400 to 900, ALT-5/-9

Tube size 100 O.D. 6 I.D. 4 14-13-10 Specialty Lubricators NALF Series Auto Feed Lubricators NALF400, 400-06, 500, 600, 800, 900 Lubricator NALF400 Tank NALT-5 s n o i t a c i f i c e p S F L A N e b u L d e e F o t u A 0 0 4 F L A N 6 0 N 0 0 4 F L A N 0 0 5 F L A N 0 0 6 F L A N 0 0 8 F L A N 0 0 9 F L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g

IZx-OMX0087

K 5 T 5 Angle M 10 Z 10 P 0.5 Q 1 R 2 Angle S 3 T 5 Z 10 DIN rail bracket for controller, high voltage power supply module Symbol For controller For high v oltage power supply module Bracket for nozzle Symbol Type Nil Without bracket Nil None None B With L-type bracket U Included Included F With angle adjustment bracket W Included None Y None Included 1-2-1.

VCA

Thread type Rc G NPT NPTF Nil F N T Stations 02 : 10 2 stations : 10 stations D side U side 1 2 3 4 5 How to Order Valves (VCA30/40) VC A 5 1 G 3 4 03 For air Thread type Rc G NPT NPTF Nil F N T Series 3 4 Class 3 Class 4 Port size (OUT) 5 N.C. for manifold Valve type Symbol 03 04 06 Class 3 Port size 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Fluid General air Dry air Nil A Orifice size Orifice

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Table displacement due to pitch moment load Displacement at "A" when load is applied at "F" Table displacement due to yaw moment load Displacement at "A" when load is applied at "F" Table displacement due to roll moment load Displacement at "A" when load is applied at "F" A A F F A F L L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Note 1) Reference dimensions Note 2) Reference dimensions of 10-32 UNF and NPT threads after installation. 685 Speed Controller with One-touch Fitting Stainless Steel Series In-line Type AS-FG Series AS-F Model TMH ASD Applicable tubing O.D.

Card Motor

Confirm that the pushing force F [N] does not exceed the allowable pushing force. F Fmax 0 1 2 3 4 5 6 LAT3m-10 Allowable thrust setting value Time while pushing force is applied 4.2 Position 0 20 40 60 80 100 Duty ratio [%] Time From Fig. 5: LAT3m-10, pushing direction away from the connector at pushing position 4 mm, find Fmax = 4.5 As F = 4 Fmax = 4.5, the selected model can be used.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 25 25 25 D-A9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 30 30 30 D-M9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 55 55 55 D-M9 D-M9W 2 pcs. (Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 30 30 30 D-M9WV 2 pcs.

E-P HYREG ® Series VY1 1

0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

AK Flow Rate and Sonic Conductance VCHC ASR ASQ Model AS22l1F-U01 AS23l1F-U01 AS22l1F-U02 AS23l1F-U02 AS32l1F AS33l1F AS42l1F AS43l1F Flow Direction Symbols on Body Meter-out Meter-in Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Symbol Tubing O.D.

HRX-OM-Y120

(C or F). Read the circulating fluid discharge temperature which is displayed on the touch panel.

IP8101 Series

to 10 (832) Integrated time setting; -10 to 10 (833) Differentiation time setting; -10 to 10 Table 12 Amount of change when set value is increased/ decreased by 1 Set value is 0 or more Set value is less than 0 Prop. gain 10% 10% Integ. time 50% 10% Deffer. time 10% 10% 8: When automation calibration is performed, PID constant is automatically set.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

They can be ordered in multiples of 10 pieces.

Voltage Monitor for PFMV5

Page 30 [F 4] [inP] External input [oFF] Unused Page 31 [F 5] [Eco] Power saving mode [oFF] Unused Page 36 [F 6] [Pin] Security code [oFF] Unused Page 37 [rAn] Select connected sensor [oFF] Unused [F95] Page 38 [Uni] Unit selection function [LPm] L/min [F99] [ini] Reset to the default settings [oFF] Unused Page 40 -23No.PF-OMN0005-E [F 0] Auto-preset This function is capable of calculating

Compact Cylinder with Air Cushion

If operated beyond the limiting ranges, excessive impact will occur and this may cause damage to equipment. 100 Lateral load F (N) 80 10 63 50 40 32 25 Operating pressure 0.5MPa Operating pressure 0.4MPa Graph 1 20 1 10 100 300 1000 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 Caution 100 Load weight kg 80 1.

RQ

D-X 100 Lateral load F (N) 2080 10 Data 63 50 Operating pressure 0.5 MPa Operating pressure 0.4 MPa 40 32 25 Graph (1) 1000 20 1 10 100 300 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 100 Load weight kg Caution 80 63 50 1.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x