Environment

300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEPY LEPS LEY25m LEY25m for acceleration/deceleration: 2000 mm/s2 LER 35 80 70 Lead 3: LEY25C 30 LEH Horizontal work load [kg] Vertical work load [kg] 60 Lead 3: LEY25C LEY -X5 50 20 40 Lead 6: LEY25B 11LEFS Lead 6: LEY25B 16 30 10 8 11LEJS 20 18 12 Lead 12: LEY25A Lead 12: LEY25A 10 25A0 0 0 300 200 400 100 500 600 0 300 200 400 100 500 600

Guide Cylinder Series MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

53

Cooling Capacity HRSH090-A-20HRSH090-A-4012 12 Ambient temperature 32C Ambient temperature 32C 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 43C Ambient temperature 43C 6 6 Ambient temperature 45C 4 4 Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH090-W-20/4014

F

11 47 6 25 22.2 7.2 11.8 16.5 11.4 50 6.2 NAS2001F 3/16 33.6 28.6 17.1 AS2001F 11.8 14.5 4 8.9 43.8 5.2 32.6 27.6 11.4 17 13.2 52.2 7.1 1/4 34.5 29.5 20.1 15.5 6 11 48.5 6.3 33.7 28.7 12.4 16.5 11.4 52.2 6.2 3/16 34.6 29.6 24 AS2051F 14.8 15.5 6 11 50.7 6 34.4 29.4 19.4 14.8 17 13.2 54.4 7.1 NAS2051F 1/4 35.5 30.5 25.1 18 8 15.2 59.8 8.1 36.5 31.5 30.3 18 15.2 59.8 8.1 5/16 36.5 31.5 30.3

HRL

Cooling Capacity HRL100-Am-40 (CH1)*1 HRL200-Am-40 (CH1)*1 30 14 12 Ambient temperature 32C 25 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 20 8 15 6 10 4 Ambient temperature 45C Ambient temperature 45C 5 2 0 0 5 20 10 15 25 30 35 5 20 10 15 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRL300-Am-40 (CH1)*1 HRL100/200/300-Am-40 (CH2

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

CP95

See page 6-13-12 for dimensions. See page 6-13-12 for dimensions.

CP95

See page 6-13-12 for dimensions. See page 6-13-12 for dimensions.

•

S. 12. 16.. -) D-F59F With 2 pes (DJleren1 sunaces. 145 155 35 ~~~= m ~e~w= rt~'=~ ~).~ ~~'~~I~P' '--+-___ -cc-~_-+_ _~-;c-_~_-,=-~-_ D-F5NTL In 35+ 55 'n 2) 145 +55 ;4> 155+55 In2 4> 2 With n pes. (Same sunace) (n =2, 4. 6, S .. ) (I = 4 , 8, 12. 1 6'~"),--,-_ "-=,-4" '::J ~".-, ..,( ", = S. 12 ' =-6._) -1 R. Different surfaces 35 110 1 ~ ~N~_~s.

LJ1H

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

Mechanical Valves Series NVM, NVFM, NVZNI

in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40)

IIIIIII

in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40)

MGP

6 6 6 6 6.5 Note) This is a standard including hysteresis, and is not guaranteed.

SMC Electronic Switch Series Variations

Station L1 L2 2 70 3 105 36 4 140 71 5 175 106 6 210 141 ZSE2 ISE2 ZSP ISl ZSM Unit Manifold With DIN rail PFl L1 Electrical entry (5m) 35 IFl (18) Deflection level indicator Deflection level indicator Rc1/8 SUP. 25 25 90 DIN rail center 90 4.5 35 SUP 4.5 35 40 30 (4.5) Adjusting knob 35 70 Gauge 12 Gauge L2 L3 EXH. port Station 1 n 69.3(MAX78.4) 60 OUT OUT OUT OUT OUT OUT 19.5 4 11.6 Detection

HRX-OM-W038

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

6 8 11 11 13 16 6 8 10 14 18 18 22 26 20 25 32 40 50 63 80 100 Up to 200 201 to 1500 18 22 22 30 35 35 40 40 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 23 23 20 20 20 163 173 175 187 218 218 264 264 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

-06SK 17 25.2 18.4 34 6 12.8 37 42.6 14 R 1/4 14 41.2 46.2 47.2 52.2 18.5 AS231FE-02-08SK 12.9 18.5 28.2 18.3 35.2 8 15.2 39 45.6 AS231FE-02-10SK 21 31 20.2 38.7 10 18.5 42 48.4 AS331FE-03-06SK 17 25.2 38.5 6 12.8 57 46.1 20.6 12.9 AS331FE-03-08SK 18.5 28.2 39.7 8 15.2 60 49.1 14 R 3/8 19 46.5 51.5 52.8 57.8 23 AS331FE-03-10SK 21 32.6 43.7 10 18.5 62 53.5 23 16.2 AS331FE-03-12SK 22 34.4 44.9

Lightweight and Compact

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

Cylinder with Lock Series CLS

Also when switches are shipped separately, BBA1 is included with them. 35 + 30 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 ... Different side "n" pcs. 100 + 10 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 ... Same side 15 110 1pc. 35 110 Different side 2pcs. 55 110 Same side D-A44 35 + 30 (n 2) 110 + 30 (n 2) n = 2,4,6,8...

Clean Gas Filter

0.40 AME 240 300 SFC102-03 TSJ 3/8 0.41 SFC105-02 URJ 1/4 0.44 AMF SFC105-03 URJ 3/8 0.49 ZFC Note) Inlet pressure 0.7 MPa, at pressure drop 0.02 MPa SF SF SFD LLB AD GD 309 SFC100 Series Specifications Fluid Air, Nitrogen Operating pressure Note 1) Max. 0.99 MPa, Vacuum 1.3 x 10-6 kPa 5 to 120C Operating temperature Element proof differential pressure Max. 0.42 MPa Element reverse differential