IDX-OM-W034

(273 m 3/h) (384 m 3/h) (510 m 3/h) Air FlowRate (ANR)(Note 1) 120SCFM 173SCFM 258SCFM 353SCFM At Expected Outlet Press.Dew Point of 45 oF (7.2 oC) (205 m 3/h) (294 m 3/h) (438 m 3/h) (600 m 3/h) 130SCFM 181SCFM 297SCFM 406SCFM At Expected Outlet Press.Dew Point of 50 oF (10 oC) (221 m 3/h) (308 m 3/h) (504 m 3/h) (690 m 3/h) Operating Pressure 100psig (0.7MPa) Condition Rated Inlet Air

IDX-OM-W035

3/h) 3/h) 3/h) (182m (273m (384m (510m (ANR) (1) 120SCFM 173SCFM 258SCFM 353SCFM 45 F (7.2) 3/h) 3/h) 3/h) 3/h) (205m (294m (438m (600m 130SCFM 181SCFM 297SCFM 406SCFM 50 F (10) 3/h) 3/h) 3/h) 3/h) (221m (308m (504m (690m 100psi (0.7MPa) 100 F (37.8) 100 F (37.8) 41122 F (550) 22 150psi (0.15 ~ 1.0MPa) 36-104F (2~40) 85% (4) AC115V10% AC230V10% (60Hz) AC460V10% (60Hz) (60Hz

7.5

Material Note Component Parts SJ3260K with back pressure check valve 1 Spool valve assembly Resin/H-NBR 3 position solenoid valve: Aluminum/H-NBR o t r e w y q !1 u !

Hydraulic Filters

pressure indicator (CB-H) Differential pressure indication switch (CB-H) Blanking cap Paper 5, 10, 20 (Micromesh) Max. 3.5, 7, 14, 21 MPa Line Filter FH34/44/54/64 Series 3/8, 1/2, 3/4, 1, 1 1/4 1 1/2, 2, 2 1/2, 3 510 Differential pressure indicator (CB-H) Differential pressure indication switch (CB-H) Blanking cap Paper 5, 10, 20 Micromesh 5, 10, 20 Vertical Return Filter FHBA Series Max

reduces flow setting time

method: Sealant For R, NPT thread Indicator window direction: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1 T H (Width across flats) Metric Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-23 (S) 3.2 7.2 13 (13) AS221FS-01-04 (S) 4 8.2 AS221FS-01-06 (S) 6 10.4 14

•

-~/ _ H _ O _ '"_ ' _ ' 2 -.< ",, ' +"."g',,'-___ : ','(); Pin:t12"",: g= WL idth across fl~tsl 4.7 ./ ClevIS wld!h CK 1A :1 6.s=+P 40 80+ Stroke ZZ+ StJoke 2 CK1B : 195!

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

ML1C

MLGP Stroke adjustment unit mounting diagram ML1C ML1C Stroke Adjustment Unit Symbol Stroke adjustment unit Intermediate fixing spacer Right side stroke adjustment unit H: With high load shock absorber + Adjustment bolt Without unit With short spacer With long spacer Spacer length SH7 SH6 SH Without unit Nil Left side stroke adjustment unit Left side Right side HH7 HH6 H HS H: With high load

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 T D1 H D2 D3 L1 L2 Max. Min.

ZSE1/ISE1

H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16/-17 I Z I Z SE1-01-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole T1

SMC Electronic Switch Series Variations

Vacuum L = Effective area H = Fixed hysteresis (3digits) H H L P2(n2) P2(n2) H H L P1(n1) P1(n1) 0 0 Time ON 0 0 Normal mode Time ON Output OFF Normal mode Output Time OFF ON Reversed mode Time Output ON Reversed mode OFF Output Time OFF Time Peak display mode 7 PZ/ISE3, Z/ISE4, 4B, 4E, Z/ISE5B, 6B PPSE100 High High Peak mode high High High Peak mode high High Pressure Vacuum Pressure Vacuum

Rotary Table/

Vertical Mounting Horizontal Mounting Model Selection Series MSQ Fr M=FrL H L G Load types M=FSH FS G Moment: m x 9.8 x H Allowable moment Thrust load: m x 9.8 Allowable load t : Rotation time (s) 1 / 2 x x 2 allowable energy = 2 / t (: Terminal angular velocity) : Rotation angle (rad) Allowable kinetic energy/Rotation time Ts (Nm) . Load type . Mounting orientation .

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 W 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 7 10 12 14 17 20 26 58 58 70 88 104 128 152 -X 20Data With low load shock absorber + Adjusting bolt MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjustment unit

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

D-A72(H) must be used with the contact protection box regardless of load types and lead wire length since it is greatly affected by loads.

Fieldbus System

B and H cannot be selected for the individual SUP/EXH spacer assembly.

5 Port Solenoid Valve

B and H cannot be selected for the individual SUP/EXH spacer assembly.

Process Valve Series VNA

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 75 125.5 52 63 72.5 80.5 80 84.5 124 144.5 26 24.3 2.3 55 42 4.5 25 28 34 14 60.5 73 1 84 100 92 108 135.5 137 153 156 172 84 90 62 72 80 90 89 95 93.5 99.5 31 36 28.3 33.3 2.3 2.3 50 60 5.5 6.5 30 35 35 40 43 49 17.5 20 151.5 Port

CG1

Bore (mm) H TC TA ZZ CP95 35 11 147 20 M5 40 11 157 25 M6 X 0.75 C95 40 11 159 32 M8 X 1.0 50 12 187 40 M10 X 1.25 C92 58 13 218 50 M12 X 1.25 58 13 218 63 M14 X 1.5 CA1 Be sure to read before handling. Refer to p.0-39 to 0-46 for Safety Instruction and common precautions.

VEX1

VEX350 2 x C (Mounting hole) Silencer (P2) 2 x M6 x 1 x 9 AN210-02 (Option: N) (Except VEX3 00) Bracket mounting thread h (Grommet terminal) i (Conduit terminal) j (DIN terminal) 5 7 g (Grommet) A (Air operated) Port size Port 3 (R) Port 1 (P), 2 (A) 2 x port size Dimensions Port size A Model B C D E F G H J K L M N O 1 (P), 2 (A) 3 (R) VEX350 , , 1 1 2 3 4 123 96 107 112 26 30 70 90 50 60