LFE-OMZ0012

2.5 depth 8.5 2 Approx. 45g LFE14(Z) 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE26(Z) 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 Approx. 70g LFE38(Z) 62 53 4.6 3.5 20 68 43 2.5 depth 8.5 2.6 Approx. 70g NOTE) If you are installing directly, choose the self tapping screw in depth is to 8mm.

DOC1001322

Indication Item Explanation Reset Data reset Set values are reset to default settings. (1) All Setting 5.4 Description of the Screen HRS Series 5-48 DOC1001322 Chapter 5 Display and Setting of Various Functions 5.4.9 Communication setting screen A screen for shifting to the following setting screens is displayed if [ ] button on the menu is pressed.

HRX-OM-W060

AL36: Maintenance alarm (2) Maintenance Operation continues during the alarm By default 5.4 Description of Screen HRL Series 5-48 HRX-OM-W060 Chapter 5 Display and Setting of Various Functions TEMP OUT signal 4. Set TEMP OUT signal.

HRX-OM-Y098

Set time: 0 secthis function is Disabled Pump operation sustainable time CH1 0 to 9sec (2) Time 0sec CH2 By default 5.4 Description of the Screen HRL Series 5-48 HRX-OM-Y098 Chapter 5 Display and Setting of Various Functions About continuous pump operation function This function allows just the pump to continue operating after some alarms are activated.

XMC/XYC Series

Specifications Model Note 1 XMC-16 XMC-25 XYC-25 XMC-40 XYC-40 XMC-50 XYC-50 XMC-63 XYC-63 XMC-80 XYC-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Double acting(Dual operation) , pressurize to open/close Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6

XMD/XYD Series

L1 L2 XMD-25 50 123 48 1 40 26 41 16 7.5 XMD-40 65 170 66 2 55 70 41 63 20 15 P.C.D 58.7 6x6.6 XMD-50 70 183 79 2 75 52 68 20 17.5 XMD-63 88 217 100 3 87 95 114 70 72 20 19.5 P.C.D 92.1 8x 8.4 XMD-80 90 256 117 3 114 110 83 98 20 26.5 D G C C K J H B Fd (K Flange) 45 Fn (KF Flange) A E Unit: mm Model A B C D E Fn Fd G H J K XYD-25 100.2 86.7 48 1 23.5 40 26 66 16 7.5 XYD-40 130 114 66 2 38

XMH/XYH Series

A E Table 6 Unit:mm Model n J XYH-25 100.2 75.8 48 1 23.5 40 26 41 21.5 XYH-40 130 102.5 66 2 38 55 41 57 30 XYH-50 178 119 79 2 53 75 52 70 35 8 XM-OMP0005-A 6.

Compact Rotary Actuator

The end angular speed is obtained by: Table8 Allowable kinetic energy Size Allowable kinetic energy mJ Cushion angle No cushion Cushion type 10 0.25 15 0.39 20 25 120 40 30 48 250 40 40 81 400 40 Allowable kinetic energy of cushion type is max. adsorption energy when the cushion needle adjustment is optimum.

Rotary Table

Allowable load a b Allowable thrust loadN Allowable momentNm Size Allowable radial load a b Basic type High precision N type 1 31 41 41 0.56 0.84 2 32 45 45 0.82 1.2 3 33 48 48 1.1 1.6 7 54 71 71 1.5 2.2 Unit used as flange mount Rotary table can be mounted from three directions-Two side of axial direction and one side of lateral face.

LEC-OM032xx

Electric actuators/Common precautions .46 14.1 Design and selection .46 14.2 Mounting.47 14.3 Handling.48 14.4. Operating environment .49 14.5 Maintenance .50 14.6 Precautions for actuator with lock.50 2 - 15.

LV50-OMQ0004

Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE14 48 39 4.6

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or

Toggle Type Air Gripper

Pressure 0.6 MPa Opening/Closing angle (Both sides) L = 150 mm Gripping force (N) Pressure 0.6 MPa F F Opening/Closing angle (Both sides) Precautions L = 180 mm Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 358 to 365 for Air Gripper and Auto Switch Precautions.

VZS2000

Option Specifications 24, 48, 110, 220 VAC (50/60 Hz) 6, 12, 48 VDC Locking type (Tool required) With light/surge voltage suppressor Note) Coil rated voltage Manual override Option Plug-in type Note) Plug-in, K plug connector type is standard with light/surge voltage suppressor.

Modular Type Regulators Series AR

Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 80 98 126 160 145.5 155 216 241 3 7 5 10 1/4 1/4 1/4 1/4 1/4, 3/8, 1/2 3/4, 1 1 , 1 2 39.5 43 75 90 46.5 85 48 52 80 90 B24P B25P 67 78 110 140 73 78.5 94.5 4 1 2 1 109.5 464 SP093-001I Issued: Sep 2009 P.G.

AW

AL AW AG AV AF800 AF900 369 Series AW10 to AW60 Series AW20K to AW60K Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa AW10 Rc 3/8 AW30(K) AW40(K)-06 Rc 3/4 M5 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 1000 Flow rate (l/min (ANR)) 0 3000 4000 1000 2000 0 150 125

VEX1

DXT170-176-2-01 DXT170-176-2-02 100 V 200 V 100 VAC 200 VAC Lead wire length Symbol Lead wire length (L mm) DXT170-176-2-03 110 V 110 VAC DXT170-176-2-04 220 V 220 VAC Nil 300 240 V 6 VD 12 VD 24 VD 48 VD DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240 VAC 6 10 15 20 25 30 600 6 VDC 12 VDC 24 VDC 48 VDC 1000 1500 2000 2500 3000 Connector with light circuit

OMS0020

(guideline) Command 2400bps 19200bps 57600bps EE 145 25 10 EU 105 20 10 AB 105 20 10 MO 245 35 15 MD 115 20 10 OE 130 20 10 Calculation Example) Number of controllers connected: 5 Required transmission commands: EE,EU, AB Communication response time ( 25 + 20 + 20 ) x 5 = 325 ms Response time (guidline) 500 450 400 Response time [ms] EE 350 EU,AB,MD,OE 300 MO 250 200 150 100 50 0 1 2 3 4

ZQ-OM01301

46 81 80 6 0.1 19 18 15 24 0.2 31 29 26 39 0.3 46 35 43 33 38 30 55 47 53 44 58 51 52 48 69 64 Standard supply pressureNote 1) 0.5 72 65 66 62 59 56 83 81 Note 1) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 12.