3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000 3 (R2) Non-locking push style (Flush) : B: Locking style (Slotted) 2 position double (A) 4 (B) 2 (A) 4 (B) 2 2 5 (R1) Metal Rubber 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R2) 3 position closed center (B) 2 (A) 4 3 5 (R1) 1 (P) 3 (R2) Electrical entry 3 position exhaust center (A) 4 (B) 2 G: Grommet (DC specification) L: L plug connector with lead wire LO: L plug terminal without connector M: M plug
Note 2) Refer to p.5.3-5 for lead wire length.
Type MHSH3-32D to 80D 6 x TA, thread depth TB 3 x UA thread depth 6 UB P .C.D.R P (Finger opening port) 3 x SA through, SB, counterbore depth SC P .C.D.R (Mounting hole) FX CB CA 3 x YA, thread depth YB P .C.D.R 20 20 30 ZB BB BC BA Open EO Closed EC (Open DO) (Closed DC) ZC VA depth VB Q O K L J WA depth WB ZA BD NB P (Finger closing port) M G NA AD AE AC AA Auto switch mounting groove
Accessories Basic Foot Front flange Rear flange Single clevis Double clevis Center trunnion Mounting P P P P P P P P P P P P P P P P P P P P P P P P P P P P P Rod end nut Standard Pin for clevis Single knuckle joint Option Double knuckle joint (with pin) Rod boot Weight/( ): Value for steel tube (kg) 40 50 63 80 100 Bore size (mm) 1.70 (1.75) 2.70 (2.76) 4.08 (4.12) 7.30 (7.46) 10.80
~dth across flats 12 \ Appllcable tube 0.0. , p MBX.ds II ~\Width across ha ls 12 A "I \ APPhcable tube 0 .0. . p A w M6 X I.25 w .. ; 8 --, 0 0 u >1 ~ j uj >l l/' ~ .L Ud I .tll II PA .8 J Flat with rib Flat with rib Deep type/ ZPR25D only Deep type/ ZPR400 only a r H Width across flats 12 '.~ 11i. .f "'I ~'--:;~m2L I T ~l 1-'--' R \ APpl;cabla luba 0 .0. , p II:I!
(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.
If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.
2 3 4 5 6 LQHB Panel mounting nut LQNP TL TIL TLM TILM P.908 Nut insert bush LQ1-U B N TD TID TH TIH P.909 Blanking plug LQ-P P.909 Tubing plug LQ1-CP P.909 Note) Basic size With reducer 869 LQ3 Series LQ3 Series P.912 Port size Tubing O.D.
C T I N G S I N G L E R O D C Y L I N D E R Double Acting/Single Rod Non-Rotating NC J2 S P E C I A L O P T I O N S NC J2 XB6 High Temperature XB7 Low Temperature XB9 Low Speed Operation A U T O S W I T C H C A P A B L E Without (Basic) D With Built-In Magnet M O U N T I N G B Basic D Double Clevis (Except 6) L Axial Foot F Rod Side Flange T E C H N I C A L SPECIFICATIONS Fluid Air S T D
R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.
LED() /P.19 5. /P.21 6.CN1: 1 LED ->/P.19 5. ->/P.32 10.1 CPU -> CPU L RUN()L ERR() L RUN L ERR 2 / L RUN()L ERR() CC-Link ->/P.28 8.LED ->/P.77 17.C-Link 3 ALM ->/P.71 16. USB USB PC USB USB LEC-W2 COM PC COM COM COM COM PC COM LEC-W2 4 (LEC-W2) (LEC)== =USB =PC (LEC) OFF PC (LEC) (PLC )(PC ) 90 - ONOFF PLC ->/P.32 10.1 ->/P.12 3. ->/P.19 5.
Exploded view: VQ1000-Plug-in Unit (F, P, J, L, Skit) . Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .
JIS B2401G35 3 pcs. 56 Series AMF Dimensions AMF150C to 350C P Q T S R F E D N Bracket L U (Accessory) O K G M V W J B OUT IN C I A Maintenance space (mm) A Model Port size Bracket related dimensions B C D E F G I 98.5 N 56 J 20 K 5 U 6 V 6 L 12 M 6 W 10 O 35 P 70 Q 26 R 54 S 4.5 T 1.6 AMF150C AMF250C AMF350C 10 54 63 7.5 63 10 1/8, 1/4 83 14 73 76 5 76 10 121 66 24 8 6 6 12 6 10 40 80 28
L DIN rail AXT100-DR-l 5.25 12.5 (Pitch) 7.5 For l, enter a number from the No. line in the table below.
High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for
Unit AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (accessory) K M Square embedded type pressure gauge (accessory) Port size N Min. clearance for maintenance Drain Drain D Air filter Mist separator Regulator AC25C, 30C, 40C A Q G F E T Pressure gauge port size L P H B C OUT IN U H L Pressure gauge (accessory) K M Square embedded
B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.
0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !
0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Body Zinc die-casted r u !
(A) L (B) P C D M Q Purge air for H dew point indicator J F K 37 N IN OUT (G) (E) (Maintenance space 100 mm or more) M5 female thread Drain P (A) IDG30AM2, 50AM2 IDG30HAM2, 50HAM2 IDG30LAM2, 50LAM2 (B) P D C Purge air for L Q H dew point indicator M J 37 F Drain Discharge N With float type auto-drain IN OUT OUT (R) K (E) N.O.: Black N.C.: Gray (G) Applicable tubing O.D.: 10 (NPT threads: