Piping: ø4, ø5/32" One-touch Fitting, Straight Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: ø6 One-touch Fitting, Straight Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: ø6 One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: ø1/4" One-touch Fitting, Staight Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: ø1/4" One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: ø4, ø5/32" One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: NPT 1/8, M5 Female, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: NON + T, Made to Order: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: NPT 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter, Option 3: Operation Manual, Calibration Certificate

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: ø6 One-touch Fitting, Straight Type, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter, Option 3: Operation Manual, Calibration Certificate

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

VQ5000

, 4(A), 2(B) port M5 ground screw SMC 26.5 16 4(A), 2(B) port 31.5 37 41 50 98 G1/2 Electrical entry PE X P R1 R2 18.4 18 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5600 1 2 position double: VQ5200 1 3 position closed center: VQ5300 1 3 position exhaust center: VQ5400 1 3 position pressure center:VQ5500

CG5-S

(mm) Connection threads Connection threads Model Model KGU04-M5 M5 x 0.8 M5 x 0.8 KGT04-M5 4 4 -01 R 1/8 R 1/8 -01 -02 R 1/4 R 1/4 -02 KGU06-M5 M5 x 0.8 KGT06-M5 M5 x 0.8 -01 R 1/8 R 1/8 -01 6 <M5 type> 6 <M5 type> -02 R 1/4 R 1/4 -02 -03 R 3/8 R 3/8 -03 KGU08-01 R 1/8 R 1/8 KGT08-01 8 8 -02 R 1/4 R 1/4 -02 -03 R 3/8 R 3/8 -03 KGU10-02 R 1/4 R 1/8 KGT10-01 10 -03 R 3/8 R 1/4 -02

Combination Cylinder

5 5.5 5.5 6 10 14 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 24 29 35.5 44 8 10 12 16 6 8 ZZ With rod boot W Without rod boot ZZ e f h l Bore (mm) Stroke range H1 P PG PH PL PW S TA TB TC WA WW WB WH H 20 25 32 40 M5 M5 Rc(PT)1/8 Rc(PT)1/8 30 30 25 20 141 151 10 10 20 24 24 24 38 41 41 41 154 169 5 6 6 8 33 38 39 44 19.5 24 24 24 11 11 M5 M6 X 0.75 M8 M10 X 1.25 86 96 97 5.5 7 7 9 15 15 15 15 23

3 Port Air Operated Valve Series SYJA300 1

x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

MPa (2) 0.05 to 0.83 MPa 5 to 60C (No freezing) (3) 1 8 0.16 0.46 0.72 0.83 5.5 5.1 12 11 M5 x 0.8 Rc P A P B A EA B EB 21 18.5 11 35 31 26 18.5 22 12 31 31 40 55 36 45 24 44 38 32 38 40 90 77 31 Effective area at exhaust side (mm 2) S at P2 = 0.5 MPa Flow Characteristics (P A) (Condition: Inlet pressure 0.7 MPa when 2 position solenoid valve is mounted.)

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

VQ VQ4 VQZ VQD VZS VFS VS VS7 1.13-9 Series VQD1000 Dimensions Plug lead unit manifold(VV4QD12-l) Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15

CL

The series and their stopping accuracy are as follows: CLJ series (p.3.1-10), CLM2 series (p.3.1-18), CLG1 (p.3.127), CLA series (p.3.1-35), and CL1 series (p.3.1-50). wWhen kinetic energy acts upon the cylinder, such as when effecting an intermediate stop: There are constraints in terms of the allowable kinetic energy that can be applied to the cylinder in a locked state.

REC

Lead wire length* (m) Load voltage Auto switch model Electrical entry Indicator Wiring (Output) 3 (L) 5 (Z) Applicable load Special function Style 0.5 () (N) AC DC P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P C76 IC circuit P P P P P p p p P p p p p p p p P P P P P P P P 3 wire (Equiv. to NPN) 5V Yes C73 100V 12V Relay PLC C80 IC circuit No 100V

MY1

(Refer to P. 1365.)