VK300

(Values at the initial period) VT VP VG Solenoid Specifications VP Grommet (G), DIN terminal (D) 100, 110, 200, 220, 240 6, 12, 24, 48 10% of rated voltage 9.5 VA/50 Hz, 8 VA/60 Hz 7 VA/50 Hz, 5 VA/60 Hz 3.5 VA/50 Hz, 3.3 VA/60 Hz 3 VA/50 Hz, 2.8 VA/60 Hz 4 W (Standard), 2 W (Low power consumption type) 4.3 W (Standard), 2.3 W (Low power consumption type) Varistor Diode (Varistor for 12 VDC

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 210VAC (50/60Hz) 24VDC 12VDC Port size Contact P/A regarding other voltages.

VNC

1 2 3 4 5 6 7 9 Coil rated voltage 1 2 3 4 5 6 7 9 Light/surge voltage suppressor Non-locking push type Non-locking extended type Locking slotted type 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other VC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil S Z None With surge voltage

D-F6N/D-F6P/D-F6B

Weight (g) Auto switch model D-F6N D-F6P D-F6B 20 0.5 m (Nil) 19 3 m (L) Lead wire length 53 50 5 m (Z) 80 75 Dimensions (mm) D-F6 D-F6B 8.5 (22) 3.2 Indicator light (24) 16 Most sensitive position 7 2.7 10.6 7 29 D-F6N/F6P DD(22) 3.2 Most sensitive position 7 1609 Auto Switches Precautions 1 Be sure to read this before handling.

asilltr

D-A73, D-A80 D-A72H, O.A73H, O.A76H, D-A8OH, D-F7NTL, D-F7P, D-F79, D.F79W, O-J79, D..t79W D-Fltr WV, D-F7tr V t,.A73C, D-A80C, D-J79C op6drirE ElE6 (* lid be*rw) I, Dimensiltn / Operating Range Series NCDQT Solid.

Air Cylinder NCQ7 Series Compact Cylinder

D-A73, D-A80 D-A72H, O.A73H, O.A76H, D-A8OH, D-F7NTL, D-F7P, D-F79, D.F79W, O-J79, D..t79W D-Fltr WV, D-F7tr V t,.A73C, D-A80C, D-J79C op6drirE ElE6 (* lid be*rw) I, Dimensiltn / Operating Range Series NCDQT Solid.

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

ITV

side. 50 56 D side U side 1 2 stations 50 9 3 (8) Dimensions in inch are noted in parentheses. 6.5 6.5 1 1 82 89.5 SUP, VACzport 3 3 (6, 1/4") 40 40 EXH, ATMcport 25 25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 14-8-8.

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

Series AS-FM/AS-M/ASD-FM

Dimensions Inch sizes Metric sizes L3 Model L3 Model Weight g Weight g M1 d M1 L2 D2 D1 L1 D2 L2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 6 7 8 9 12 18 21 24 26 31 AS1001FM-01 AS1001FM-03 AS1001FM-05 AS1001FM-07 AS2001FM-03 AS2001FM-05 AS2001FM-07 AS2051FM-05 AS2051FM-07 AS2051FM-09 3.2 4 6 4 6 6 8 4.5 5.2 38 39.2

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

System construction status No.0 No.1 No.2 No.3 No.4 No.5 No.6 No.7 No.8 No.9 End EX600 EX600 EX600 EX600 EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -SEN3 plate -LAB1 -LAB1 -LBB1 -LBB1 -127No.EX-OMX1011 (6) When unit diagnostics is generated, the diagnostic information is displayed on the [SYSTEM CONFIGURATION STATUS] screen.

Thermo-chiller

) Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) 1.8 (1.0) Circulating uid system Rated ow 50/60 Hz (Outlet) Note 6) 11/14.8 gal/min (42/56 L/min) Maximum ow rate 50/60 Hz 14.5 to 17.9 gal/min (55/68 L/min) Maximum pump head 164 ft (50 m) Minimum operating ow rate 50/60 Hz Note 7) 7.4 to 11.0 gal/min

MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

LFE-OMY0008

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Rated voltage G: Grommet (Lead wire length: 300 mm) D: DIN terminal DO: DIN terminal H: Grommet (Lead wire length: 600 mm) 50 60 1 2 3 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 240 VAC, Hz Other (Without connector) 50 60 50 60 50 60 4 5 6 7 50 60 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9W D-A9 A A B B Bore size 6 10 16 (4.5) 5.5 (4.5) 5.5 (0.5) 1.5 (0.5) 1.5 (5) 6 (5) 6 (1) 2 (1) 2 (5.5) 6.5 (5.5) 6.5 (1.5) 2.5 (1.5) 2.5 The values in ( ) are measured from the end of the auto switch mounting bracket.

PSxx-OMU0002CN

0 56[F97] <> [F 5] FUNC FUNC FUNC [ASin]( ) [AoUt]( ) [CoPY]( ) -39No.PS-OMU0002CN-D OUT1 OUT2 OUT1 OUT2 [F 5] FUNC 5ms ASin ooo1 C_5 5ms ASin o.r1 ( ) C_5(43 ) C_5 -105.0105.0 kPa -210210.0 kPa -0.1051.050 MPa -1.1551.155 MPa 10.0-105.0 kPa -115.0115.0 kPa -40No.PS-OMU0002CN-D [F 6] 5R.D. <> [F 6] [F 6] -41No.PS-OMU0002CN-D [F10] <> [F10] OFF OUT1 OUT2 [dUAL] ()

Wireless System

Cable core wire colors Brown White Blue Black Green/Yellow 1 2 3 4 5 Connections 19 Accessories EX600-W Series u Power Supply Cable with M12 Connector (B-coded) SPEEDCON PCA1564927 Socket specification, Cable length (L) 1564927 Straight 2 m 1564930 Straight 6 m 1564943 Angle 2 m 1564969 Angle 6 m Straight connector type Angle connector type 50 L 36.3 14.8 50 L 44.5 2 1 5 2 1 5 28 5.9 M12

HRS100/150

Note 1) C 5 to 35 Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) C 1.0 Circulating fluid system Rated flow 50/60 Hz (Outlet) Note 6) L/min 42/56 Maximum flow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating flow rate 50/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating fluid