ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 13-9-9 10 Series ZQ Manifold Exploded View 6 3 6 4 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

Fluoropolymer Tubing Variations

(mm) KQB2 TD0604 6 4 TD0806 8 6 Translucent (material color) Refer to the applicable fluid in page 511.

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8

Ejector Valve Unit, Series ZYY/ZYX

characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics -100 -100 -100 -100 Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) -80 -80 -80 -80 Vacuum pressure Vacuum pressure Air consumption -60 60 60 -60 -60 -60 Vacuum pressure kPa Vacuum pressure kPa Vacuum pressure kPa

VCA

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 VX3 L VXA K 2-M Thread depth 6 2-M Thread depth 6 K VN LVC LVA LVH DIN terminal: D Conduit terminal: T LVD F F (Q) Q S 34 LVQ D LQ LVN U 25 R C 44 TI/ TIL C R G1/2 PA E E G1/2 PAX B B 2-P Port size A A D 2-P Port

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

C6: One-touch fitting for 6 D side VQD Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D 1 set (F kit 9 station manifold base) SQ1130-5-C6 4 sets (2 position single) SQ1230-5-C6 4 sets (2 position double [latching]) SSQ1000-10A-3 1 set (Blanking plate) The asterisk denotes the symbol for assembly.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

System construction status No.0 No.1 No.2 No.3 No.4 No.5 No.6 No.7 No.8 No.9 End EX600 EX600 EX600 EX600 EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -SEN3 plate -LAB1 -LAB1 -LBB1 -LBB1 -127No.EX-OMX1011 (6) When unit diagnostics is generated, the diagnostic information is displayed on the [SYSTEM CONFIGURATION STATUS] screen.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

PA3000/5000/PAX1000

Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

air-filter-e

Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S BT-3S Replacement Parts *BLUE links will lead to purchase pages. 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

Air Preparation Equipment

Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S BT-3S Replacement Parts *BLUE links will lead to purchase pages. 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

CE2

For detailed specifications, refer to page 10-20-1. 50 7 63 9 80 9.5 100 10.5 CV D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G39/K39 D-G39C, D-K39C MVGQ Electrical entry (Fetching direction) D-A53/A56 D-A64/A67 D-B64 D-Z80 D-F59/F5P/J59 D-F59W/F5PW/J59W

RB/RBL/RBQ

10 12 16 18 D M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 H 3.5 4 4 5 5 F C 22 27 32 41 41 MM K 4 7 8 8.5 13 RBQC1604 RBQC2007 RBQC2508 RBQC3009 RBQC3213 RBQ1604 RBQ2007 RBQ2508 RBQ3009 RBQ3213 14.2 18.2 23.2 28.2 30.2 14 18 23 28 30 7 9 10 12 13 31 44.5 52 61.5 76 27 37.5 44 53 63 25.4 31.2 37 47.3 47.3 6 6 6 6 6 RS H A RZQ MI W S Replacement Parts Hexagon Nut Option CEP1 (2 pcs. standard

HRX-OM-T004

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-R028

Communication alarm function . 6-1 6.1 Communication alarm occurs .6-1 6.2 Communication alarm reset.6-2 6.3 Setting and checking.6-2 6.3.1 Setting and checking items.6-2 6.3.2 Setting and checking.6-3 HRSH Series HRX-OM-R028 Chapter 1 Read before using Chapter 1 Read before using The communication of this device consists of contact input/output communication and serial communication.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

45 41 75 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 19.5 19.5 15.5 . 40 40 34 17 17 13 60 60 60 40 32 25 20 20-0.033 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 22 200 to 1000 32-0.039 0 66 21 52 247 217 204 200 191 P S H2 H1 Bore size MM 8 6 6 5 N I K ZZ Z NN NA Stroke range 40 32 25 20 26.5 22 20 20 51 42.5 34.5 30 236 181 159 146 146

SFOD-OMT0009CN

B6 5 A6 B1 A1 2 1 B3 A3 (d) (5.7) 15 16 L (11) (30.7) (c) 10.6 [820m] (a) (b) LE CP *B 2 A B-1 1 A A-1 L 6 B B-2 5 ) 8 8m B A-2 3 COM-A/COM B-3 ) 4 A 10m COM-B/A-3 (c) ) B 15m Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 ) 7 A A-5 6 () B B-6 9 B A-6 8 3 (d) + B-1 4 A-1 5 + B-3 1 A-3 2 2 1 (5.5) (14) (a) (6.3) B1 A1 (17.7) 5 6 (14.2) (b) A6 B6 (c) (10.2) 2 1 B1 A1 (18)

JXCx-OMT0001CN

2 A A-1 1 L B B-2 6 B A-2 5 ) 8 8m COM-A/COM B-3 3 ) COM-B/ A-3 4 A 10m (c) ) B 15m Shield Vcc B-4 12 ) C 20m GND A-4 13 A B-5 7 ) A A-5 6 B B-6 9 () B A-6 8 3 (d) 4 + B-1 5 A-1 1 + B-3 2 A-3 2 1 (5.5) (14) (6.3) (a) B1 A1 (17.7) 5 6 (b ) (14.2) (c) A6 B6 (10.2) 1 2 B1 A1 B3 A3 (d) (18) (5.7) 15 16 L (11) (30.7) -83No.JXC-OMT0001CN-C 12.7 JXC-W1 (1) (CD-ROM) JXC-W1-

HRX-OM-Z015

EC01h 4 Perform (6) for 3rd. value (0h) and then, perform (5). C02Dh Calculation 5 Perform (6) for 4th value (0040h) and then, perform (5). ED01h 6 Perform (6) for 5th value (0h) and then, perform (5). C02Ch 7 Perform (6) for 6th value (0001h) and then, perform (5). 1D00h 8 Perform (6) for 7th value (0002h) and then, perform (5).