Table of Contents

I SE3 55 4.5 11.5 40 15 PS 4.5 Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6.5 1.6 ZSP 20 41.5 ZS-24-A Bracket A View A ISA2 IS Bracket D ZSM A PF2 30 20 IF Data 20 45 55 4.2 4.5 40 11.5 15 7.2 7.5 1.6 41.5 35 22 ZS-24-D Bracket D View A Cutting dimensions

Rotary Actuator/Vane Type

The angle is 60 when any of the following are used: D-90/90A/97/93A The angle is 69 when any of the following are used: D-S99(V)/T99(V)/S9P(V) 67 A Free Mount Type Rotary Actuator Vane Type CRBU2 Series Size: 10, 15, 20, 30, 40 RoHS How to Order S E y CRBU2 20 180 Z W CDRBU2 S 20 180 L Z M9B W With auto switch q e w !

CL

MXQ 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) 40 Auto switch model 50 63 80 100 125 140 160 Foot Rod side CA-L04 CA-L05 CA-L06 CA-L08 CA-L10 MXF CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NT D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BA D-G5W/K59W D-G59F/G5NT D-A3C/A44C D-G39C/K39C Head side CA1-L04 CA1-L05 CA1-L06 CA1-L08 CA1-L10 BT-04 BT-04 BT

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

10.5 11 16.5 19 18 A 17 12 10 12.5 B 12.5 18 20.5 19.5 12 16 20 25 32 40 50 63 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W D-F7BAL D-F79F D-F7NTL D-A73C D-A80C D-F7V D-F7WV D-F7BAVL D-A7 D-A80 D-M9V D-F9WV D-A9V Bore size (mm) D-J79C D-A79W D-P5DWL D-F9BAL U 27 30.5 36.5 40 U 29 32.5 38.5 42 U 26.5 30 36 39.5 U 44 50 56.5 U 26.5 29.5 31.5 34.5 38.5 42 48 54.5 U 20.5

Modular F.R.L. Unit

E G P 2 1 6 8 C J R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

When rod end female thread is used, use a thin wrench when tightening the piston rod. 708 Series CM2W-Z 10-/1121-/2220, 25, 32, 40 Double Rod Cylinder RoHS How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 W L 40 150 F Z M9BW 21 C D M 2 W L 40 150 F Z M9BW Nil Built-in magnet Number of auto switches No Cylinder stroke (mm) D With auto switch (Built-in magnet) Nil

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

pilot port) (Lead wire length) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 75.4 [82.4] 34.5 17.5 15.5 96.5 44.5 29.5 29.5 3/8, 1/2 [1(P), 5(EA), 3(EB) port] L plug connector (L): 10-SY9 40(R)-LM plug connector (M): DIN terminal (D, Y): 10-SY9 40(R)-WO3 4 5 M8 connector (WO): 3 4 5 3 4 5 3 4 5 D Y 10-SY9 40(R)10-SY9 40(R)

REA/REB

D-F7V D-A73/A80 D-F7NTL D-A73/A80 D-F7NTL 40 6 3.5 4.5 Bore size (mm) D-F79F D-F7BAL Note) Operating ranges are standards including hysteresis, and are not guaranteed.

15

Operating Range Auto Switch Mounting Bracket (Switch spacer) Auto switch model Bore size (mm) 6 to 40 Auto switch model Bore size (mm) 6 10 15 20 25 32 40 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 3 3 2.5 2.5 3 2.5 3 BMY3-016 D-A9 D-A9V D-A9 D-A9V 5.5 5.5 5.5 5.5 5.5 5.5 6 Note) Values which include hysteresis are for guideline purposes only, they are not a

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) Z: Positive common specifications only.

MG

Hs Operating Range Applicable bore size (mm) Auto switch model 100 80 63 50 40 32 25 20 16 D-Z7/Z80 12 11.5 11.5 10.5 10.5 10.5 10 10 10 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 10 9.5 8 7 6 6.5 7 7.5 7.5 D-Y7BAL 6.5 6 6 6 6 6 5 5 5 4 4 5 4 4 D-P5DWL Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

CJ2

D-A80 D-A73C D-A80C NCM 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 NCA D-A7H D-A80H Band mounting style (6, 10, 16) DD-H7 D-H7W D-H7BAL D-H7NF Rail mounting style (10, 16) D-A79W -X D-F7 D-J79 20D-C73C D-C80C D-H7C Data D-F7V D-J79C D-F7W D-J79W D-F7BAL D-F79F D-F7WV D-F7BAVL

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

-X CXS -R 10 15 20ZZ SS Z Data (Z) Manual lever insertion 1.7 K KK Hexagon (O) (Z) (mm) O K Model CXS10-R CXS15-R Width across flats 12 6.5 8.5 Width across flats 13 (mm) Symbol ZZ Z SS KK Stroke 50 40 30 20 50 10 10 50 40 30 20 40 30 20 10 10 20 50 40 30 Model CXS10-R CXS15-R 24.5 40 50 142 132 117 107 125 30 115 100 80 19.5 97 90 45 Dimensions other than those listed above are the same

CNA

switch model D-A44 D-A44C D-F5 D-J59 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5/A6 D-F5W D-J59W D-F5BAL D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W D-A3/A3C D-A44/A44C D-G39/ G39C D-K39/K39C D-B5/B6 Bore size (mm) Bore size (mm) A B A B A B A B A B A B A B Hs Hs Hs Ht Hs Hs Ht Hs Hw Hs Hw 31 40 40 40 9.5 81 2 10.5 0 72.5 31 4 2 8.5 69 0 0.5 11.5 1.5 38 73 69 38.5 0 0 80.5 3.5 35 43.5

CNA

switch model D-A44 D-A44C D-F5 D-J59 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5/A6 D-F5W D-J59W D-F5BAL D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W D-A3/A3C D-A44/A44C D-G39/ G39C D-K39/K39C D-B5/B6 Bore size (mm) Bore size (mm) A B A B A B A B A B A B A B Hs Hs Hs Ht Hs Hs Ht Hs Hw Hs Hw 31 40 40 40 81 9.5 2 10.5 0 72.5 31 4 8.5 2 69 0 0.5 11.5 1.5 38 73 69 38.5 0 0 80.5 3.5 35 43.5

3

MKF40-Z MKF50-Z MKF63-Z Arm 396 MK Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at Stroke End) and its Mounting Height 12 16 When mounted When mounted a) b) a) b) D-M9 D-M9W D-M9A D-A9 D-M9V D-M9WV D-M9AV D-A9V MK MK MK2T CK1 CLK2 CLKG CKQ CLKQ Auto Switch Proper Mounting Position (mm) Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-M9AV D-A9V

REA/REB

MK(2) 25 to 40 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model RS Q G D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) RS H A 25 18 99 43 74 74 99 43 18 32 RZQ 21.5 46.5 46.5 83.5 83.5 108.5 108.5 21.5 40 23.5 48.5 48.5 99.5 99.5 124.5 124.5 23.5 MI W S Operating Range CEP1 Bore size (mm) Auto switch model

REA/REB

MK(2) 25 to 40 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model RS Q G D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) RS H A 25 18 99 43 74 74 99 43 18 32 RZQ 21.5 46.5 46.5 83.5 83.5 108.5 108.5 21.5 40 23.5 48.5 48.5 99.5 99.5 124.5 124.5 23.5 MI W S Operating Range CEP1 Bore size (mm) Auto switch model

Cylinder with Lock

1 60 70 85 110 115 120 D-Y59 D-Y7P D-Y7W D-Z7 D-Z80 2 (Different surfaces, same surface) 1 80 85 90 95 100 n 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 100 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 60 65 70 75 85 D-Y69 D-Y7PV D-Y7WV n 60 + 30 (n 4) 2 (n

High Vacuum Angle Valve

D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.