Magnetically Coupled Rodless Cylinder

, z + A = 100 y, z + A a 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A =

•

L Y 0 __D . .

E-ITV-STD-RF-A

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

YZ VFS1320-D/DZ/Y/YZ VFS1420-D/DZ/Y/YZ VFS1520-D/DZ/Y/YZ Lead wire O.D.

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

PFxx-OMY0005

Data for the sub screen display (Page 89) 2000 0x07D0 0 R/W Sub (Sub screen display) U8 0 Y 2020 0x07E4 0 R/W rEv (Reserved display) U8 0 Y 0: Normal display 1: Reversed display 1 R/W Zero Cut(Flow) U8 1 Y 0 to 10 Zero cut-off setting 1.0% increments 2030 0x07EE 2 R/W Zero Cut (PrES) U8 0 Y Mes disp/hide_PrES (Measurement display/ hide_pressure) U8 0 Y 0: diSP (displayed) 1: HidE (hidden)

Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: Y Applicable shaft types: S, Y CRA1 (mm) (mm) X Y Size Size CRQ2 50 50 24.5 to 39.5 24.5 to 39.5 28 to 45 28 to 45 63 63 MSQ X = X = X = Y = Y = Y = Y = Y = 30.5 to 53.5 30.5 to 53.5 80 80 MSZ 40 to 65 40 to 65 100 100 Symbol: A51 Symbol: A52 Shorten the long shaft. CRQ2X MSQX Shorten the long shaft.

Compact Cylinder

Flange bracket material: Carbon steel Surface treatment: Nickel plated 18 Series CQ2 Accessory Brackets Single Knuckle Joint Double Knuckle Joint I-G012, I-Z015A I-G02, I-G03 I-G04, I-G05 I-G08, I-G10 Y-G012, Y-Z015A Y-G02, Y-G03 Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Surface treatment: Nickel plated Material: Cast iron Surface treatment

MGG

(mm) Q R X Y + Stroke Y Q R X Bore size (mm) 32 86 (94) 25 13 39 40 96 (105) 29 14 46 50 109 (121) 31 15 57 Dimensions inside ( ) are for long strokes.

VFS

YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

NCQ2/CQ2

Mounting and Auto Switches Made to Order 177 Compact Cylinder Series (N)CQ2 Mounting Brackets Accessory Brackets Single Knuckle Joint Double Knuckle Joint I-G012, I-Z015A I-G02, I-G03 I-G04, I-G05 I-G08, I-G10 Y-G012, Y-Z015A Y-G02, Y-G03 Y-G04, Y-G05 Y-G08, Y-G10 ND Hole H10 Axis d9 ND Hole H10 Axis d9 NDH10 MM MM NDH10 NX MM MM L RR1 RR1 RR1 RR1 E1 E1 E1 E1 NX A1 U1 A1 U1 A1 U1 A1 U1 NX

Table of Contents

1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Digital Gap Checker ( compatible)

U8 0 Y 2420 0X0974 6 R/W 6 th letter (11seg) U8 0 Y 7 R/W 7 th letter (11seg) U8 0 Y 8 R/W 8 th letter U8 0 Y LINE name 9 R/W 9 th letter U8 0 Y 1 R/W 1st dot (left side) U8 0 Y 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y 4 R/W 4th dot U8 0 Y 0: OFF (dot OFF) 1: ON (dot ON) 2430 0X097E 5 R/W 5th dot U8 0 Y 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y -100No.PS-OMW0009-C 4

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note) Block pin (2 pcs.) is attached for q, e, t, y.

Table of Contents

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

Environment

1 y i o !

ZP3

Type/ZP3-Y ZP3-Y(J/K)-B ZP3-YJP-B ZP3-YK(15/20)-B ZP3-Y-(02/04/06) ZP3-Y-(U2/U4/U6) Vacuum inlet o o y y t t Vacuum inlet u u i y t Component Parts u No.

ZP

dia. 1 02 to 08 2 10 to 16 Lock ring 3 20 to 32 4 40, 50 Pad N6 A8 4 ZP Y Pad [q Type Y adaptor] With buffer ZP 50 K20 Y A14 U6 UGN [Pad model no.]