CC-Link-E

S. a EX. ) To set pressure at 0. 3M Pa by I TV2030( f or 0. 5M Pa t ype) ( 0. 3M Pa/0. 5M Pa) 40952457D EC999( H EX) A pressure of 0. 3M Pa i s set by sendi ng i nput dat a of 999 t o t he el ect ropneum at i c regul at or t hrough t he m ast er PLC. Com m uni cat i on dat a al l ocat i on For "1" t he num ber of t he st at i on.

Multistage Ejector Series ZL112/212 1

90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

MGC

Note 1) Common with cushion ring A: Except standard 20 and 25 Note 2) Common with cushion packing A: Except standard 20 and 25 Seal kit includes rod seal $1, piston seal $2, tube gasket $3, valve seal $4 and gasket for valve retainer $5.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

3 Port Solenoid Valve Metal Seal Series VZ200 1

BG-VZ402 BG-VZ403 VQ VKF BG-VZ405 VQZ How to Order Manifold Base VZ 1 06 30 VV3Z4 VS VFN A port size on base side Series VZ400 Manifold Model Symbol VV3Z4-S50 VV3Z4-50 Symbol Stations Symbol Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) 01 02 Rc 1/8 1 Common Common Top, Side Type 20, 30 and 50

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

D2 D3 L1 L2 L3 L4 M1 L5 Weight T D1 H(1) D2 D3 L1 L2 L3 L4 M1 L5 H(1) A(2) A(2) AQ Weight (g) (g) Model Min.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

1/4 R 1/4 R 1/4 R 1/4 14 14 14 14 20 20 20 20 14 14 14 14 D 2 A Connection thread H1 L1 Copper extension nozzle: KNL (mm) Model Nozzle size D Outside diameter L1 Outside diameter KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 1.5 2 1.5 2 6 6 6 6 300 300 600 600 D L1 Note) When a copper extension nozzle is ordered separately, a self-align fitting will also be required for connection with

IDX-OM-Z004

-30-W K16K (10, 0.7m) () (10, 2m) JIS 80A 10K (10,0.7m) ) (10 ( (K16K) JIS 80A 10K 2m) 20 18 t 268 217 t 20 18 t 8x23 8x19 A A 8x23 8x19 20 4x 75 A 1056 A 720 9351 1290 160 150 150 160 t K K K K K16K JIS 80A 10K 64 (17) 17) 40 (K16K) 1823) (18~23) JIS 80A 10K 479 127 1332 1432 1,3 -W4 (-W4) -W4 Y3/4 (-W4) Y 3/4 () () R3/4 R3/4 20 50 165 475 9902 1030 950 (-W5)

3-Position Rotary Table

Adjusting angle per rotation of angle adjustment screw Adjustment bolt a, b (End position adjustment) Adjustment bolt c, d (Center position adjustment) size 5.1 10.2 10 20 30 50 D9.0 3.6 8.2 3.3 4.1 8.2 A piping, speed control, and angle adjustment manual is attached to the product. 295 MSZ Series Construction @8 !5 !3 @0 !7 @5 !1 #0 t u r w @3 !

Ejector Valve Unit Series ZYY/ZYX 1

-A ZS-20-5A55 Note) When ordering a switch with 5 m lead wires, enter the part numbers for both a switch without connector and lead wires with connector.

Compact Electric Actuator Series LG1

A A B Section BB PCD Thread Coupling Motor 28.3 10.5 30 8 26 32 6 0.5 Section AA (Housing interior) Coupling mounting dimensions 11 Series LG1H Nonstandard Motors/Matsushita Electric Industrial Co., LTD Drivers Dimensions 5.2 150 160 168 5.2 20 A 105 3 Summary of input /output signals (connector CN-1/F) Dimension table Pin No. 1 2 3 4 5 6 7 8 9 10 11 Pin No. 12 13 14 19 20 21 22 23 24 25

AC Servo Motor Driver (MECHATROLINK-III type)

65536 H 30 1875 LEFS40 A 20 1250 B 10 625 LEFB25 S 54 3375 LEFB32 S LEFB40 S LEJB40 T 27 131072 3375 LEJB63 T 42 2625 H 24 1500 LEJS40 A 16 1000 LEJ B 8 500 65536 H 30 1875 A 20 1250 LEJS63 B 10 625 *The travel distance of the actuator per 1 pulse should be 1 [m/pulse]. 25 - 4.5 Positioning Completed Width This signal indicates that servomotor movement has been completed during position control

AC Servo Motor Driver (MECHATROLINK-II type)

65536 H 30 1875 LEFS40 A 20 1250 B 10 625 LEFB25 S 54 3375 LEFB32 S LEFB40 S LEJB40 T 27 131072 3375 LEJB63 T 42 2625 H 24 1500 LEJS40 A 16 1000 LEJ B 8 500 65536 H 30 1875 A 20 1250 LEJS63 B 10 625 *The travel distance of the actuator per 1 pulse should be 1 [m/pulse]. 26 - 4.5 Positioning Completed Width This signal indicates that servomotor movement has been completed during position control

F

O O R D E R (N)AS S E R I E S W I T H O N E-T O U C H F I T T I N G S 1F NAS A R E A C O D E A P P L I C A B L E T U B E OD Japan, Asia, Australia, UK N Canada, USA MM 23 3.2 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 B O D Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03

Body Size: 1 1/2, Valve Type: For Vacuum and Low Pressure, Port Size: 2, 50A, Thread Type: NPTF

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 3,900 / 4,300, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 5000, Supply Side Connection Type: [Rc (R)] R, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1, Control Side Connection Type

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 1,220 / 1,320, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 2000, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/4, Control Side Connection

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 1,650 / 1,820, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 2000, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/4, Control Side Connection

Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 2,800 / 3,100, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 5000, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1, Control Side Connection

Size: 37 [6.1m³/min (ANR), 215.4.scfm], Voltage: 20 [200VAC (50Hz), 200/220VAC (60Hz), Single Phase], Option 1: None, Option 2: Terminal Block for Run & Alarm Signal