REA/REB

CE1 1.67 7 7 CE2 9 ML2B 3.14 9 9 C J G5-S After adjusting the stroke, replace the top covers and dust covers.

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Free Mount Cylinder Series CU

Applicable bore size (mm) d MU H1 B1 C1 M3 x 0.5 1.8 5.5 6.4 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M4 x 0.7 2.4 7 8.1 M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 (mm) Bore size (mm) A A' B C D E F FL FK FY GA GB H J L MM K 6 10 16 20 25 32 7 10 11 12 15.5 19.5 12.5 14 18 22 13 15 20 26 32 40 22 24 32 40 50 62 3 4 6 8 10 12 7 7 7 9

CA2

7 !8 !

MY1

4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 7.15 x 3.75 x 1.7 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 8.3 x 4.5 x 1.9 C-7 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 Note) Two types of dust seal band are available.

Air Cylinder

7 CJ1 CJP CJ2 !5 !4 @ B @ C !3 JCM CM2 CM2 CM3 CG1 Boss-cut Integrated clevis CG3 Air-hydro !7 JMB MB MB1 CA2 CS1 With air cushion !7 CS2 Component Parts No.

EX120/121/122

R C US US C R R R R R R R US C US C US C US C US C US C TYPE1 SERIAL NO.

SMC offers a variety of pressure gauges?including general purpose,?oil-free/external parts copper-free with limit indicator, clean series and a pressure gauge with a pressure switch.? Pressure ranges vary from 0 to 1.5MPa, depending on the selected gauge.? Panel mounting is possible.General purpose gauge w/limit indicator , Back or vertical side thread , Indication precision: ?3% F.S. (full

Air Cylinder Series CA2

7 r !4 !8 !6 !2 t u !5 o !1 !

Electric Actuators

(5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

Air Cylinder Series MB

7 !

CQS

Foot or Flange style: Body mounting bolt Double clevis style: Clevis pin, type C snap ring for axis, Body mounting bolt CQS-L025 7-4-37 38 Weight/Without Auto Switch (g) Made to Order Specifications (For details, refer to page 7-10-1.)

Air Cylinder

[mm] Auto switch model Bore size 6 10 16 Auto switch mounting Auto switch model Bore size [mm] 6 10 16 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV 2 2.5 3 D-M9l D-M9lV D-M9lW D-M9lWV D-A9l D-A9lV Band mounting D-A9l 4.5 6 7 D-H7l/H7lW D-H7BA/H7NF 3 4 4 BJ6-006 (A set of a, b, d, f) BJ6-010 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) D-H7C 5 8 9 D-C7l/C80/C73C/C80C 6 7 7 D-M9lA 2 D-M9lAV2

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

6 12 VDC C 7 240 VAC, 50/60 Hz 9 Other Conduit terminal T TZ Option VFR34 Option D DZ DIN terminal VFR30, VFR31: Pilot valve assembly is all plug-in (F).

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Aluminum High Vacuum Angle Valve

Quantity Without auto switch Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 7-1 i 7-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 7-1 1.3 x 10-9 (FKM) r i 7-2 XLQ Note) Values at normal temperature, excluding gas permeation.

Basic type / Direct mount type Series CY3B/CY3R

10 14 18 17 20 26 34 48 60 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 M 3.5 4 5 5 6 7 8 10 10 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 Z 66 76 94 107 117 130 148 176 188 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 WS 6 8 7 7 7 7 7 10 10 X

MY1

7 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 5.1 x 3 x 1.05 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 MYM40-15AA5905 GMY40 RCS-12 TMY-40 8.3 x 4.5 x 1.9 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 2 2 2 2 2 4 Scraper Piston seal

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

A_HEC-OM-K001

Communication . 7-1 7.1 Preparation for Communication . 7-1 7.2 Specifications of communication method. 7-2 7.3 Communication format . 7-3 7.3.1 Control code used for communication . 7-3 7.3.2 Command code list . 7-3 7.3.3 Communication procedures and format . 7-4 7.3.4 Calculation of Check Sum . 7-6 7.4 Details of Communication Format . 7-7 7.4.1 Setting of target temp.