Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X2 (Nickel Plated)

: [Manual] Manual, Bowl Material: [Resin] Polycarbonate Case, Bowl Guard: No, Size of Body: 8, Accessory: -, O-Ring, Gasket Material: NBR, Drain Outlet: With barb fitting, Custom-made Specifications: -, Nominal of pipe flange: -, Port size (diameter): -, Element length: 250, Element type: Fiber, Element materials: Bronze, Element seal materials: Non asbestos, Pressure gauge accessories: G46

Material: Body: Stainless Steel 304; O-ring: FKM, Element Length: B [ℓ500 (ℓ250 x 2)], Element Type: Micromesh, Stainless Steel 316/Nickel Brazing Material, Nominal Filtration Accuracy: 20 μm, Element Seal Material: Fluororesin, Option: G46-10-02X3, Stainless Steel at Wetted Parts

Material: Body: Stainless Steel 304; O-ring: FKM, Element Length: B [ℓ500 (ℓ250 x 2)], Element Type: Micromesh, Stainless Steel 316/Nickel Brazing Material, Nominal Filtration Accuracy: 40 μm, Element Seal Material: Fluororesin, Option: G46-10-02X3, Stainless Steel at Wetted Parts

Material: Body: Stainless Steel 304; O-ring: NBR, Element Length: B [ℓ500 (ℓ250 x 2)], Element Type: Micromesh, Stainless Steel 316/Nickel Brazing Material, Nominal Filtration Accuracy: 20 μm, Element Seal Material: Fluororesin, Option: G46-10-02X3, Stainless Steel at Wetted Parts

Material: Body: Stainless Steel 304; O-ring: NBR, Element Length: B [ℓ500 (ℓ250 x 2)], Element Type: Micromesh, Stainless Steel 316/Nickel Brazing Material, Nominal Filtration Accuracy: 40 μm, Element Seal Material: Fluororesin, Option: G46-10-02X3, Stainless Steel at Wetted Parts

Material: L (Body: Stainless Steel 304; Gasket/O-ring: FKM), Element Length: A (ℓ250), Port Size R: 10 (1), Element Type: L (Micromesh, Stainless Steel 316/Nickel Brazing Material), Nominal Filtration Accuracy: 10 μm, Element Seal Material: V (FKM), Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]

CL

56.5 20 21 23 23 25 14 18 18 22 26 45 50 60 70 80 M8 X 1.25 M8 X 1.25 M10 X 1.25 M12 X 1.75 M12 X 1.75 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 106.5 125.5 139.5 CLAG40SCLA40, #4 (#1+#4+#11) CLAG50SCLA50, #4 (#1+#4+#11) CLAG63SCLA63, #4 (#1+#4+#11) CLAG80SCLA80, #4 (#1+#4+#11) CLAG100SCLA100, #4 (#1+#4+#11) Single Clevis/CLAC (mm) Stroke range (mm) Bore (mm) CX GB BP BQ C GC

Compressed Air Preparation Filter

1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V 10 1 V V r Port size + a Mounting Nil Without mounting option V V V V V B*3 With bracket V V V V V + Option t Nil Without auto drain V V V V V b Float type auto drain C*4 N.C.

LG1H

Nil W High rigidity direct acting guide H Axial F Cable entry direction Series Cable length Without coupling With coupling 20 21 2m 3m 4m 5m 2 3 4 5 Stroke Lead screw lead Motor specification 10mm 20mm A C Standard motor Matsushita Electric Industrial Co., Ltd.

HRX-OM-Y098

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Operation screen (home screen) . 4-3 4.3 Preparation of the Circulating Fluid Supply to the User's Equipment . 4-4 4.4 Operation Start and Stop . 4-6 4.4.1 Setting of circulating fluid temperature . 4-6 4.4.2 Setting of the pump operation mode . 4-7 4.4.3 Starting the Product

HRX-OM-W060

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Operation screen (home screen) . 4-3 4.3 Preparation of Circulating Fluid Supply to User's Equipment . 4-4 4.4 Operation Start and Stop . 4-6 4.4.1 Setting of circulating fluid temperature . 4-6 4.4.2 Setting of pump operation mode . 4-7 4.4.3 Starting the Product . 4-7 4.4.4

ZX

Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.

MQQ

C 2-Rc 1/8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F E J I 4-N through M 0.2 D W K B + Stroke L A + Stroke M 0.2 E Bore size (mm) Stroke range (mm) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6 29 9 M4 x 0.7 38 5 8 20 3.5 6.5 39.5 7 5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8 8 36 11.5 M6 x 1.0 47 7 10 25.5 5.4 9 48.5 10 5 7 20 10 to 60

MQQ

2-M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Counterbore depth RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 28 H thread effective depth C 2-Rc 1/8 F Q Y 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40