Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Blue e Power supply (Light terminal) N.C. N.O. q IFW50--75/76 e Color of lead wire Black Symbol Contact q w Power supply (Common) w Red Terminal (Relay terminal) 24 VDC Gray e Power supply (Light terminal) N.O. N.C. q IFW50--85/86 e Color of lead wire Black Symbol Contact q w Power supply (Common) White Terminal (Relay terminal) w 24 VDC Gray e Power supply (Light terminal) N.C. N.O.

XLF Series

E E E E E E E (K flange ) F F F Fn n n n (KF flange) F F F Fd d d d Heater (option) Auto switch (option) G G G G H H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154

AIR COMBINATION

F G J M N Q1 Q2 R S U V AC20C-A 1/8 126.4 87.6 23.5 41.6 40 23.4 30 43.2 24 33 5.5 12 3.5 29 1/81/4 AC25C-A 1/8 167.4 115.1 23.5 30 55.1 50 30.5 41 57.2 35 7 14 4 41 1/43/8 1/43/8 AC30C-A 1/8 167.4 115.1 27 30 55.1 50 30.5 41 57.2 35 7 14 4 41 AC40C-A 1/8 220.4 147.1 33.5 38.4 72.6 75 36.1 50 75.2 40 9 18 5 48 1/43/81/2 AC40C-06-A 1/8 235.4 149.1 33.5 38.4 77.6 75 39.6 50 80.2 40 9 18

25

Connection circuit (POWER connector) 0.8-1.0 26-24 0.14-0.2 ZS-28-C Wiring of the IZS40 e-con is adopted for the connector of the IZS40. Connector with cable or without cable may be selected when placing an order for the power supply cable. When only an e-con is required, place an order for it as a part.

Manifold Specifications

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

High Vacuum L Type Valve

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

Series MXP Precision Air Slide Table

Kinetic energy (E)E max.) Allowable kinetic energy E max. : Table 1 Possible to use by E=0.018<E max.=0.045 Load rate 3 3-1 Load rate of moment Wa=W max. Calculate allowable load Wa(N). Wa=112=12 =1 W max.=12 1=2/12=0.167 Allowable load coefficient : Graph 1 Calcurate load rate (1) of moment.

High Vacuum L Type Valve

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

How to Order ø 6, ø 8, ø 12, ø 16, ø 20, ø 25 MXQ  A Series Air Slide Table Double-ported Type

buffer, axial piping 6 Centralized adjuster 7 Centralized adjuster (Symmetric) 8 Buffer, Centralized adjuster 9 Buffer, Centralized adjuster (Symmetric) Nil 2 S 1 n n Port Switch mounting groove Port Switch mounting groove 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 For details, refer to the next page. i Made to order 16 10, 20, 30, 40, 50, 75, 100, 125 Port Switch mounting groove

Lubricator Series AL10 to 60

/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 324 333 333 332 335 38 40 38 41 45 53 70 75 90 95 14-2-65

OMS0020

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Digital Pressure Switch

g 73 g 75 g Weight With lead wire and connector attached (4-core, 2 m) 85 g 74 g 75 g 77 g 79 g 77 g 79 g Without lead wire and connector 43 g 32 g 33 g 35 g 37 g 35 g 37 g Analogue output Voltage output Current output Range Rated pressure range A B C Vacuum 0.0 to -101.0 kPa 0 -101 kPa Compound -100.0kPa to 100.0 kPa -100 kPa 100 kPa Positive pressure -0.100 to 1.000 MPa -0.1 MPa 0 1 MPa

Digital Flow Switches

CM01-8DP4S DDK Ltd. 10 Series PF2A Dimensions PF2A703H, 706H, 712H D E Internal circuits and wiring examples to are terminal numbers.

VQ20/30

PB Construction Component Parts q e Description Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Material No. q w e r t y u r Resin Stainless steel Stainless steel Stainless steel NBR HNBR, Resin w t y u 17-2-83 Series VQ20/30 Dimensions: Series VQ20 In-line Type: Grommet (G) VQ21A1-GBracket mounting holes Mounting holes 2-3.2 through 2-3.2 through Light

2-Color Display

g 33 g 73 g 77 g 35 g 75 g 79 g 37 g 73 g 77 g 35 g 75 g 79 g 37 g 70 g 74 g 32 g Weight Including lead wire with connector (4 cores, 2 m) Excluding lead wire with connector Optional Part No.

PSxx-OML0002CN

g 73 g 75 g (4 2 m) 85 g 74 g 75 g 77 g 79 g 77 g 79 g 43 g 32 g 33 g 35 g 37 g 35 g 37 g [mA] [V] A B C 0.0-101.0 kPa 0 -101 kPa -100.0100.0 kPa -100 kPa 100 kPa -0.1001.000 MPa -0.1 MPa 0 1 MPa -57No.PS-OML0002CN-G 4 01/N01 01R1/8 N01NPT1/8 C4H 4 mm 5/32 inch C4L 4 mm 5/32 inch C6H 6 mm C6L 6 mm N7H 1/4inch N7H 1/4 inch -58No.PS-OML0002CN-G A B -59No.PS-OML0002CN-G