E-MY2_E_D

and E-MY2HT.

Rotary Actuator

Single vane Double vane 90, 100D 270S 180S 90S 0 5o g e n a 2 0o r 7 +4o 0 n +4o o o g n e o 0 a ti r 1 0 0 8 0 n a 9 0 o 1 +4o o t ti +4o e o a 0 g e t R n 0 o g a R o r n 0 n 9 ra o ti e a n g t io o n R at a r ot n R o (90o) (90o) ti a t o R Chamfer Chamfer (45o) Chamfer (45o) B port Chamfer A port B port A port B port (40o) B port A port A port For size 40 actuators, a parallel key will

LEC-OM069xx

Posit io n e rr? ? or Posit io n e rr? ? or 3 La rg e friction Refere nc e sp ee d Refere nc e sp ee d Without friction compensation With friction compensation 5 5-62 5 Adjustments 5.8.3 Current Control Mode Selection Function This function reduces high-frequency noises while the servomotor is being stopped.

RB/RBL/RBQ

2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.

RB/RBL/RBQ

Corresponding weight of impact object 2 2 E 2 2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Modular Type Air Filters Series AF

Warning 330 Air Filter Series AF10 to AF60 Working Principle: Float Type Auto Drain N.C. type: AD37, AD47 N.O. type: AD38, AD48 Compact auto drain N.C. type: AD17, AD27 q r e w t i y u o !0 !1 Drain q r e w t i u y o !0 !

VCC

M4 x 16 Round head combination screw Tightening torque: 1.2 0.2 Nm y w Note) e Note) r Note) e Note) t r q e w Note) o i q u t The figure shows the 2 port valve manifold block assembly.

5 Port Solenoid Valve

1 e VV5QC 4 1 16 SDQ 02 S Kit VQC4000 series y i o !

Modular Type Filter Regulator Series AW

IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

CNG

0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0.1 C 0.1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 44.5 14 8 12 2 85 10 (12) 18 5.5 6 4 8 5 26 Up to 200

CNG

0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0.1 C 0.1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 44.5 14 8 12 2 85 10 (12) 18 5.5 6 4 8 5 26 Up to 200

CNG

BC PH MM H1 PD E 0 0.05 E 0 0.05 I BZ TH Width across flats B1 Width across flats KA Width across flats NA 8-J TT TY TW C0. 1 TX TE +0.10 0 4-TF TV TZ BC Z ZZ + Stroke f 8 l e h + l ZZ + l + Stroke Z + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA GB GC GK GL

Cylinder with Lock Series CNG

BC PH MM H1 PD E 0 0.05 E 0 0.05 I BZ TH Width across flats B1 Width across flats KA Width across flats NA 8-J TT TY TW C0. 1 TX TE +0.10 0 4-TF TV TZ BC Z ZZ + Stroke f 8 l e h + l ZZ + l + Stroke Z + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA GB GC GK GL

Setting software for e-Actuator (e-Actuator setup tool)

When the "move distance" setting as 150 mm. Example: if is pressed, the actuator moves to 150 mm position. Current Position if is pressed, the actuator moves to the Origin end(100mm). Origin end Opp. end 0mm 100mm 200mm 16 No. JXC#-OMA1006-B 6.3 Drive test It is possible to do the drive test in the e-Act setup tool. -Button Explanation Servo : Turn the motor servo ON or OFF.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

M4 x 16 Round head combination screw Tightening torque: 1.2 0.2 Nm y w Note) e Note) r Note) e Note) t r q e w Note) o i q u t The figure shows the 2 port valve manifold block assembly.

Air Combination

,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC40B,C,D -(F,N)02~(F,N)04(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)06(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC40B,C,D-(F,N)06(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC50(A)-(F,N)06(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC50B-(F,N)06(F,N)10 (C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,

SFOD-OMT0010

Parameter is not registered (0-901) E < Details > An alarm is generated when the step data is executed without step data setting. Download the step data to the controller. Turn off the main control and motor control power supplies. Step data is not regestered (0-902) E < Details > System error occurred.

XLAQ/XLDQ

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17