Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

U U U U U U U U U 12 19.5 20.5 26.5 23 26 22 16 22.5 23.5 29.5 26 29 25 20 24.5 25.5 31.5 28 31 27 25 27.5 28.5 34.5 31 34 30 32 26.5 31.5 32.5 38.5 35 38 34 27 29 40 30 44 35 36 42 38.5 41.5 37.5 30.5 32.5 50 36 50 41 42 48 44.5 47.5 43.5 36.5 38.5 63 39.5 56.5 47.5 48.5 54.5 51 54 50 40 42 80 49.5 66.5 57.5 58.5 64.5 61 64 60 50 52 100 59.5 76.5 67.5 68.5 74.5 71 74 70

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U D B C4 C6 C8 (Rail mounting hole pitch 12.5) 1-6-133

Vacuum Pad

-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

u u u u u u u u u u u u u u u u u u U U U U U U U u u u U U U U U U U U U U U U U U U U u u u U 5 V,12 V IC circuit Reed switch Solid state switch 12 V Diagnostic indication (2-color display) 5 V,12 V IC circuit Relay, PLC Grommet 24 V Yes 12 V 5 V,12 V IC circuit Water-resistant (2-color display) 12 V Magnetic field resistant (2-color display) 2-wire (Non-polar) 3-wire (NPN equivalent

NCQ2/CQ2

22.5 25 28 30 32 37.5 42.5 51 59 U 19 20 23 26 27.5 30 35 40.5 49 57 U 23.5 24.5 27.5 30.5 36.5 40 45 50.5 59 67 U 26.5 27.5 30 32.5 39.5 42.5 48 53.5 61.5 70 U 21 22 24.5 27.5 34 37.5 43 48 56.5 64.5 U 27.5 28.5 31 34 40.5 43.5 49 54.5 62.5 71 U 24.5 25.5 28 31 37.5 40.5 46 51.5 59.5 68 U 33 36.5 42 47 55.5 65.5 U 21.5 22.5 25.5 28 36 38 43.5 48.5 57 65.5 12 16 20 25 32 40 50 63 80 100

Electric Actuator/Slider Type

0 B A u !7 !6 y q w t !5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

V100

For R and U, DC voltage is only available.

High Vacuum Angle Valve

U type: DC only.

7

C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (200.5) 96 (104) 104 (112) 90.5 (98.5) U 168 (176

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

I

T P U T F U N C T I O N Courtesy of Steven Engineering, Inc. !

Fieldbus System

Version Nil Version Nil EX600-DXlB EX600-DXlCl EX600-DXlD EX600-DXlE u EX600-DXlF u Digital Input Unit Digital Output Unit EX600-DYlB EX600-DYlE u EX600-DYlF u Product number Digital Input/Output Unit EX600-DMlE u EX600-DMlF u Analog Input Unit EX600-AXA Analog Output Unit EX600-AYA u Analog Input/Output Unit EX600-AMB u Handheld Terminal EX600-HT1-l u EX600-HT1A-l Product number Handheld

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Table of Contents

u u Drain Drain Drain Component Parts Material No.

Plug-in/Plug Lead: Single Unit

Note 3) 2-6-23 Base Mounted Series VQ5000 Kit (Lead wire cable) L 83 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 12 21 47.5 36 PE R2 5 R1 3 1 P 2-G1 (Electrical entry) SMC 6-Rc 3/4 1(P), 5(R1), 3(R2) port Cable length L 0: 600 mm L 1: 1500 mm L 2: 3000 mm U D U D U D 179 106 46.8 59.2 83.5 U side Station number 55.5 M5 ground screw 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-Rc 3/8, 1/2

VQ4000

(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)

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side 2 to 10 stations D U D side U side Stations 3 2 1 B 2 to 20 stations Both sides M Special specifications For special specifications, indicate separately by the manifold specification sheet.