Rotary Actuator/Vane Style Series CRB1

J Z Y K S T X CRA1 Key Key CRQ2 D D D D D MSQ C C C MSZ CRQ2X MSQX MRQ C D D Key (mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

E-MY2_E_D

positions Names and Functions of Controller 11 Example of Internal Circuit and Wiring 12 Setting 15 Operation Characteristics 20 Specifications 21 10 Names and Functions of Controller (3 positions) Controller detail General 3 positions 5 positions General A 1 2 5 7 State of indicator light D B C E 8 3 4 6 Switch No.

Micro-Mist Separator with Prefilter Series AMH

---Ht-t---t-+-H I--i IN o I w c.

CG5-S

C type 22 for shaft 13 Accessary Dimensions Series CG5-S Accessory Dimensions Rod end nut Clevis pin Material: SUS440 (pin) SUS304 (snap ring) Material: SUS304 30 d d Dd9 D C t m t l m L H1 B1 Metric (mm) (mm) Part no.

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

AIR COMBINATION

AC-OMT0014-A PRODUCT NAME AIR COMBINATION MODEL/ Series AC10(A,B)-A AC20(A,B,C,D)-B AC25(B,C)-B AC30(A,B,C,D)-B AC40(A,B,C,D)-B AC50(A,B)-B AC55(B)-B AC60(A,B)-B Contents PAGE 1. PRECAUTION FOR SAFETY 18 2. APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1118 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 19 7.

LEC-OM038xx

200 mm/s mm/s USB cable A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 Communication cable PC PC is prepared by customer) Refer to 8CN2 TB/PC Power supply connector(P.23) for usage.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Rated voltage 1 2 3 4 5 6 7 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D: With connector T: Condait terminal E: Grommet terminal type has been discontinued.

Compact Type

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

AIR COMBINATION

AC-OMQ0008-D PRODUCT NAME AIR COMBINATION MODEL/ Series AC10(A,B)-A AC20(A,B,C,D)-A AC25(B,C)-A AC30(A,B,C,D)-A AC40(A,B,C,D)-A Contents PAGE 1. PRECAUTION FOR SAFETY 18 2. APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1115 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 16 7. TROUBLE SHOOTING 16 8. SPARE PARTS LIST 16 9.

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

Microspeed Cylinder

Series 10-, 11CQSX Series10-,11CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (built-in magnet) (built-in magnet) Microspeed cylinder Mounting Microspeed cylinder Bore size 32 40 32mm 40mm Number of auto switches

Compact Type Dual-Rod Cylinder Series CXSJ

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

MHY2/MHW2

Operating model: MHY2-16D Opening time: 0.15s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d Material of attachment: Aluminum alloy (Specific gravity = 2.7) r1 = 37 (mm) z r1 Calculate the moment of inertia of attachment.

4/5 Port Air Operated Valve Series SYJA3000

Valve model Type of actuation Port size 1 4/2 (P A/B) Flow characteristics Note 2) Note 3) Effective area mm2 4/2 5/3 (A/B EA/EB) Weight (g) Pilot port size Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] b Grommet Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 48

Digital Flow Switch ( compatible)

A to B C to D 500 L 5 to 500 -25 to 525 L/min 1000 L 10 to 1000 -50 to 1050 2000 L 20 to 2000 -100 to 2100 PFMC7 40 to 4000 -200 to 4200 500 L 0.17 to 17.66 -0.90 to 18.50 cfm 1000 L 0.35 to 35.31 -1.80 to 37.10 2000 L 0.70 to 70.63 -3.50 to 74.20 The flow ranges and relationship between the fluid and PD are shown in the figures below.

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

LX Series Compact Electric Actuators

l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

LEC-OM036xx

200 mm/s mm/s USB cable A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2CN Communication cable PC PC is prepared by customer) Refer to 9.