SMC Corporation of America
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Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Specifications: Same as standard type Relation between Port Positions and Cushion Valve Positions (Rod chamfer) Series Symbols according to mounting bracket (relation of positions) Cushion Valve Port Cushion Valve Port Cushion Valve Port Cushion Valve Port Port Cushion Valve Port Cushion Valve Port Cushion Valve A A A A A A A D D D D D D B B B B B B D B C C C C C C C CS2 Basic Foot Rod flange

AC-OMX0051-D PRODUCT NAME Air Combination MODEL / Series / Product Number AC20(A)-(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,3,6,C,J,N,R,Z,ZA)-D AC20B,C,D -(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,6,C,J,N,R,Z,ZA)-D AC30(A)-(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC30B,C,D -(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)02~(F,N)04(C,D

Range Setting range : 0.1 to 9.9 C Min. increment : 0.1 C O v e r l o a d J u d g i n g Indicated content : Overload judging temp. range (Ex. : 0.2 C) T e m p .

A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part (mm) Faston

I C o n s t a n t Function Sets integral time used for PID control/ M O D E < 1 5 0 s e c 5.5 How to operate 5-10 A_HEC-OM-K001-1.7 Chapter 5 Operation <6> D constant setting: Mode indication D Constant Default value: 0 sec. Setting range 0.0 to 99.9 sec. Indicated contents D constant (Derivative time) D Constant indicates that it is D constant setting mode.

SUP/EXH block assembly mounting position U D side D B U side 2 to 10 stations OMRON Corp.: SYSBUS Wire System C SHARP Corp.: Satellite I/O Link System D Matsushita Electric Works, Ltd.: MEWNET-F System E NKE Corp.: Uni-wire System (16 points output) F1 2 to 15 stations Both sides Special specifications M SUP/EXH block assembly specifications When creating the special specifications, complete

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Reduced outgassing o u Resin materials eliminated Laser marking is employed for the model designation. d t g e a c 2 s u s d i e Reduction of outgassing due to surface treatment n o u d t R g g e a c 1 s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

ends a w t o u i Resin materials eliminated Laser marking is employed for the model designation. d t o o g e a n L c 2 s u s d Particulate generation has been reduced at the stroke ends by reducing impact using a sine cushion and by stopping the stroke using an internal stopper. i e Reduction of outgassing due to surface treatment n Impact acceleration [m/s2] o u d t R g g e a c 1 s u s

Dd9 Dd9 d d D C l m l m m m L L t t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

C S D C J Qp2 K I J R Tp2 K I S R Q z 280 (32) U L H L G1/2 G1/2 E E U 1/4 Exhaust port H 1/4 Exhaust port F F G Port size 2 x P G Port size 2 x P Faston terminal A B D C J K I 11 Q R S L E U 1/4 Exhaust port H F G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF21A< VXF22A< VXF23A< 3/4 1 1 1/2 40 47 77 73 84 132 53.5 64.5 95 66 74 110 29.5 29.5 32 66 74 110

Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated

7 D-side end plate assembly part no. VVQC4000-1 A D C6 VVQC4000-3A 2 Option Thread type (Thread port only) Nil Standard Type S Built-in silencer, Direct exhaust A For 1 station C For 2 stations Note 2) Nil Rc F G T NPTF N NPT Note 1) Tie-rods (2 pcs.) for additional stations included. Note 2) Bottom ported type is available only for 1 station.

Note 3) Bowl assembly for the AF30 to AF60 models comes with a bowl guard (steel band material). 332 Air Filter Series AF10 to AF60 Dimensions AF10, AF20 AF50, AF60 T N S M J U Bracket (Option) Bracket (Option) D R B C T M J V Q N S IN OUT D U OUT R C 2 x P (Port size) V Q IN OUT o s Clearance for maintenance OUT Drain G A 2 x P (Port size) AF30 to AF40-06 B D J M U N S T Bracket (Option)

CKG40-R100 Series CKP150/63 Applicable auto switch Auto switch mounting bracket part no. 63 50 40 Applicable cylinder series CKG40-R125 BK1T-040 D-P4DWSC D-P4DWSE D-P4DWL/Z Common Series CKG1 CKG140-150 CKG150-150/CKP150-150 CKG163-150/CKP163-150 CKG40-R150 Series CKP1 BAP1T-040 D-P79WSE D-P74L/Z 1338 Series CK1 Specific Product Precautions 3 Be sure to read before handling.

. -3- 1Specification 1.1 How to Order L E G 32 M D G B 30 C R1 C5H73 Size Motor type Motor mounting position Bearing type 25 32 40 Symbol Motor Compatible Nil Top mounting M Sliding bearing controller D In-line JXC5H JXC6H JXC9H JXCPH JXCEH High performance G Battery-less absolute Step motor 24 VDC Lead [mm] Actuator cable type/length [m] Symbol LEG25 LEG32/40 Robotic cable[mm] 6 8 Nil None

models are not Applicabl model Specitications 6 E Sel orergur max. 0.1 MPa ,o o Sel pressure ma-x. 0.5 MPa 3 o o Set pressure max. 0,9 MPr 5 O_l o Connection Rc 1/4 02 o o, Connection Rc 3/8 03 r) o Connectlon Rc 'l12 o4 o Bracket B O ,l Brackel c c :l: 6 A Connection NPTI/4 N02 _l ., connection NPT3/8 N03 C c co$nection NPT1/2 N04 a) Connection G 1/4 F02 o ll Connection G 3/8 F03 C al Connection

CJ2Y-Z CM2Y-Z CG1Y-Z MBY-Z CA2Y-Z CS2Y CQSY CQ2Y-Z CJ2X-Z CM2X-Z CQSX CQ2X CUX (mm) Auto switch model Bore size 10 16 Auto switch mounting Auto switch model Bore size (mm) 10 16 D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV 2.5 3 D-M9m D-M9mV D-M9mW D-M9mWV D-A9m D-A9mV Band mounting BJ6-010 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) D-A9m 6 7 D-C7m/C80/C73C/C80C 7 7 D-H7m/H7mW D-H7BA/H7NF

D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F79F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F59F D-F5NTL D-G39C/K39C D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Y5/Y6/Y7/Y7V D-Y7BAL D-Y7W/Y7WV D-M5 D-M5W D-M5TL D-P3DW D-P4DWL D-F9G/H D-Y7G/H D-G5NBL D-F7NJL D-F6 D-F8 Solid state auto switches Reed auto