Series MLGP

t e 2 ) 1 pcs. 15 D-P3DW(A) 2 pcs. 15 1 pc. 5 N o t e 2 ) N o t e 4 ) 2pcs.

VXP21/22/23

High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

OMU0023

How to order L E C C G 1 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions 70 - (3) Cable between branches (between the branch connectors) i. How to order L E C C G 2 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 71 - 8.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

A variety of electrical connection options Manifold Single valve SMC VQ110 -*L SMC VQ110 -*M JAPAN SMC VQ110 -*G JAPAN E E JAPAN P E P Plug-in unit manifold Plug lead unit manifold L type plug connector P 5 M type plug connector Grommet Series VQ100 Standard Specifications Standard Specifications Specifications Item specifications specifications 1watt 0.5 watt Type 3 port direct operated

MY1

Thrust energy E Fs Fs + mgs Fs mgs Absorbed energy E E + E Symbols : Speed of impacting object (m/s) m: Weight of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s) s: Shock absorber stroke (m) Note) Although the lock plate may slightly bend due to tightening of the lock plate holding bolt, this does not a affect the shock absorber and locking function.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

70pvvna

PB Note) Parts e and r are for selection of valve composition.

VNC

Pilot pressure (MPa) A 0.4 0.3 0.2 0.1 0 1 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Operating pressure (MPa) 17-4-23 4 Series VNC Threaded Type Port size: 6A, 8A, 10A Pilot port 125 (Conduit terminal: T, DIN terminal: D) (Back side P2) Manual override 108.2 (Grommet terminal: E) 106.7 (Grommet: G) 63 (Air operated) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

AR20-B to AR60-B

q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

3

The tightening torque of the M3 screw must be 0.35 to 0.45 Nm. t The detection position can be changed under the conditions in step e. Auto switch y Confirm where the mounting position is, and tighten the auto switch fixing screw (M2.5) to fix the auto switch mounting nut. The tightening torque of the M2.5 screw must be 0.25 to 0.35 Nm.

Adsorption Plate

Adsorption surface size 9 SP1130 SP1230 50 x 50 80 110 20 50 65 95 70 5 100 x 100 130 160 20 100 115 145 95 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

REGULATOR

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.

MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

VXR21/22/23

Water hammer relieving Check valve mechanism is provided in the E side of the supply orifice D and E and supply into the pressure action chamber B can be controlled with two stages by moving the diaphragm assembly r. After release of the energy, when the open amount of the main valve C becomes small, E is blocked. A low valve closing speed relieves the water hammer.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

VZ5000

Applicable base VV5Z5-45F Caution Mounting Screw Tightening Torques M2.5: 0.32 Nm (For stacking type manifold) 3-3-77 Series VZ5000 Exploded View/DIN Rail Manifold Type 45 Manifold r w r q U side e w (a) Bolt (Both sides) e (b) Lever D side (a) Bolt (Both sides) Replacement Parts No. Part no.

2/3 Port Valve for Various

Water hammer relieving Check valve mechanism is provided in the E side of the supply orifice D and E and supply into the pressure action chamber B can be controlled with two stages by moving the diaphragm assembly r. After release of the energy, when the open amount of the main valve C becomes small, E is blocked. A low valve closing speed relieves the water hammer.

Escapements Series MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4