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Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .

VKF300

Models Symbol (A) 2 Effective area mm (Cv factor) Operating pressure range MPa {kgf/cm} Port size Valve model Weight g (grommet type) VKF33 3.6 (0.2) 2 3 0 to 0.7 {0 to 7.1} VKF33 Y (for low power consumption, DC2W) 2.7 (0.15) 2 3 3 (R) 1 (P) Note 1) M5 x 0.8 Rc(PT) 1/8 Body ported VKF33 E (for long loading time) 2.7 (0.15) 80 2 3 VKF33 V (for vacuum) 3.6 (0.2) 2 3 101.2kPa to 0.1 {1Torr

IIIIIIIIII

Coast Pneumatics Inc. is located at 8055 E.

AC Servo Motor Driver (MECHATROLINK-III type)

It is necessary to set it on the PLC side according to the kind of PLC. 35 - 6.3 The recommended value of the parameter [LEY] LEY25/ LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

240

H:Distance from the cylinder center axis to the mounting surface for the table L MXY H dimension (mm) MXH6 MXH10 MXH16 MXH20 MTS 24.5 30.5 34.5 41.5 Cylinder shaft center m Load center of gravity Selection Graph z to c (Vertical Mounting) Graph c c Maximum Speed 500 mm/s or Less Graph z z Maximum Speed 100 mm/s or Less 1 100 10 Mass m (kg) Mass m (kg) 20 0.1 16 20 16 1 10 10 6 6 0.01 0.1

Magnet: D (Built-in), Mounting: U (Front Trunnion), Style: N (Non-lube Rubber Bumper), Bore Size: 40mm, Thread: None, Stroke: 100mm, Option: None, Lock Style: E (Spring Lock (Exhaust Lock)), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Magnet: Built-in, Mounting: Front Trunnion, Style: Non-lube Rubber Bumper, Bore Size: 40mm, Thread: None, Stroke: 100mm, Option: None, Lock Style: Spring Lock (Exhaust Lock), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -, Auto Switch Mounting Bracket: -

Air cooled Thermo-con (Compact type)

The resistance must be suitable for the characteristic impedance of the cables used for connection and have a combined resistance of 75 ohms or more. 3.9 Identification Code List The following parameters can be changed.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Nil S n Mounting B L F G C D U T E BZ FZ UZ Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion Rear trunnion Integral clevis Boss-cut basic Boss-cut front flange Boss-cut front trunnion Bore size 20 25 32 40 Auto switch 20 mm 25 mm 32 mm 40 mm Nil Without auto switch (Built-in magnet) Please select the applicable auto switch model from the table below.

AR425 to 935

A B C D E F G H J Bracket dimensions Bracket part no. Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 1/4, 3/8, 1/2 3/4, 1 1 1/4, 1 1/2 2 145.5 155 216 241 39.5 43 75 90 73 78.5 94.5 109.5 3 7 5 10 1/4 1/4 1/4 1/4 67 78 110 140 46.5 85 48 52 80 90 B24P B25P 80 98 126 160 14-4-17

3 Port Air Operated Valve VPA3145/3165/3185 Series

VZA 3 x Rc Pilot port 1 8 VTA VGA VPA VPA3 VPA3 2 x Mounting hole Port size Rc (EXH port) Port size 2 x Rc (IN, OUT port) Port size Rc Model Mounting hole IN, OUT EXH A B C D E F G H J K L 3 8 1 2 3 4 VPA3145 71 3 4 8.5 85 14 52 55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

PA3145/3165/3185

D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

IDX-OM-W032

D E F G K L M N P Q R IDFA22E R1 290 775 623 134 405 698 93 13 314 85 600 340 IDFA37E R1-1/2 855 680 IDFA55E R2 470 855 800 (128) (273) (868) (110) 13 500 75 700 526 (110) 519 IDFA75E 900 (968) IDFA Series 6-3 6 2 IDX-OM-W032 6 6-4 IDFA22E, 37E GFCI R GFGI For Option R L N PE TB ILS V For Option V EVD EDV CM OLR PE C01 C11 PE FM PRS P IDFA55E, 75E GFCI R L N PE CM FM () MC C01 CM

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

Power supply Single phase 200VAC (A type) or Single phase 100VAC (A1 type) MC NFB Servomotor HC-PQ C P U V W L1 U V Servo amp MR-CA or SM L2 E W MR-CA1 The cable length between the controller and servo amp is 2m or less. 24VDC Z CN1 EMG Note 7) Shuts off with alarm signal when servo ON is turned OFF.

Air Tank Series AT 1

Model/Standard Specifications AT11C AT22C AT37C AT55C AT75C AT125C AT150C (1) AT220C (1) AT6C Model Fluid Tank capacity (l) 400 500 700 Compressed air 1000 1500 2000 3000 100 200 Max. operating pressure (MPa) Port size 0.97 Rc 1/2 Rc 3/4 Rc 11/2 2B flange 3B flange 4B flange Set pressure for safety valve (MPa) 0.97 1.46 0 to 100 Proof pressure (Under water pressure) (MPa) Fluid temperature (C)

CG1-SMV13_en

Year Month 2015 2016 2017 2025 2026 2027 T U V D E F Bore Size (mm) Torque 10% (N.m) Jan O TO UO VO DO EO FO Instruction Manual CG1*N25&100-*Z-X2992 Air Reservoir 32 2.9 Feb P TP UP VP DP EP FP 40 4.9 Mar Q TQ UQ VQ DQ EQ FQ 50 11.8 Apr R TR UR VR DR ER FR 63, 80 24.5 Do not service or attempt to remove product and May S TS US VS DS ES FS machinery/equipment until safety

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Magnet: Built-in, Mounting: Front Trunnion, Style: Non-lube Rubber Bumper, Bore Size: 40mm, Thread: None, Stroke: 25mm, Option: None, Lock Style: Spring/Air Pressure Lock, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket

Pilot Operated Regulator AR425 to 935 Series

A B C D E F G H J Bracket dimensions Bracket part no. Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 1/4, 3/8, 1/2 3/4, 1 1 , 1 2 80 98 126 160 145.5 155 216 241 3 7 5 10 1/4 1/4 1/4 1/4 39.5 43 75 90 50.0 85 48 52 80 90 B24P B25P 67 78 110 140 73 78.5 94.5 4 1 2 1 109.5 680

Magnet: None, Series: 75 (Standard), Head Cover Type: E (Double End Boss-cut), Bore Size: 40mm, Stroke: 250mm, Cushion: C (Air Cushion)