Precision Cylinder Series MTS

M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

IDX-OM-W017

T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 14-1 . 14-1 IDFA Series 2 IDX-OM-W017 i i i 1 () OFF 3 ON OFF i-1 IDFA Series i 1 IDX-OM-W017 i i-1-1 3 IDFA Series i-1-1 i 2 IDX-OM-W017 i i 2 5 i-2-1 IDFA Series IDX-OM-W017 i i-2 i-2-2 3 i-2-3 50 i-2-4 i-2-5 0 IDFA Series i-2-2 4 IDX-OM-W017 i i-2-6

Microspeed Cylinder

, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper (basic cylinder section) Shock absorber

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Compact Pressure Switch Specifications (For further information, refer to Best Pneumatics No. 8) IS10-01 Model 0.1 to 0.4 MPa Set pressure range (OFF) 0.08 MPa Hysteresis 1a Contact point construction 2 VA AC, 2 W DC Max. contact point capacity 12 V 48 V 100 V Voltage (AC, DC) 24 V 50 mA 40 mA 20 mA Max. current 50 mA Symbol 2 1 AMR4000 AMR3000 L AMR5100 686 Regulator with Mist Separator

Clean Exhaust Filter

A One-touch fittings KP series B Dimensions (mm) Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 Bracket SFE-BR3 14 5 3.4 (15.5) 12.5 5.4 5.4 14 24 (20) SFE-BR4/5/7 B C (J) H D (F) G A E E Dimensions (mm) Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): Reference dimensions

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Pneumatic Positioner IP300/IP3100

Steel) 4w 1P300.1P3100 DIMENSIONS MODEL 1P300 (Lever Type) l t I I I J J O

Series LQ3 High Purity Fluororesin Fitting

F (E) L H G F E B M L 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 9.5 12 18 20 28 36 4.8 6 9 10 14 18 10 17 22.5 24.5 27 30 3.5 4 5 6 7 8 14 20 25 29 37 49 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3T1A LQ3T2A LQ3T3A LQ3T4A LQ3T5A LQ3T6A M 1/4 (E) (E) G H L L Panel Union : LQ3P J Panel Thickness (Max. t) (mm) Inch Size H W2 W1 Model Tubing O.D.

VBA-OM-S001

OUT port Mounting VBA1: Tightening torque of 12 to 14 Nm (R1/4) VBA2: Tightening torque of 22 to 24 Nm (R3/8) Drain port Rc1/4 (4) O-ring : Mount the O-ring in the groove on the joint of the tank at the back of the booster regulator.

VBA-OM-P018

Rc3/8 VBA1 OUT IN Rc1/2 Rc3/8 () OUT VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3/8) OUT O Rc1/4 O A B C D E F G H I J K L M O VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc3/8 257 60 Rc1/4 20 VBA10A VBA11A 391 328 VBAT10A1 VBA20A VBA22A 170 522 454 417 367 170 180 120 312 Rc1/2 278 130 VBAT10A1-VBA2 IN OUT Rc3/8 39 VBA1 IN OUT IN IN OUT OUT VBAT10A 1 VBA2 VBA1 3NmM5

VBA-OM-S006

/www.smcworld.com Rc3/8 VBAT05S1 VBA10A VBAT10S1 VBA20A VBA22A VBA10A VBAT10S1-VBA2 IN OUT VBA2 VBAT05S1VBAT10S1VBA2 OUT VBA1 2 () VBA1 IN OUT OUT OUT VBA1 OUT IN IN :VBA1 4VBA2 8 O : VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3/8) VBA1 VBA2 () VBA2 24NmM10 VBA1 3NmM5 6 OUT O O

Part Number Description: SHOCK ABSORBER   Product Line: A   Product Line Description: ACTUATOR   Family Code: 568   Family Description: RB ACCESSORY-SHOCK ABSORBER   Class Code: 12   Part Code: 1   Reference Code:  J   PDF Documentation:  Datasheet   This is a custom made item that is NOT returnableClick here to report information errorImage shown may not match exact part number, Shock

Part Number Description: SHOCK ABSORBER   Product Line: A   Product Line Description: ACTUATOR   Family Code: 568   Family Description: RB ACCESSORY-SHOCK ABSORBER   Class Code: 12   Part Code: 1   Reference Code:  J   PDF Documentation:  Datasheet   This is a custom made item that is NOT returnableClick here to report information errorImage shown may not match exact part number, Shock

Part Number Description: SHOCK ABSORBER   Product Line: A   Product Line Description: ACTUATOR   Family Code: 568   Family Description: RB ACCESSORY-SHOCK ABSORBER   Class Code: 12   Part Code: 1   Reference Code:  J   PDF Documentation:  Datasheet   This is a custom made item that is NOT returnableClick here to report information errorImage shown may not match exact part number, Applicable

Part Number Description: SHOCK ABSORBER SPL   Product Line: A   Product Line Description: ACTUATOR   Family Code: 568   Family Description: RB ACCESSORY-SHOCK ABSORBER   Class Code: 12   Part Code: 1   Reference Code:  J   PDF Documentation:  Datasheet   This is a custom made item that is NOT returnableClick here to report information errorImage shown may not match exact part number, Applicable

Part Number Description: SHOCK ABSORBER   Product Line: A   Product Line Description: ACTUATOR   Family Code: 568   Family Description: RB ACCESSORY-SHOCK ABSORBER   Class Code: 12   Part Code: 1   Reference Code:  J   PDF Documentation:  Datasheet   This is a custom made item that is NOT returnableClick here to report information errorImage shown may not match exact part number, Shock

Part Number Description: SHOCK ABSORBER   Product Line: A   Product Line Description: ACTUATOR   Family Code: 568   Family Description: RB ACCESSORY-SHOCK ABSORBER   Class Code: 12   Part Code: 1   Reference Code:  J   PDF Documentation:  Datasheet   This is a custom made item that is NOT returnableClick here to report information errorImage shown may not match exact part number, Shock

Part Number Description: SHOCK ABSORBER (PT)   Product Line: A   Product Line Description: ACTUATOR   Family Code: 568   Family Description: RB ACCESSORY-SHOCK ABSORBER   Class Code: 12   Part Code: 1   Reference Code:  J   PDF Documentation:  Datasheet   This is a custom made item that is NOT returnableClick here to report information errorImage shown may not match exact part number, Applicable

Part Number Description: SHOCK ABSORBER (PT)   Product Line: A   Product Line Description: ACTUATOR   Family Code: 568   Family Description: RB ACCESSORY-SHOCK ABSORBER   Class Code: 12   Part Code: 1   Reference Code:  J   PDF Documentation:  Datasheet   This is a custom made item that is NOT returnableClick here to report information errorImage shown may not match exact part number, Shock

Part Number Description: SHOCK ABSORBER   Product Line: A   Product Line Description: ACTUATOR   Family Code: 568   Family Description: RB ACCESSORY-SHOCK ABSORBER   Class Code: 12   Part Code: 1   Reference Code:  J   PDF Documentation:  Datasheet   This is a custom made item that is NOT returnableClick here to report information errorImage shown may not match exact part number, Shock