Body Size: 20, Thread: G, Port Size: 1/4, Mounting: w/o Mounting Option, Bowl: w/Bowl Guard, Lubricant Exhaust Port: w/o Drain Cock, Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

EXxx-OMK0006

Use a soft cloth to remove stains. For heavy stains, use a cloth soaked with diluted neutral detergent and fully squeezed, then wipe up the stains again with a dry cloth. -7No.EX-OMK0006-C Model Indication and How to Order Summary of Product parts No.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

C D 15, 20 (mm) D-A9 D-M9, D-F9W Applicable switch model Bore size (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area

Compact Manifold Regulator

U O S L H ARM ARM t e A-A A ARP w y IR-A IR r IRV i VEX SRH !

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

scale HS(5) 3 Series ZPT Without Buffer/Female Thread ZPT 10/13/16 F-B5 (Without Buffer/Female Thread) ZPT 20/25/30 F-B 5/8/01 (Without Buffer/Female Thread) Width across flats P N M5 x 0.8 NL Width across flats 8 5 Y Width across flats 12 F Width across flats 10 Width across flats 3 F Width across flats 2 D 3 D C C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B C D F Y B C D F N NL P

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Compressed Air Preparation Filter

(Spacer width) A (Spacer width) K D F H J G E E E D C Center of body Center of body B C B (Excludes the Y300T-D) EE Part no.

AWG

C C U K P O A A S H L to C U S O H L to B D !

High Power Cylinder Series RHC

1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm]

Large Size Vacuum Module: Series ZR

pressure supply port (PS) Filter block Spacer A Valve unit 84 2 x 4.2 (Mounting hole) Rc 1/8 PV port Air pressure supply port(PV) A 2 2 1.2 1 Adapter C Ejector Bracket A Bracket A Rc 1/8 Vacuum port (V) A: Release flow rate adjusting needle with lock nut ZR1 1-K1M-D10 13 15 7.2 1 For port exhaust 9 (Needle fully open) Exhaust (EXH.) port Rc 1/8 A A B B A A B B S S A A B B 73 Digital pressure

MGG

GC SB + Stroke B ZZ + Stroke A + Stroke B SA + Stroke A 63 SZ + Stroke B Front mounting flange C port A, B port B port A 20 C port A port A ' View A-A' GC SB + Stroke B ZZ + Stroke A + Stroke B SA + Stroke A 41 Made to Order Specifications Series MGG Auto Switch Rail Mounting 8 MGG XC13 Bearing type Mounting type Stroke Auto switch type Auto switch symbol Bore size Auto switch rail mounting

Compact

As the countermeasure, separate strong electrical wire and weak electrical wire, and shorten their wiring length. a a s6 ?aSl{C" Common Terms Related To Electric Actuators A five-phase motor runs much smoother than a two-phase motor because it has two more magnetic poles than a twophase motor does. This means there is less torque ripple or vibration from resonance.

Air Filter

NPT C2SF-2(Z)-A NPT C2SFN-2J(Z)-A -11- C Note 1) C Note 1) Option symbol Semi-standard symbol 6 C 6C Semi-standard: Semi-standard: C Piping port Piping port thread ty pe (5) Part No. thread ty pe (5) Part No. Rc Rc AD27-D AD27-C-D G G NPT AD27(-Z)-D NPT AD27-C(Z)-D Appearance and part No.

5 Port Solenoid Valve

Note 4) For the SI Unit part no., refer to page 617. 615 A VQC4000 Series How to Order Valves VQC 4 0 1 0 1 VQC4000 series 5 A B C D E F A Type of actuation B Seal type E Light/Surge voltage suppressor 0 Metal seal 1 Rubber seal 2-position single 3-position exhaust center (A) 4 (B) 2 (B) 2 (A) 4 Nil Yes E Without light, with surge voltage suppressor 1 4 C Function Nil Note 1) Standard (0.95

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(Values at the initial period) VQZ VZ VS VFN Base mounted Flow Characteristics/Weight Weight (kg) Flow characteristics P A Port size Rc C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv A E AC 0.34 0.34 0.40 0.40 0.32 Body type Valve model DC 0.46 0.46 0.52 0.52 0.44 VS3115-01 VS3115-02 VS3110-02 VS3110-03 VS3114-00 1 8 1 4 1 4 3 8 2.5 3.6 3.2 3.6 0.39 0.34 0.31 0.18 0.86 0.86 0.93 0.94 0.66 0.88

Mist Separator

Rc C2SF-2J-A G Rc C2SF-2-A G NPT C2SFN-2J(Z)-A NPT C2SF-2(Z)-A -11- Option symbol C Note 1) C Note 1) Semi-standard symbol 6 C 6C Semi-standard: "C" Standard Port thread type Part No. Semi-standard: "-" Standard Port thread Part No. type Rc AD27-C-D G Rc AD27-D G NPT AD27-C(Z)-D NPT AD27(-Z)-D Appearance and part No. Semi-standard: "6C" Standard Port thread type Part No.

PC Wiring System

Dimensions 10.5 10.5 178 (3.6) 1 C H C H R S 16.7 OUT IN AX/ 140A 28.3 0 45 4.1 53.5 5.1 (3.7) 55 1 1F 16 D 4 0 2 3 5 6 7 8 9 A B C E F 10 11 12 13 14 15 17 18 19 1A 1B 1C 1D 1E + + + + + + + + + + + + + + + + 4.5 5 5 Refer to page 50 in CAT.E02-20 for the junction cable part number.

/4" 5/8" to 3/4" Weight, lbs (kg) 46.3 (21) 49.6 (22.5) 81.6 (37) Dimensions, LxWxH, in (mm) 18.2x6.1x9.1 (463x157x230) 18.2x6.1x9.1 (463x157x230) 22.4x8.1x11.4 (569x206x289) Pump with Explosion Proof Motor, 115V/208-230V, 60 Hz, 1 Phase, cUL Listed. 3046E-01 3086E-01 3166E-01