TABLE 2-1 DIVISION OF DANGER, WARNING, CAUTION, AND NOTE -2-2 TABLE 2-2 MEANING OF A SYMBOLS -2-2 TABLE 2-3 SAFETY INTERLOCK LIST(PART 1) -2-6 TABLE 2-4 SAFETY INTERLOCK LIST(PART 2) -2-6 TABLE 3-1 QUALITY STANDARD FOR WATER(TAP WATER) -3-4 TABLE 5-1 FUNCTION OF COMPONENTS -5-3 TABLE 6-1 SPECIFICATIONS OF HEC006 -6-1 TABLE 6-2 SPECIFICATIONS OF HEC012 -6-2 TABLE 8-1 AVAILABLE MODE IN LEVEL
One-touch fitting 2, 4 2, 4 2, 4, 6 Vacuum inlet Barb fitting1 2, 4 2, 4 2, 4, 6 1 2 polyurethane tubing, 4, 6 soft tubing Vacuum Inlet Direction Lateral Y Type/ZP3-Y Connection Female thread Pad diameter 1.5 to 3.5 4 to 8 10 to 16 Connection thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Female thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Vacuum inlet One-touch fitting 2, 4 2, 4 2, 4, 6 Barb fitting1 2, 4 2, 4
Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure
*s*rfu'*rs Non-Adjustable Hydraulic Series @$rc^ PM Series Sizing Gurves lmperial ro gf; N : " , d \ E o 9 N Fl E i ' o < n ToTAL ENEFGY (inbs) r 2 0 PA a t o g . o N 7 t O S o o t { q E ! o o o . I 3 o = t o Io | o 5 o o r t 9 = i * o g ! . 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!
3 stns. x 1 2 stns. x 2 2stns. + 3stns. 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.
(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.
No.CE*-OMQ0011-A : : ML2B CEU2 SMC 1 4 2 2-1. 10 2-2. 11 2-3. 11 2-4. 11 3 3-1. 1213 3-2. 14 3-3. 1516 4 4-1. 17 4-2. 1819 4-3. 2021 5 5-1. () 22 5-2. 22 5-3. 23 6 6-1. () 24 6-2 24 6-3 25 7 7-1 26 7-2 27 7-3 28 8 8-1 29 8-2 29 - 9 9-1 9-1-1. 3031 9-1-2. 32 9-2. 9-2-1. 32 9-2-2. 32 9-3. 9-3-1. 33 9-3-2. 34 9-3-3.
retainer 2 3 Stopper block 2 2 Stopper ring 1 1 Rotary actuator 1 Product No.
OUT 2 15ms30msmsec /P.30 1 No. OUT 3 No. PLC /P.30 1 No. OUT -52- No.
2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !
Ensure an interval of 2 msec or more is allowed between input signals, and maintain the signal state for at least 2 msec.
122.5 175 62.5 L2 80 115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns. x 2 2 stns. x 1 3 stns. x 3 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. x 2 + 3 stns. x 2 Manifold composition Note) Manifold bases are composed by connecting 2 station and 3 station bases.
6 () EX600-DYF No. 1 LED 2 () 3 4 5 () -35No.EX-OMN0035CN-A (1)EX600-DYB EX600-DYPB EX600-DYNB 1 NC 24 V() 2 2 2 3 0 V() NC 4 1 1 5 FE FE M12 (4 ) EX600-DYPB EX600-DYNB 1 1 24 V NC 2 2 2 2 DC24 V DC24 V 3 3 NC 0 V 4 4 1 1 5 5 FE FE FE FE IP67 OFF ON SI -36No.EX-OMN0035CN-A (2)EX600-DYE EX600-DYPE EX600-DYNE 1 0 2 2 3 4 4 6 5 8 6 10 7 12 8 14 9 NC 10 NC 11 NC 12
mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 To CN4 200 1000 200 1000 2 2 50 200 50 200 3 3 To CN3 or (4) Actuator cable (6) Teaching box PC To CN2 (7) Controller setting kit (3) Power supply plug (2)Controller To CN1 Table 2.
11.5 23 1 P 23 11 3 x 1/8, 1/4 [Port 1(P), 2(A), 3(R)] 16 Bracket assembly (Option) 26 2 2 x 4.5 (For mounting) 20 29 2 x M3 Thread depth 6.5 (For bracket, foot bracket mounting) 4 x 4.5 (For mounting) 20 29 Foot bracket assembly (Option) 22 44 52 DIN terminal (D) Air operated: VEX3120 Caution How to Use DIN Terminal Connector Refer to page 1739.
A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000 6 1
(n 2) 2 20 + 35 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9 5 20 CHQ 55 (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 D-M9W 10 20 55 CHK (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) (n = 2, 3, 4, 5) 25 + 35 D-M9A 10 25 60 CHN (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9 5 15 50 CHM CHM (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) (n = 2,
2 For Option U: 62 5 550 50 86 52 Operation display Serial communication connector Power supply connector Power supply switch Circulating fluid fill port Fluid level gauge 10 Contact input/output communication connector Circulating fluid return port Rc1/2 361.4 Handle 7 Product label 259.8 399 396 139.1 226 73 37.5 0 91 Handle 397 Circulating fluid outlet Rc1/2 Bypass valve1 464.6 Cooling