VCA

N Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30 36 X 71 74 Y 101 104 Z 65.5 71 55 62 26 31 17 19 19.5 21 33 39.5 26 31 35 43 23.5 27 39.5 43.5 57.5 65.5 35 41 26.5 29 41.5 48 50 55 VV2CA3 VV2CA4 8 Series VCA Manifold Exploded View Series VCA20 Description No. 1 2 3 4 Part no.

Booster Regulator Series VBA1110 to 4200 1

Tank capacity (l) Tc [s] = L W Obtain the tank capacity V. Select tank from table below.

Multistage Ejector Series ZL112/212 1

For EE (ZSE4E) 24 V 12 V 6 V 5 V 3 V 5 6 V S R Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 27 26 67 Lead wire length 0.5 (2.9) m Lead wire length 0.5 (2.9) m Not required for Nil, vacuum adapter (GN) and vacuum pressure gauge (G).

HRX-OM-X037

9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions of danger warning label .9-24 9.7 Standards . 9-25 9.8 Daily

PF2A/PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

7

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9N P P P p p IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9P P P P p p 2-wire 12 V M9B P P P p p 3-wire (NPN) 5 V, 12 V M9NW P P P p p IC circuit 3-wire (PNP) M9PW P P

CUJ

Lead wire length (m) Load voltage Auto switch model Electrical entry direction Pre-wire connector Special function Type Electrical entry Indicator light Wiring (Output) 3 (L) 5 (Z) Applicable load 0.5 (Nil) AC DC Perpendicular In-line M9N M9P M9B F8N F8P F8B 3-wire (NPN) Solid state switch Relay, PLC 12 V 24 V Yes Grommet 3-wire (PNP) 2-wire Auto switches marked with are produced

XLAQ/XLDQ

K L M Size 40 50 Actuator port direction Flange side Left flange surface Rear flange surface Right flange surface Right flange surface Left flange surface E H V I G L H A V V M A C U U Flange side e Temperature specifications/Heater r Auto switch type Symbol Nil H0 H4 H5 Temperature 5 to 60C Heater None None With 100C heater With 120C heater Symbol Nil Auto switch part no.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V Y Rc(PT) 1/8 (with sub plate) Without sub plate None With surge voltage suppressor

MGP

MXQ MXF m m MXW MXP MG MGP MGQ MGG 25/50 stroke Over 50 stroke 200 200 MGC P=0.5MPa P=0.5MPa MGPS80 MGPS80 MGF 100 100 Load weight m (kg) Load weight m (kg) CY1 MGPS50 MGPS50 50 50 MY1 40 40 30 30 20 20 10 20 30 40 50 100 200 10 10 20 30 40 50 100 200 10 Eccentric distance l (mm) Eccentric distance l (mm) 3.17-31 Series MGPS Construction !6 o i !0 !8 r !1 t !9 !2 !6e q u !4 w !7 !3 @0 !

Booster Regulator/Air Tank

V 10 T = t x = 89 x = 89 (s).

One-touch Fittings Series KQ2

M5 A D1 L1 D2 M L2 Part No.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Microspeed Cylinder

As a rule when W + Pa>PA adjust P so that W + Pa = PA. (2) Installing a regulator with check valve at position (b) can decrease lurching during descent and actuation delay during ascent. As a rule adjust P so that W + PA = Pa.

Series: 25A-PFM5, Rated Flow Range: 10 [0.2 to 10 (5) L/min], Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Operation Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Lead Wire: W (w/Lead Wire w/Connector, Rubber Cover for Connector, Silicone Rubber)

ZQ-OM01401

W-3 3-N (1) (2) (3) (4) (5) (6) (7)(8) (9) (1) (6) 05 0.5 07 0.7 W (2m) 10 1.0 (7) (V ) (8) (P ) (2) 1U 0 (M5x0.8) 3M 1 3.2 () 0 (M5x0.8) 2 4 () 2 4 () (3) 3 6 () 3 6 () 4 3.2 () 5 4 () B 5 4 () 1) (9) (4) ( [kPa] VA -100 to 100 NPN1 + VB PNP1 + N 1) ZFC (5) 2) M SI (kPa) 2) (99 10 ) ZZQ108A-B S C-A (1) (2) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3)

W2M/4M

Conduit Current Type 2-wire: 4-20mA Current Type 2-wire: DIN cuffir tp6 2-'n6 qr: rlplr .rsmr and por alpdy or {-2oln^l Voltage 3-wire: 0-5V,0-10V Input impedance: 30(KQ) Voltage 3-wire: Input signal oI 0-5,0-10(V) Power supply of 12-15(V) xPlease be sur !

Flow Control Equipment

JIS Symbol How to Order AS 2 2 0 0 M S Options Body size None Sealant S 1 2 M5 1/8, A1/4 For low speed operation Port size Style Port size Applicable series Cylinder direct connected elbow style 2 Tube Cylinder M5 X 0.8 R(PT)1/8 R(PT)1/4 AS12l0M-M5 AS22l0M-01 AS22l0M-02 M5 01 02 Rc(PT)1/8 Rc(PT)1/4 Controlled method 0 1 Meter-out Meter-in Needle Valve/Flow Characteristics AS12l0M-M5 AS22l0M

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.