PF2D 1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.
: Rc3/8 VQ4 0 1 G H 0 1 G H 0 1 G H G H 3 position double check: VQ465 0 1 2 position double: VQ425 l 3 position closed center: VQ435 l 3 position exhaust center: VQ445 l 3 position pressure center: VQ455 l VQZ VQD 0 1 178.5 105.5 73 42.5 50 VZS 164.5 178.5 Indicator light 11(A port) (12.5) 11(B port) (12.5) 59 73 42.5 105.5 VFS Indicator light 50 11 (A port) 11 (B port) VS 2 4 (12.5) (12.5
Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Metric size 02 23 04 06 08 10 12 Inch size 01 03 07 09 11 13 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)
12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Data Bore size (mm) The dimension inside ( ) is for D-A93.
(M12 ) (EX245-DX1EX245-DY1) IP65 0.2Nm EX9-AWTS M12 10 . 10-4 (EX9-AWTS) 66 No.EX-OMU0020CN 11. 11.1. . 11-1 . 11-1 Length the EX245 series module n 0 1 2 3 4 5 6 7 8 L 113.6 167.6 221.6 275.6 329.6 383.6 437.6 491.6 545.6 L = 54n + 113.6 (8 ) mm 67 No.EX-OMU0020CN 12. 12.1.
20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.
20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.
20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.
Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard strokes (mm) Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum
150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load
39.3 27.8 55 39.3 17 55 13.2 AS321F-03-08 AS321F-03-09 8 5/16" 15.2 18.5 29.5 41 23 29.5 57 41 18.5 57 19.8 45.4 40.4 40.2 35.2 15.2 3/8 45.4 40.4 40.2 35.2 19.8 23 3/8 AS321F-03-10 AS321F-03-11 31.8 43.3 21 59 17.9 10 18.5 21 43.3 31.8 59 3/8" AS321F-03-12 AS421F-04-11 12 3/8" 20.9 22 44.3 32.8 33.6 61 47.9 21 100 17.9 24 28.6 49.2 49.6 42.1 1/2 24.5 56.7 (23.8) AS421F-04-10 AS421F-04-13
Refer to page 5-11-4.) Not required (Use turbine oil Class 1 ISO VG32, if lubricated.) Unrestricted Base mounted 300/50 SA Note 1) Be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.
M 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-2 12 R 12.1 . 12-1 12.2 . 12-1 12.3 . 12-1 12.4 . 12-2 12.5 . 12-3 13 S 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 T 14.1 . 14-1 14.2 . 14-1 14.3 . 14-1 14.4 . 14-2 14.5 . 14-3 i i i.1 () 3 i.1.1 3 i 1 i i.2 i 2 i i.2.1 i.2.2 i.2.3 50 i.2.4 i 3 i i.2.5 0 i.2.6 WARNING !
rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.
(Refer to page 12.) 11 Multi-Axis Step Motor Controller JXC73/83/92/93 Series Wiring Example 1 For 4 Axes 1 pc.
(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2
LEJ-OM00401 PRODUCT NAME Electric Actuator / Slider Type AC Servo Motor For Clean Room Ball Screw type MODEL / Series 11-LEJ Series The description of this manual is only a peculiar content to "11-LEJS For Clean Room". Please match and confirm the manual of each model to a detailed content of the product.
12.5 13 15 16 20 A 11 10.5 12 14 13.5 16.5 B 7 8.5 9 11 12 16 A 6 7.5 9.5 9 12 B 8 8.5 10.5 11.5 15.5 Hs 24.5 26 29 33 38.5 45.5 Hs Hs 22 24 26.5 30.5 36 43 A 7 6.5 8 10 9.5 12.5 20 25 32 40 50 63 20 25 32 40 50 63 32.5 35.5 39 44.5 51.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting. 514 Auto Switch Mounting MGPW Series Minimum Stroke for
With arm Port side CK1 Rotary direction: L During unclamping (Extension end) Rotary direction: R During unclamping (Extension end) M CLK2 N With Arm Model (mm) I N O P U V 4 5 8 11 29 36 20 25 8 11 M3 x 0.5 M4 x 0.7 MKB12-Z MKB16-Z CLKG CKQ CLKQ 10 mm Clamp stroke M O I P Model Rod state CK CLK 20 mm 30 mm Retracted Extended Retracted Extended 28.5 46 31.5 49 38.5 66 41.5 69 48.5 86 51.5
Inspection Follow the procedure of the table 11 for inspection after assembly. Table 11. Inspection items Items to be inspected Criteria and test method Criteria Remarks 1 Dimension Measure dimensions of main parts As per drawing, catalog and specifications. 1.Finish of each part should be No defect shall be observed by view. good.