11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Body size 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard Applicable tubing O.D. 1/2 standard Inch size Metric size 3.2 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" With One-touch fittings 4 5/32" 6 3/16" 8 1/4" 10 5/16" 12 3/8" 1/2" Use 1/8" tube. 15-9-97 7 Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.

3-Position Rotary Table

No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 Description Body Cover Plate Seal Piston Pinion Gasket (for cover) Table Bearing retainer End cover A End cover B Cylinder tube A Cylinder tube B Tube cover A Tube cover B Sub piston R Sub piston F Adjustment bolt R Adjustment bolt F Magnet Wear ring Bearing Material Aluminum alloy Aluminum alloy Aluminum alloy NBR Stainless steel

RS2H-OM0045P

AF ,AR , , , ,1 ISO VG32. 5 , 5 8 - 3-2. 1 B 1 3 3-3. 3-4. 9 - () 3-5. ,, (-)90 , 5.2 Nm A 10 - 3-6. ,,, RS2H5079Nm RS2H63801214Nm -5 3-7. M4 M41.5Nm -6 11 - 4. A GR-S-010(10g) -7 5. -8-9 -8 -9 12 - , 3 6. 6-1. 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13 - / 6-2.

MRHQ

Rotary port B Rotary port A 12-11-5 6 Series MRHQ Model Selection Procedure Calculation Example Operating conditions 1 h O G Enumerate the operating conditions according to the mounting position and workpiece configuration. Please refer to page 12-11-12 for drawing dimensions.

Plug-in Unit

B 19 () (+) Orange Black SOL. A 7 () (+) Blue None 20 () (+) Red White 8 () (+) Purple White Station 7 SOL. B SOL. A Station 8 SOL. B 21 () (+) Brown White SOL. A 9 () (+) Grey Black 22 () (+) Pink Red Station 9 SOL. B SOL. A 10 () (+) White Black Station 10 SOL. B 23 () (+) Grey Red 11 () (+) White Red SOL. A Station 11 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL.

2/3 Port Valve

Description B VNH1 VNH2 VNH3 VNH4 VNH1-16 VNH2-16 VNH3-16 VNH4-16 Bracket (with bolt and washer) 4.2-30 VNH Specifications 3 port valve 2 port valve A B A B VNH311 20A A B VNH411 25A A B VNH113 10A A B VNH213 15A A B VNH313 20A A B VNH413 25A A B VNH133 10A A B VNH233 15A A B VNH333 20A A B VNH433 25A A B VNH111 10A VNH211 15A Model Operating fluid pressure Fluid Operation 0 to 7.0MPa 0 to

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

) 36.5 (Extension end adjuster) Extension end adjuster Bottom view of MXQ16L-50 1322Vacuum suction port M5 x 0.8 11 11 J I 12 5.5 Operating port 2 x M5 x 0.8 13 35 45 Max. 12 (Retraction end adjuster) 5H9 ( ) depth 5 +0.030 0 GA 6 HA 5H9 ( ) depth 5 +0.030 0 NN x M6 x 1 thread depth 12 A B 1 24 5.1 5.1 10.5 9.5 10.5 A B G (NN 1) x H H 21 9 21 9 A-A B-B (mm) Model F 38 38 48 58 40 46 44 44

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Trace the arrow mark , starting with the point A at the pressure dew point 10C to find the intersection B on the pressure characteristic line for 0.7 MPa. 2. Trace the arrow mark , starting with the point B to find the intersection C at the atmospheric pressure dew point. 3.

RLQ

Hs A B A B Proper Auto Switch Mounting Position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W Bore size (mm) B B A A B A B A 32 3 11 51 43 6 46 5.5 45.5 40 5.5 13.5 49.5 57.5 8.5 52.5 8 52 50 19 11 53.5 61.5 14 56.5 13.5 56 63 22 14 59 67 17 62 16.5 61.5 Auto Switch Mounting Height (mm) D-A7H, A80H D-F7, J79, F7W D-J79W

PFxx-OMP0001CN

C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMB7501 5 L/min 500 L/min PFMB7102 10 L/min 1000 L/min PFMB7202 20 L/min 2000 L/min PFMB7501(500L/min) PFMB7102(1000L/min) 200 kpa [kpa] [kpa] 200 kpa 400 kpa 400 kpa [L/min] [L/min] PFMB7202(2000L/min) 200 kpa [kpa] 400 kpa [L/min] -65No.PF-OMP0001CN-F IN 3F.S.8 cm IN OUT [cm] -66No.PF-OMP0001CN-F PFMB7501/7102/7202 2x A B D E F H K L N PFMB7501/7102

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

MHx-OMM0057

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / 1 1.5 *3) *3)1 1 () 3 - 2

0.4

consumption (W) Max. operating frequency (Hz) A 80 1200 B 40 1000 C 10 550 D 4 350 E Note) Two mounting screws (M3 x 0.5) and a gasket are included.

Compact Cylinder with Air Cushion and Lock Series RLQ

Hs A B A B Proper auto switch mounting position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W D-F7LF Bore size (mm) B B A A B A B A B A 32 11 10 50 51 3 43 6 46 5.5 45.5 40 13.5 12.5 56.5 57.5 5.5 49.5 8.5 52.5 8 52 50 18 19 61.5 60.5 11 53.5 14 56.5 13.5 56 63 22 21 67 66 14 59 17 62 16.5 61.5 Auto switch mounting height

VQ4000

) (12.5) 11(B port) (12.5) Indicator light Indicator light 167 181 59 73 50 90 108 2 4 24.6 38 48 11 (A port) 11 (B port) B A (12.5) (12.5) 14 12 1 5 3 4 2 Manual override 30 45 24.6 A B 25.6 Mounting hole 38 48 B A 14 5 3 1 12 30 45 25.6 Mounting hole Manual override 14.5 27 30.5 32 41.5 91.5 129 G1/2 Electrical entry 79 PE X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R1 R2 P 15.5 Rc1/8 External

ASD

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

Compact Electro-pneumatic Regulator Series ITV0000

(For details, refer to "Specific Product Precautions 1" on Page 11.)

VCC

(Equivalent tightening torque: T) B Max. = C D 18.8 13.8 11.8 5.8 2.8 0.5 8.6 Width across flats 14 Tightening torque: Tighten within 10 1 Nm. 11 G1/4 (mm) Part no.