V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

PFxx-OMS0001CN

( 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 20 1 atm()[Anr] ripple -13No.PF-OMS0001CN-A 9022545 -14No.PF-OMS0001CN-A 2 0.50.7 Nm M4 (4 ) (71 ) M4 -15No.PF-OMS0001CN-A

EXxx-OMN0027CN

to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Rotary Table Series MSU

Adjustment: Max. 8.2 6 B port A port 0.5 +0.025 0 3-3H9 long groove depth 2.5 ( A , B , C ) 5g6 0.004 0.012 12h9 0 0.043 4-M4 x 0.7 depth 8 34 0 0.062 42h9 Top ports/MSUA3-SE 36 10 A port B port 2-M3 x 0.5 11 5 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

FGD-C

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : ) JIS B 8433-1993: *2) , 1. 2. 3. 1. 2. 3. 4. 4/11 FGX-OM-L007-C / 1 1.5 () 5/11 FGX-OM-L007-C FGD Series FGD , 0.5MPa 4080 oC 40 oC IN/OUT 0.1MPa , U IN/OUT 6/11 FGX-OM-L007-C 1. 1-1. 1 2 (1) 3 (2) 4 (3) (4) 5 (5) 6 (6) 7 (7) 8 (8) 9 (9) (10) (2 FGD*B ) 10 (11) (12) 18 (13) (14) 11 (15) (16) (17

VXZ

Option Symbol and Composition Option Symbol and Composition Main body, shading coil material Holder material (in core ass'y) Option symbol Seal material Coil insulation type Main body, shading coil material Standard A B D E F G H J L N P T X Option symbol Seal material Coil insulation type NBR FKM Standard A B D E F G H J L N P T X NBR FKM B Polyacetal B FKM EPDM Brass or BC6, Copper FKM

IP80-OM00019

No.IP80-OM00019-B / / * 3-4 5 1. 5 2. 6-7 2-1 IP8000 6 2-2 IP8100 7 3. 8-9 3-1 IP8000 8 3-2 IP8100 9 4. 10-12 5. 13 5-1 13 5-2 13 6. 14 7. 15-17 7-1 16 7-2 17 7-3 17 8. 18 9. 18-20 10. 20-22 11. 23-25 11-1 23 11-2 IP8100 23 11-3 IP8000 24 11-4 24 11-5 25 12. 26 13. 27-33 2 A (ISO/IEC)(JIS)*1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

PF2D

1 q t i 385 PF2D Series Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A 4 x 4.5 52 1 18 PF2D540-19 Internal Circuits and Wiring Examples 78 86 186 -1/2 Analog voltage output Analog current output 56 15 Sensor Monitor PF2D3 Black Output for PF2D3 4 8 Switch output Main circuit Main circuit Main circuit Main circuit 3 7 U DC

DOC1020530

Power off Power on (0) (A): Ready-off, Servo-off Not ready to switch on (1) (15) Switch on Fault disabled (2) (7) (12) (10) (14) Ready to switch on (3) (6) (B): Ready-on, Servo-off (8) (9) Switched on (4) (5) Fault reaction active (16) (C): Ready-on, Servo-on Quick stop Operation (13) active enabled Error occurs (11) Transition by slave Transition by master Transition by slave or master FSA

MHS

40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800 1,380 2,360 4,120 MHSHJ3-DB 520 770 1,340 2,310 4,120 5 3. 3-1. 1 2 3 3-2. 1 .

EXxx-OMV0017-D

Remote units 0 / 15 / 31 / 63 / 127 Remotes (EX600-WEN#) 0 / 15 / 31 Remotes (EX600-WPN#) 15 Remotes Set the number of Wireless Remote units which are registered to the Wireless Base unit.

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

nut C1 X L1 Auto switch D-A9, F9 Rod end male thread (mm) Bore size (mm) 63 C1 X H1 L1 26 28.5 M18 x 1.5 33.5 80 32.5 35.5 M22 x 1.5 43.5 100 32.5 35.5 M26 x 1.5 43.5 (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100

53

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

XG_-OMV0028

9 27 15 12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4. 4-1.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

A B A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside (mm) B B CY Model Mounting Switch operating range A B A B A B 50 MXY6 2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 38 55 MXY8 2.5

ISA2

6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Throttle ZSP 2 port solenoid valve ISA2 Spacer Regulator Y20 IS ZSM Terminal block box ISA-11-L (Centralized wiring/Supply port left) ISA-11-R (Centralized wiring/Supply port right) PF2 IF IN Data Spacer Y20 Seal for additional station ISA-7-B End plate L ISA-6-A End plate R ISA-6-B ISA-7-A When

MGF

Snap ring Spring steel Aluminum alloy 6 18 Anodized End plate Rod seal NBR Aluminum alloy 7 19 Hard chrome plated Non-rotating rod Piston seal NBR Stainless steel 8 20 Bushing O-ring A NBR Resin 9 21 Bushing (for non-rotating rod) O-ring B NBR Lead-bronze casting 10 22 Bumper O-ring C NBR Urethane rubber 11 23 Nickel plated Electroless nickel plated Reinforcement ring Hexagon socket head

Industrial Filters

D 3B (90) ORIENTATION N N OUT IN 250 DRAIN Rc3/8 Standard Models (mm) Maximum operating pressure Element length (L) Internal volume (L) IN/OUT Flange standard Weight (kg) N (Port size) A B C D Model 15 (1/2B) 185 380 447 467 15 20 (3/4B) 250 2 185 380 450 470 15 25 (1B) 185 385 467 487 15 JIS 10KFF 1 MPa FGC1 15 (1/2B) 185 645 712 732 19 20 (3/4B) 500 3 185 645 715 735 19 25 (1B) 185 650