CEx-OMQ0011

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1

Compact manifold regulator ARM5 Series

side OUT side Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y 4, 5/32 2.5 6 11 35.5 2.5 6 11 35.5 4, 5/32 2.5 6 11 37.5 2.5 6 11 37.5 6 3 6.5 11 36 3 6.5 11 36 6 3 6.5 11 38 3 6.5 11 38 1/4 6.5 6 11.5 38.5 6.5 6 11.5 38.5 1/4 6.5 6 11.5 40.5 6.5 6 11.5 40.5 710 Regulator/

Rotary Table/

How to Order Specifications and Allowable Load 11-MSQA is identical to the high precision type and 11-MSQB is identical to the basic type. 11 MSQ 10 A90 B A S Number of auto switches Clean series Vacuum type Auto switch type A B High precision type Basic type A R With adjustment bolt Shock absorber Size 10 20 30 50 Dimensions Clean series products do not have empty holes.

One-touch Fittings

Y Applicable tubing O.D.: 4, 6 Different Diameter Straight: KQ2H Effective area [mm2] Min. port size Release button dimensions a *1 D2 Release button dimensions b L M1 M2 Applicable tubing a Applicable tubing b Applicable tubing O.D.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Specifications W A D With shock absorber (mm) 11-MXPJ6 11-MXP10 11-MXP12 11-MXP16 Model MXPJ6 MXP10 MXP6 MXP12 MXP16 Model Cylinder bore size (mm) 6 10 12 16 Surface C to surface A 0.02 Parallelism Surface D to surface B 0.02 M5 x 0.8 M3 x 0.5 Port size Surface C to surface A 0.004 Traveling parallelism Fluid Air Surface D to surface B 0.004 Action Double acting M dimension tolerance 0.05

S070

It can cause malfunction or break the coil. 4-11-19

Sine Cylinder Series REC

Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Auto Switch Proper Mounting Position (mm) D-A3 D-A44 D-G39 D-K39 D-G5NBL D-H7 D-H7C D-H7W D-H7NF D-H7BAL Auto Switch model D-C7 D-C80 D-C73C D-C80C D-M9 D-M9W D-B5 D-B64 D-B59W D-A9 D-G5NTL Bore size (mm) A B A B A B A B A B A B A B A B 20 55.5 30.5 59.5 34 56 31 50 25 53 28 49.5 24.5 55 30 51.5 26.5 25 55.5

Sine Cylinder Series REC

Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Auto Switch Proper Mounting Position (mm) D-A3 D-A44 D-G39 D-K39 D-G5NBL D-H7 D-H7C D-H7W D-H7NF D-H7BAL Auto Switch model D-C7 D-C80 D-C73C D-C80C D-M9 D-M9W D-B5 D-B64 D-B59W D-A9 D-G5NTL Bore size (mm) A B A B A B A B A B A B A B A B 20 55.5 30.5 59.5 34 56 31 50 25 53 28 49.5 24.5 55 30 51.5 26.5 25 55.5

New

B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part (mm) Faston connector Electrical entry 250 Series Grommet

EXxx-OMZ0016

Brazil EXW1-BMJAAE E EXW1-BMJAAN N EXW1-BMJABE E EXW1-BMJABN N A Base MJ B A B EXW1-RDXNE4AE E EXW1-RDXNE4AN N EXW1-RDXNE4BE E EXW1-RDXNE4BN N EXW1-RDYNE4AE E EXW1-RDYNE4AN N EXW1-RDYNE4BE E EXW1-RDYNE4BN N EXW1-RDMPE3AE E EXW1-RDMPE3AN N EXW1-RDMPE3BE E EXW1-RDMPE3BN N EXW1-RDMNE3AE E EXW1-RDMNE3AN N EXW1-RDMNE3BE E EXW1-RDMNE3BN N A DX N B E4 A EXW1 DY N B Remote R A P B DM E3 A N B -17No.EX-OMZ0016

Rotary Actuator/Vane Type

A and B.

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

LEF-OM007xx

*Refer to the table of Applicable stroke 6mm 6mm 8mm 8mm 10mm 10mm B B Cable type *Applicable stroke Standard produced upon receipt of order Without cable Nil Without cable Nil 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Robotic type cable R Robotic type cable R 11-LEFS25 11-LEFS25 Standard cable S Standard cable S 11-LEFS32 11-LEFS32 Motor cable

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

80

/Single Unit Body material Brass 2 x 3.4 Mounting hole W Y Grommet X U 300 Q F D Full wave rectifier (AC type) C R [mm] 1 E G Mounting method Model Port size P B B1 C D E F J K M 2 x P Port size B B1 VDW1 M5 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 22 11 51.7 20 8 13.5 M3 5 15 Mounting bracket dimensions (XD) Electrical entry M Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.