0.

Formula: L5 = 16n + 10 L3 = 16n + 20 n: Stations (Max. 20 stations) Dimensions L n 2 3 98 87.5 68 15 58 4 123 112.5 84 19.5 74 5 135.5 125 100 18 90 6 148 137.5 116 16 106 7 173 162.5 132 20.5 122 8 185.5 175 148 19 138 9 198 187.5 164 17 154 10 210.5 200 180 15.5 170 11 235.5 225 196 20 186 12 248 237.5 212 18 202 13 260.5 250 228 16.5 218 14 285.5 275 244 21 234 15 298 287.5 260 19 250

LEC-OM02904

AC DC 2. 10 3 10 (2) ()40 10(555) (10.1) A P (10.1) KT [m2] [W] [] [56] A P T K (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10 10.3 (E6) OFF 10 11000 (EM1) (EM1) 10.3.1 (1) 10.3 (10.2) ((2)(a)(b)) ON EM1 (EM1) OFF V0 te 10.3 t 1J Lmax V L 0 (10.2) e 60 J M Lmax VO JM JL te [mm] [mm/min] [kgcm 2] [kgcm 2] [s] [s] 7kW10ms11k22kW (50ms) 10 5 10 (2) (10.2) (a) 200V 25 73 20 23

SZ3000

(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...

High Purity Fluoropolymer

M H L2 L1 A E M LQ1L12-M LQ1L11-M 3 4 11.5 1/8 11.5 10 15.5 18 1/8" R (NPT) Port size Class 1 LQ1L43-M LQ1L42-M LQ1L41-M LQ1L36-M LQ1L35-M LQ1L34-M LQ1L33-M LQ1L32-M LQ1L31-M LQ1L24-M LQ1L23-M LQ1L22-M LQ1L21-M 4 6 4 6 1/8" L1 16.5 14 14.5 15 20.5 27 1/4" 10 L2 M 1/4" 6 8 (A) 23 17 20 20 26.5 35 1/4 10 H 6 8 3/8" (E) Class 2 to 5 12 10 12 3/8" 28 21 25 24 33 45 1/2" LQ1L44-M 10 M LQ1L54-

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

Max. screw-in depthl mm Model MHC2-10 MHC2-16 MHC2-20 MHC2-25 5 8 10 12 MHC2-10 MHC2-16 MHC2-20 MHC2-25 0.31 0.59 1.4 2.8 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 MHZ MHF MHL MHR MHK MHS MHC MHT MHY MHW -X MRHQ MA D641

Fieldbus System

V, 1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA Input signal range 16 bit resolution 10 to 10 V, 5 to 5 V 20 to 20 mA EX600-AXA Max. rated input signal 15 V 22 mA Note 2) Input impedance 100 kW 50 W Linearity (25C) 0.05% F.S.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

300 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P 13 13 5 5 10 10 5-M5 0.8 (Piping port) 10 10 14 5-M5 0.8 (Piping port) 14 28 28 [ ] for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 28 Manifold Drawings Series SYJ3000 Type 20 Manifold: Top Ported / SS5YJ3-20Station (mm) Grommet (G), (H) G : About 300

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

HRX-OM-R016

0.2 20 0.1 10 Availavel area 0.0 0 0 5 10 15 20 25 Circulating fluid flow[L/min] Fig. 9-9 Pump capacity(HRS030--20-MT) 9.7 Required facility water flow (for water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature[] *The amount of the facility water for the operation with rated circulating fluid, cooling capacity which is described

VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

Large Size Vacuum Module: Series ZR

ZR1-SR2-82-A(a set of four threads) For nozzle size 18, 20 ZR1-SR2-86-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure 0.2 MPa Pressure 0.2 MPa 40 30 30 0.3 MPa External grip 0.3 MPa 0.4 MPa 20 0.4 MPa 20 0.5 MPa 0.5 MPa 0.6 MPa 10 0.6 MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

HRX-OM-W060

return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series 8.5 Pump Capacity 8-9 HRX-OM-W060 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 Circulating 0.6 fluid outlet 0.5 Pressure [MPa] Lifting head [m] Lifting head [m] Usable flow rate range 0.4 0.3 Circulating fluid return 0.2 0.1 0 0 20 40 60 80 100 120

Precautions 1

I-020B I-032B I-040B Bore size 20 25, 32 40 +0.058 0 0.1 0.2 0.1 0.2 +0.058 0 9 9 36 10 20 16 14 46 9 9 18 41 M8 x 1.25 14 10 11 66 M8 x 1.25 +0.058 0 0.1 0.2 0.1 0.2 +0.058 0 9 38 9 20 18 10 14 48 9 9 22 45 14 10 14 69 M10 x 1.25 M10 x 1.25 +0.070 0 0.1 0.3 0.1 0.3 +0.070 0 12 55 16 24 22 20 69 16 12 24 50 20 14 13 92 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting (mm) Double Knuckle

MRHQ

0 10 20 30 40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

EXxx-OMQ0016

Enable Generates an error. 1 -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Analogue input range [Range] Set the analogue input device range per channel. Selects the analogue input range. -10..10 V 2 [Measurement Range] 4..20 mA Offset binary Offset binary. Analogue data format [D_Format] Configure analog data format per unit.

HRX-OM-R039

-(T) . 8-7 8.4.2 HRSE018-A-10-(T) . 8-7 8.4.3 HRSE012-A-20/23-(T) . 8-7 8.4.4 HRSE018-A-20/23-(T) . 8-8 8.4.5 HRSE024-A-20/23-(T) . 8-8 8.5 Pump capacity . 8-9 8.5.1 HRSE012/018-A-10 . 8-9 8.5.2 HRSE012/018/024-A-20/23 . 8-9 8.5.3 OPTION-T (HRSE012/018-A-10-T). 8-10 8.5.4 OPTION-T (HRSE012/018/024-A-20/23-T) . 8-10 8.6 Sample DoC.