VQ5000

Nil E Yes Without light, with surge voltage suppressor Seal Metal seal Rubber seal 0 1 Coil voltage Function 1 2 3 Stations 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC D side U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Applicable to DC sepecifications.

OMR0032

-3) = 300 [pulses] Travel speed: 60 (30 10-3) = 2000 [pulses/s) Acceleration time: 60 1500 = 40 [ms] Deceleration time: 60 1000 = 60 [ms] [Calculation example: Target position 2] Travel distance: 6 (30 10-6) = 200 [pulses] (in the reverse direction) Travel speed: 60 (30 10-3) = 2000 [pulses/s] Acceleration time: 60 1500 = 40 [ms] Deceleration time: 60 1000 = 60 [ms] 61 - Step Data

Manually Operated Integral Fitting Type/Threaded Type Series LVH

NPT 1/4, 3/8 37 26 37 112.5 110.5 47 36 M6 x 1 20.5 16 99 Rc 3/8, 1/2, NPT 3/8, 1/2 50 33.5 47.5 142 138 60 46 M8 x 1.25 44 10 11 55 3.5 Rc 1/4, NPT 1/4 27 37 20 4 77 75.5 36 30 56 19 15 80 5.5 Rc 3/8, NPT 3/8 37 46 34 7.5 111.5 109.5 47 36 PPS 68 20.5 22 99.5 5.5 Rc 1/2, NPT 1/2 50 57 42 8 142.5 138.5 60 46 44 10 14.5 58.5 3.5 Rc 1/4, NPT 1/4 27 37 20 4 80.5 79 36 30 56 19 19 84

Floating Joint

-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 6 10 (CJ1) 10 (CZ1), 15 (CJ1) 15 (CZ1) 20 25, 32 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 14 18 22 26 30 36 0.5 0.7 0.8 1 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 15 17 23 23 30.5 34 38 47.5 56.5 68 94.5 112 23.2 26 34.5 34.5 44 49.5 60 74.5 89.5 110 152 178 7 9 12.5 12.5 17.5 19.5 20 25 29 35 42 52 8 10 14 14 45 55 12 12 16 16 21 24 31

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Seal Metal seal Rubber seal Coil voltage 0 1 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function 1 2 3 Stations U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) D side (2) Note 1) Applicable to DC specifications. Note 2) Refer to page 2-5-39 for external pilot specification.

Series SV

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 110 Specific Product Precautions 1 Series SV Be sure to read before handling. Refer to pages 101 through 104 for safety instructions and common precautions.

REC

Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 FX Up to 700 18 15.5 34 13 26 8 13 4 60 75 10 41 20 2025 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 20, 25, 32 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 Data 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NN P S Z ZZ H1 H2 I K MM N NA M20 x 1.5 Bore (mm) Stroke range 20 Up to 700 1/8 146 191 200 M8

Rotary Actuator/Vane Style Series CRB2

assembly 9 10 19 25 9 10 19 25 Auto switch unit + 2 switches 30 30 50 60 46.5 46.5 30 30 50 60 Angle adjuster 30 47 90 150 203 203 30 47 90 150 49 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Thermo-dryer

Hz) 4.2 A 10 A 180/200 W 50/60 Hz 220 W 0.01 m (99.9% filtration efficiency) Particles of 0.3 m or more: 3.5 particles/L [ANR] or less Heater operation, PID control Singlephase 200 VAC (50/60 Hz) 2.1 A 5 A Singlephase 230 VAC (50/60 Hz) 2.1 A 5 A Singlephase 100 VAC (50/60 Hz) 9.4 A 15 A Singlephase 200 VAC (50/60 Hz) 4.8 A 10 A Singlephase 230 VAC (50/60 Hz) 4.8 A 10 A Power supply Note

C92

11 13 15 15 18 22,5 31 10 10 11 11 15 15 18 20 10 12 12 16 16 20 25 32 5,5 5,5 6,6 6,6 9 9 11 14 38 41 50 52 66 76 94 118 51 54 65 67 86 96 124 156 10 10 14 14 18 20 28 34 21 24 33 37 47 55 70 97 4 4 6 6 6 6 18 23 18 22 30 35 40 50 60 88 26 28 32 40 50 60 70 90 31 35 45 50 60 70 90 126 32 36 45 50 63 71 90 115 8 10 12 12 14 15 20 25 32 40 50 63 80 100 125 160 1.12-8 ISO Cylinder/Standard

Title not found

Metric System (g) = 105.5 meters per sec. per sec NewtonMeters KilopondMeters Foot-lbs Inch-lbs 3 3 1.020 x 10 -1 7.376 x 10 -1 8.851 1 3 7.233 3 3 1 3 86.80 0.01 3 1.382 x 10 -1 1 3 12 3 1.356 1.130 x 10 -1 1.52 x 10 -2 8.333 x 10 -2 1 3 Length (Linear Measurement) Meter Centimeter Kilometer Mile Inch Foot 3 100 3 1x10 4 6.214x10 -4 39.370 3 3.281 3 1 3 1 3 1x10 5 6.214x10 -6 3.937x10 -1

Title not found

Metric System (g) = 105.5 meters per sec. per sec NewtonMeters KilopondMeters Foot-lbs Inch-lbs 3 3 1.020 x 10 -1 7.376 x 10 -1 8.851 1 3 7.233 3 3 1 3 86.80 0.01 3 1.382 x 10 -1 1 3 12 3 1.356 1.130 x 10 -1 1.52 x 10 -2 8.333 x 10 -2 1 3 Length (Linear Measurement) Meter Centimeter Kilometer Mile Inch Foot 3 100 3 1x10 4 6.214x10 -4 39.370 3 3.281 3 1 3 1 3 1x10 5 6.214x10 -6 3.937x10 -1

Coolant Valve

Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only 4 4 5 6 5 6 Manual override 7 7 Non-locking push type Non-locking push type A (projecting) Nil Semi-standard For other rated voltages, please

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

pulses) 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses)

ZX

ZX 36 A VJ10 ZR Rated voltage Lead wire length ZM (Mounting hole) Symbol L (mm) Symbol Rated voltage Lead wire color Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.)

XL

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External 30 35 40 45 65 85 XLF Operating time ms Note 2) 30 35 60 60 100 130 XLFV Flange type KF (NW), K (

High Vacuum Angle Valve, XL Series

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External 30 35 40 45 65 85 XLF Operating time ms Note 2) 30 35 60 60 100 130 XLFV Flange type KF (NW), K (

180

Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 25 Gripping force (N) External grip Gripping force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

Pad diameter (mm) 10 10 Vacuum entry port (Refer to Table (1) for applications.)

0.55

plug connector (L) M-type plug connector (M) DIN terminal (D) (Y) 52.1 Max. 10 30 Applicable cable O.D.