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Enable Generates an error. 1 -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Analogue input range [Range] Set the analogue input device range per channel. Selects the analogue input range. -10..10 V 2 [Measurement Range] 4..20 mA Offset binary Offset binary. Analogue data format [D_Format] Configure analog data format per unit.

20 40 60 80 100 0 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph x Maximum Speed 300 mm/s or Less 10 Selection Example (Vertical Mounting) 1.

AK1050 10 to 500 psig (0.07 to 3.4 MPa) AK1015 5 to 150 psig (0.034 to 1.0 MPa) AK1001 0.5 to 10 psig (0.0034 to 0.07 MPa) Delivery pressure Select compatible materials of construction for the gas Gas Vacuum to 300 psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure 4500 psig (30.7 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 1 x 10-10 Pam3/sec NPT female

2.7 X 10-6 Calculation of weight m2 = d X e X f X Specific gravity = 0.002(kg) Iz2 = {0.002 X (52 + 102)/12} X 10-6 Moment of inertia around Z2 axis = 0.02 X 10-6 (kgm 2) IB = 0.02 X 10-6 + 0.002 X 472 X 10-6 Iz2 = {m2(d 2 + e2)/12} x 10-6 Moment of inertia around Z axis IB = IZ2 + m2r22 x 10-6 = 4.4 X 10-6 (kgm2) I = 9.0 X 10-6 + 4.4 X 10-6 Total moment of inertia I = IA + IB = 13.4 X

An example is shown below. direction + direction direction + direction 0 5 10 [mm] 0 5 10 [mm] This example shows the Target Position set at 10 mm. The table of the Card Motor moves to 10 mm from the origin position. 11.5 Relative positioning The Target Position is determined based on the current position.

HRSH Series HRX-OM-R026 Contents 9.4.1 HRSH090-A-20. 9-10 9.4.2 HRSH090-A-40. 9-10 9.4.3 HRSH090-W-20-HRSH090-W-40. 9-11 Pump capacity . 9-12 9.4.4 HRSH090-A-20/40-HRSH090-W-20/40. 9-12 9.5 Types of hazard labels . 9-13 9.5.1 Locations of Hazard Labels . 9-14 9.6 Compliance standard . 9-15 9.7 Sample DoC. . 9-16 9.8 Daily Check Sheet . 9-17 Chapter 10 Product Warranty . 10-1 HRSH Series

160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

Applicable Fluid Examples Applications Chemical Operating temperature range Chemical Operating temperature range Cleaning equipment 50 to 140F (10 to 60C) 50 to 140F (10 to 60C) Deionized water Ammonia hydrogen peroxide solution Plating equipment 50 to 104F (10 to 40C) 50 to 140F (10 to 60C) Hydrofluoric acid Sodium hydroxide 50 to 122F (10 to 50C) 50 to 140F (10 to 60C) Sulfuric acid (except

Motion on RECL32-300 ML1C REA REC Pressure fluctuation Load fluctuation Speed fluctuation RHC 0.5 0.5 0.3 0.5 Pressure (MPa) Pressure (MPa) Pressure (MPa) Reducing actuation cycle time 10 10 30 10 Load (kg) Load (kg) Load (kg) MTS 100 300 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 CC Max. 500mm/s of high speed transfer is possible.

12 16 0.1 5 10 20 30 40 50 100 200 0.01 5 10 20 30 MXW Overhang L (mm) Overhang L (mm) Maximum Speed: Up to 400 (mm/s) Graph (5) Graph (2) Maximum Speed: Up to 300 (mm/s) MXJ 0.3 50 40 30 20 MXP 0.2 10 MXY 0.1 2 3 4 5 Mass W (kg) Mass W (kg) 40 32 MTS 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.01 0.1 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3)

Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V Selects the analogue input range. -10..10 V Channel 2 Analogue input range Sets the analogue input device range. 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.

13 34 25 52 80 M27 x 1.5 50 M12 10-18-16

C J G5-S CV MVGQ CC Series Variations Series Basic type With cap or bumper (Option) Stopper nut (Option) Hexagon nut Page Foot bracket RB Series RB J 18-10-2 Series RB D-X Coolant resistant Series RBL 18-10-8 20(Except 08 type) Series RBQ Data 18-10-10 Series RBQ 2 Hexagon nuts are attached for Series RB and standard models RBQ. 10-18-1 2 Shock Absorber Series RB Specifications Model RB0805

HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15

^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4 7: 10^5 8: 10^6 AC_E_L (Setting L of the accumulated flow value conversion factor) Setting of the accumuated flow value conversion factor Unit specification (Unit): When "L" is selected. 1071 0x042F 0 R/W U8 2 Y 0: 10^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4 7: 10^5 8: 10^6 Accumulated value setting AC_E_G (Setting G of the accumulated

Current (% for chiller main breaker volume) HRS100-A/W-20 4 h 2 h 1 h 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Operating time 20 s 30 s 10 s Max. 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 5000 6000 7000 10 1500 Current (% for chiller main breaker volume) 28 Series HRS100/150 Specic Product Precautions 5 Be sure to