Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1-B 270 LE-CA-3-B 520 LE-CA-5-B 870 LE-CA-8-B 1370 LE-CA-A-B 1710 LE-CA-B-B 2560 LE-CA-C-B 3400 U V W Red White Black Connector A2 terminal no. B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

MXW Series Long Stroke Slide Table

5H9 +0.03depth 4.5 0 (Plug : M-5P) Operation direction B A 9 8 10 15 15 10 7.5 19.2 A 35 26.5 20 Z A Cross section AA (scale 50%) 4-M5 x 0.8 thread depth 10 3 x H G Bottom through hole 4.2 H 6 depth 4.5 5H9 +0.03 0 F E 5H9 +0.03depth 4.5 0 Model Z J H G F E MXW12-50 205 84 35 50 88 58 MXW12-75 230 89 40 55 103 63 Note) Adjuster bolt Y shown in the section above is attached only on B type(

CHKD/CHKG

CHKGL--XC63 155, 160, 165, 170 Stroke Bore size (mm) 55, 60, 65, 70 80, 85, 90, 95 105, 110, 115, 120 130, 135, 140, 145 LA B Z LA B Z LA B Z LA B Z LA B Z 32 166 131 147 191 156 172 216 181 197 241 206 222 40 183 140 160 208 165 185 233 190 210 258 215 235 283 240 260 50 196 145 169 221 170 194 246 195 219 271 220 244 296 245 269 63 215 152 182 240 177 207 265 202 232 290 227 257 315 252

MXW

24 84 (Plug: M-5P) Operating direction (B) (A) 7 10 13 10 13 6.5 A 14.8 30 7 24 A 15.8 Z 3 Cross section AA (N-1) x H G H 6 depth 4.5 5H9 +0.030 Bottom through-hole 3.3 NN-M4 x 0.7 thread depth 8 0 5H9 +0.030 depth 4.5 0 F E (mm) Model Z E F G H N J MXW8-25 157 55 48 47 32 3 64 MXW8-50 182 53 76 46 30 4 71 Note) Adjuster bolt (Y) shown in the section above is attached only on B type (with

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

Modular Type Filter Regulator Series AW

Metal bowl Metal bowl with level gauge Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Port size Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount With auto drain Model B 177 242 278 278 Z 6 7 7 7 Y 14 19 21 21 W 28.5

Fieldbus System

C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) [Communication connector D-sub] (76.8) (External pilot specification) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [

HRX-OM-X084

For HRR010-AF-10/20G thread adapter set 1 set (5) For HRR010-AN-10/20NPT thread adapter set 1 set 1 In the case of option Z, not included.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

Sine Cylinder Series REC

Z + Stroke S + Stroke H FT B (mm) A AL B B2 F FL G H D B1 FT FX FY FZ E Bore (mm) FX 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5 1/8 146

Sine Cylinder Series REC

Z + Stroke S + Stroke H FT B (mm) A AL B B2 F FL G H D B1 FT FX FY FZ E Bore (mm) FX 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5 1/8 146

Sine Cylinder Series REC

Z + Stroke S + Stroke H FT B (mm) A AL B B2 F FL G H D B1 FT FX FY FZ E Bore (mm) FX 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5 1/8 146

17

Section XX details T-slot dimensions Z WA WB b a 6H7 c d e X (Mounting hole position) 7 X0.02 (Pin hole position) 6 5 (mm) b c d e Bore size (mm) 10 a 13.3 15.3 20.3 23.3 12 13.5 8 10 22.5 30 80 100 Section XX 4 x YY depth YL 4 x OA through 4 x OB counterbore depth OL 4 x MM depth ML 4 x NN through Z WA L Section XX Section XX (OL) HA: T-slot for hexagon bolt VB VA H X0.02 R T X0.02 DA DB

Electric Actuator

4 LA A-phase pulse detector (Differential line driver) 9 PG0 LZ 8 5 LAR PG0 COM 10 LZR 9 6 LB B-phase pulse detector (Differential line driver) LG 3 7 LBR Control common SD Plate 34 LG Control common 10 m or less Note 5) 33 OP Z-phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 EMG Emergency stop 42 Servo ON SON 15 Note 4) CN6 RES 19 Reset 3 MO1 PC

Compact Cylinder Series CQS

size (mm) Stroke range (mm) Without auto switch With auto switch CB CD CT CU CW CX CZ L L1 RR A 45.5 46.5 56 62.5 B 22 22 24.5 27.5 CL 39.5 40.5 47 52.5 A 50.5 51.5 66 72.5 B 27 27 34.5 37.5 CL 44.5 45.5 57 62.5 12 16 20 25 12 14 20 24 5 5 8 10 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 14 6 6 9 10 5 to 30 5 to 30 5 to 50 5 to 50 15.5 18.5 B + Stroke CL + Stroke

Stroke Reading Cylinder and Counter

mm; X, Y, Z for 2 hours each Endurance 10 G; X, Y, Z directions, 3 times each Impact resistance 350 g or less Weight 1) 90 phase difference input Multi-counter/Dimensions A phase I 24 x M3 x 0.5 B phase J B C D A t A COM COM COM B 12 VDC GND F.G.

CRQ2

DRotation starting point End of rotation 20e R g 10 ot 10 n at ra L io B Rotation starting point End of rotation n n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 R A e R A o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 15 18 24 27 31.5 The figure shows the view

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.