Vacuum Pad

3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9

Vacuum Pad

3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9

Vacuum Pad

3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Compact 5-Port Solenoid Valve

formula for L dimensions (Station n) (Station 1) L = 16 x n + 41.5 n: Manifold stations 86.7 D D 75.7 73.2 E 3/5 3/5 E S 2 B 2 B 2 B 2 B 2 B 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY5-10F2-05DR-C12.

ISO Cylinder

n A Rail mounting B Band mounting Head cover type *1 The symbol is Nil for no magnet.

Base Mounted Metal Seal/Rubber Seal Series VQ

VQC When ordering assemblies incorporated with a manifold, add suffix -N to the manifold no. SQ Name plate [-N] VVQ2000-N-Station (1 to Max. stations) P = 16 VQ0 It is a transparent resin plate for placing a label that indicates solenoid valve function, etc. Insert it into the groove on the side of the end plate and bend it as shown in the figure.

SY

B 2 4 A B 2 4 A B 2 4 A B 2 4 A B 2 56.3 5.5 53 53 38.1 35 5 EA 3 EB 1 P 25.5 25.5 184.1 16.3 33.6 167.6 25 96.6 8 130.4 38.1 48.3 n 2 6-Rc 3/8 (P, EA, EB port) + + + + + Triangle mark 2-M5 x 0.8 (pilot, EXH port) 2n1-Rc 1/4, 3/8 (A, B port) 76.4 (for E type) (5.5) 2n2-One-touch fitting (A, B port) Applicable tube O.D.: 8 10 12 92.5 1 2 n (Indicator

Air Cylinder

: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 CBM2U Bore size Stroke A Rod trunnion: * -H -R -W N L CBM2T Bore size Stroke A Head trunnion: * -H -R -W N L ZZ + Stroke Z + Stroke * The bracket is shipped together.

AC Servo Motor Driver (CC-Link Type)

. output 8 PT7 RY(n 2)9 Reserved RX(n 2)A RY(n 2)A Position/speed specifying system selection to Reserved RX(n 2)F selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

override (Non-locking) n A A A B B B A A A A 3 1 2 2 (Pitch) P = 51 1 3 6 [2] n Stations R 11/2 250 105.5 Stations 176.5 D side 209 AMC810-14 Exhaust cleaner (Option) 250 135 D side mounting 125 External pilot port U side 194 135 1/8 125 194 X PE PE 4 x 1/8 (PE port) U side mounting 81 P EB 31 50 EA 37 37 61 43 2 x 3/4 (P port) n: Stations 2 194 212 3 245 263 4 296 314 5 347 365 6 398

JIS Standard Hydraulic Cylinder

4, 6, 8) Note 3) 145 + 50 (n 4) 2 (n = 4, 8, 12, 16) Note 4) 115 + 50 (n 4) 2 (n = 4, 8, 12, 16) Note 4) 125 + 50 (n 4) 2 (n = 4, 8, 12, 16) Note 4) 135 + 50 (n 4) 2 110 + 50 (n = 4, 8, 12, 16) Note 4) Different surfaces (n = 4, 8, 12, 16) Note 4) n 75 + 50 (n 2) (n = 2, 3, 4) 90 + 50 (n 2) (n = 2, 4, 6, 8) Note 3) 115 + 50 (n 2) (n = 2, 4, 6, 8) Note 3) 125 + 50 (n 2) (n = 2, 4,

AC Servo Motor Driver (CC-Link Type)

When no alarm has occurred, RX(n 1)A or RX(n 3)A (ALM) turns OFF within about 1.5s after power is switched ON. RX(n 1)A RX(n 3)A Remote station communication ready (CRD) This signal turns ON at power-on and turns off at a trouble occurrence or in the reset (RY(n 1)A or RY(n 3)A) (RES) ON status.

NCM

(lbs) Weight (Except Non-rotating Rod) Bore size (inch) Base weight by mounting style Addl weight per inch stroke Addl weight for magnet Addl weight for bumper B 0.059 0.080 0.200 0.218 0.330 0.531 0.680 1.345 C 0.076 0.091 0.200 0.198 0.320 0.581 0.710 N/A E 0.076 0.091 0.280 0.288 0.410 0.681 0.820 1.493 R N/A N/A 0.210 N/A 0.430 N/A 1.020 N/A W N/A N/A 0.300 0.308 0.400 0.781 0.930 1.812

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

32 200 DC CQ2 CQS DC A F9BW S 32 200 CDQ2 With auto switch CQM Number of auto switches CQ2 Built-in magnet Auto switch 2 pcs. 1 pc. n pcs.

Brake mechanism added

Note 2) When n is an odd number, a multiple of 4 that is larger than this odd number is used for the calculation.

CNA

side 100 + 100 (n 2), n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different sides D-A44C n Same side

CNA

(n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, Different sides Data n 100 + 100 (n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n 2), n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2)