rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized water10 to 408.0 (at 20C)1.25 (at 20C)?
rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ004-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized water10 to 404.0 (at 20C)1.15 (at 20C)?
capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008-L2Water-cooled
capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008-L2Water-cooled
rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized water10 to 408.0 (at 20C)1.25 (at 20C)?
rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ001-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized water10 to 401.0 (at 20C)0.90 (at 20C)?
capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ001-HWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-40/GALDEN?
rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ001-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized water10 to 401.0 (at 20C)0.90 (at 20C)?
rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ002-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized water10 to 402.0 (at 20C)0.98 (at 20C)?
rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ002-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized water10 to 402.0 (at 20C)0.98 (at 20C)?
rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized water10 to 408.0 (at 20C)1.25 (at 20C)?
rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized water10 to 408.0 (at 20C)1.25 (at 20C)?
capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ001-HWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-40/GALDEN?
AS-FPQ/FPG AS121FP-M5 AS221FP-01 AS221FP-02 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08,10 06,08 06 04 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FP-03 AS421FP-04 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa 12 10 Flow rate (L/min (ANR
AS121FP-M5 AS221FP-01 AS221FP-02 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08,10 06,08 06 04 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FP-03 AS421FP-04 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa 12 10 Flow rate (L/min (ANR
(full spanfull-scale) 15[V]F.S. =5-1=4[V] (1F.S.=40.01=0.04[V]) 15 V 15 V 420 mA His ON OFF ON(OFF) 0 1 atm() 10 L/min 1 10 L ON OFF ON ( )OFF () 5 10 L/min 51050 L ON-OFF () / 1 L/min 101112 1 L/min -13No.PF-OMO0007CN (SI ) SI ON-OFF ON 0 20 1 atm()65R.H. -14No.PF-OMO0007CN 90270 IN OUT M4(4) 1.6 mm (39) -15No.PF-OMO0007CN 1.0 MPa IN8 IN IN OUT D D8 () () Rc(NPT)1/8 79 Nm Rc
Manifold Mounting: A (Direct Mount), Centralized Supply (IN) Piping Position: 1 (Bottom), Regulator Block Stations: 3 Stations, IN/OUT Fitting Type: 10 [IN/ø8 (Straight) - OUT/ø6 (Straight)], Accessories: A (w/Pressure Gauge/L Side)
Manifold Mounting: A (Direct Mount), Centralized Supply (IN) Piping Position: 1 (Bottom), Regulator Block Stations: 8 Stations, IN/OUT Fitting Type: 10 [IN/ø8 (Straight) - OUT/ø6 (Straight)], Accessories: A (w/Pressure Gauge/L Side)
Manifold Mounting: A (Direct Mount), Centralized Supply (IN) Piping Position: 1 (Bottom), Regulator Block Stations: 4 Stations, IN/OUT Fitting Type: 10 [IN/ø8 (Straight) - OUT/ø6 (Straight)], Accessories: A (w/Pressure Gauge/L Side)
Manifold Mounting: A (Direct Mount), Centralized Supply (IN) Piping Position: 1 (Bottom), Regulator Block Stations: 5 Stations, IN/OUT Fitting Type: 10 [IN/ø8 (Straight) - OUT/ø6 (Straight)], Accessories: A (w/Pressure Gauge/L Side)