0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

90

40 20 Port exhaust Silencer exhaust 0 0 20 40 60 80 Suction flow [L/min (ANR)] ZK215 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 150 100 135 Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption 80 120 105 Vacuum pressure 60 0 15 30 45 60 75 90 40 Suction flow (Port exhaust) Suction flow (Silencer

Compact Cylinder

Compact Cylinder 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 RoHS New New Both ends tapped mounting added. Bore sizes 80, 100 added. Port thread types NPT, G added.

Integrated Controller

70 60 50 40 30 20 10 0 100 200 300 400 500 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2

Series AP500

psig (0.55 MPa) 20 psig (0.14 MPa) AP1500 50 0.34 0.69 100 0.62 90 40 0.28 0.55 80 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 0.48 70 30 0.21 0.41 60 0.34 50 20 0.14 0.28 40 0.21 30 10 0.07 0.14 20 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 100 Non-lube Double acting, Double rod (40 to 63) 20 25 32 40 50 63 80 100 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20 25 32 40 50 63 80 100 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63/80/100 1.5 MPa 1.0 MPa

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

MRHQ

gripping point outside of the range limit, an excessive eccentric load will be applied to the fingers and guide section, causing play in the fingers and adversely affecting the gripper's life. 0 20 40 60 80 0 20 40 60 80 100 Gripping point L mm Gripping point L mm MRHQ25 MRHQ25 120 100 Pressure 0.2MPa 100 Pressure 0.2MPa 80 Overhang H mm Overhang H mm 80 60 0.3MPa 0.5MPa 0.6MPa 0.7MPa 60

CC

86 35 25 1 36 17.5 88.2 72 1/2 148.5 103.9 45 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 1/2 148.5 57 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 1/2 148.5 57 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 1/2 57 CCVL02-G-S 66 107 116 50

Rotary Gripper Series MRHQ

0.7MPa 0.6MPa 0.6MPa MRHQ 100 0.6MPa 0.6MPa 0.6MPa 60 Gripping force N 0.5MPa 0.5MPa Gripping force N 80 MA 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 40 60 0.4MPa 0.4MPa D0.3MPa 0.3MPa 40 0.3MPa 0.3MPa 20 0.25MPa 0.25MPa 0.25MPa 20 0.25MPa 0.25MPa 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point L mm 719 Series MRHQ Rotational Torque and Gripping Point Rotational Torque

Series PF2W Digital Flow Switch For Water

mA; Internal voltage drop: 1 V or less (with load current of 80 mA); Maximum applied voltage: 30 V; 2 outputs Note 5) Switch output Output specifications PNP open collector: Maximum load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputs NPN or PNP open collector (same as switch output) Accumulated pulse output Status LEDs Response time Hysteresis

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

AC Servo Motor Driver (Network card type ）

Igm: Leakage current of the servo motor (Found from table 11.2.) 120 Leakage current [mA] 100 80 60 40 20 0 2 5.5 14 38100 3.5 8 22 60150 30 80 Cable size [mm2] Fig. 11.7 Example of leakage current per km (lg1, lg2) for CV cable run in metal conduit 11 29 11.

Rotary Gripper Series MRHQ

Gripping force N Gripping force N 0.6MPa 0.6MPa 0.5MPa 30 60 0.5MPa 0.4MPa 20 40 0.4MPa 0.3MPa 0.3MPa 10 20 0.25MPa 0.25MPa 0 20 40 60 80 100 0 20 40 60 80 100 Gripping point L mm Gripping point L mm MRHQ25S MRHQ25C 140 Pressure 0.7MPa 80 120 Pressure 0.7MPa Gripping force N 0.6MPa Gripping force N 100 0.6MPa 60 0.5MPa 80 0.5MPa 0.4MPa 40 60 0.4MPa 0.3MPa 40 0.3MPa 20 0.25MPa 20 0.25MPa

Environment

LEL 20 LEM 0 LEY LEY 0 200 400 600 800 1000 1400 1200 Speed [mm/s] LES LEY32 (Motor mounting position: Top/Parallel) LEY32D (Motor mounting position: In-line) LEPY LEPS 80 80 Lead 4: LEY32DC Lead 5: LEY32C LER Lead 8: LEY32DB 60 60 Lead 10: LEY32B Work load [kg] Work load [kg] Lead 16: LEY32DA LEH Area where the regeneration option is required.

CC

24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CC CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 RB Pitch of mounting on

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

to 500 mm/s Without stroke adjusting unit (MY3A) 2.4 10.1 0.84 29.8 46.6 Max. energy absorption (J) 80 to 1000 mm/s 80 to 1000 mm/s Without stroke adjusting unit (MY3B) Data 6 7 12 15 25 Stroke absorption (mm) Stroke adjusting unit (L and H unit/MY3B) (16L unit: 80 to 800 mm/s) External shock absorber (Low reaction type) 1000 Max. impact speed (mm/s) 80 to 1500 mm/s Max. operating frequency

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

C85

Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 500 1000 Not available with air cushion. Other strokes available on request.

LEC-OM02704CN

80 0 0 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 1000 2000 80 80 0 0 6 2000 1000 80 80 0 0 7 1000 1000 80 80 0 0 8 1000 1000 100 100 0 0 LEC-MR-J3BAT 1000 1000 100 100 0 0 C N 4 ( 3 ) 255 2000 2000 80 80 0 0 RS-422 USB CN 6 CN 1 CN3 CN5 DI/O ON USB CC-Link RS-422 1.