DOC1020530

(d) Output signal (DO) forced output Output signals can be switched on/off forcibly independently of the servo status. Use this function for output signal wiring check, etc.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

D Not available at 80 and 100. Note) Mounting brackets are not mounted and are supplied loose at the time of shipment.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70 75 19 8 71.5 23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42 42 56 84 75 22 9 60.5 32.5 46.5 88.5 88.5 42.5 46.5 52.5 32.5 Solid state auto switch: D-M9B, D-M9N Stroke B Stroke E Auto switch operating range Model A 40 50 150

Cylinder Port: NPT, Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: C (Mounting Position C), R Arm Style: A012 (Straight Machined ref NAAMS ACA112M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)]

Cylinder Port: NPT, Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: C (Mounting Position C), L Arm Style: A013 (Straight Machined ref NAAMS ACA113M)

Cylinder Port: NPT, Arm Opening Angle: 45°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: C (Mounting Position C), R Arm Style: A010 (Straight Machined ref NAAMS ACA110M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)]

Cylinder Port: NPT, Arm Opening Angle: 60°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: C (Mounting Position C), R Arm Style: A015 (Straight Machined ref NAAMS ACA115M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)]

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: C (Mounting Position C), L Arm Style: A012 (Straight Machined ref NAAMS ACA112M)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: C (Mounting Position C), L Arm Style: A013 (Straight Machined ref NAAMS ACA113M)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: C (Mounting Position C), L Arm Style: A013 (Straight Machined ref NAAMS ACA113M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: C (Mounting Position C), L Arm Style: A014 (Straight Machined ref NAAMS ACA114M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: T (Turk PNP), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: C (Mounting Position C), L Arm Style: A016 (Straight Machined ref NAAMS ACA116M)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

High Vacuum L Type Valve

E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa

High Vacuum L Type Valve

E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

XLA Series

Construction and Outer dimensions Auto switch (option) Indicator (option) Bonnet assembly (maintenance part) 1 Magnet (option) Pilot Port (opened by applying pressure) Bellows holder (material: SUS304) Heater (option) 7 External seal (maintenance part) 3 Bellows (material: SUS316L) 6 Valve (material: SUS304) 5 Valve seal (maintenance part) 2 Body (material: A6063) 4 C D C E E (K flange )

XLGR Series

Dimensions E C D E E L (Width across flats) M (Width across flats) M8 (KF Flange) (K Flange) Fn Fd C Detail of (a) (a) M Rc1/8 J H K B A G A Model A B C D E Fn Fd XLGR-80*-1* 90 250 117 45.5 38.5 114 110 XLGR-100*-1* 108 270.5 154 55 38.5 130 102 XLGR-160*-1* 138 339 200 65 38.5 180 153 Model G H J K L M XLGR-80*-1* 83 105 44 9 13 4 XLGR-100*-1* 102 92 58 9 13 4 XLGR-160*-1* 153 124 62 12.5

XL-OMY0003

. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5