SMC Corporation of America
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Common exhaust(pilot and main valve)type Pilot exhaust Not required Lubrication Free Mounting position 150/30 Impact / Vibration resistance m/s2 Dust proof Protection structure Base mounted type Solenoid Specifications Grommet (G), E(H), L type plug connector (L), M type plug connector (M) Electrical entry Coil rated voltage V DC 24, 12, 6, 5, 3 Internal pilot AC 50/60Hz 100, 110, 200, 220

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when work piece is vacuumed. Min.B : Maximum pressure value when work piece is not vacuumed.

The element retainer shall be assembled in such a way that the symbol A-A in (a) of Fig. 6 is overlapped with symbol B-B of element retainer shown in (b) of Fig. 6 in parallel. B A B A C View of c Actuators Modular F.R.L.

The element retainer shall be assembled in such a way that the symbol A-A in (a) of Fig. 6 is overlapped with symbol B-B of element retainer shown in (b) of Fig. 6 in parallel. B A B A C View of c Actuators Modular F.R.L.

AL-OMQ0006-C PRODUCT NAME LUBRICATOR MODEL / Series / Product Number AL10-M5(-2,3,6,R,Z)-A AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-A AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)06(B)(-2,3,6,8,R,3W,Z)-A AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,3W,Z)-A AL60-(F,N)10(B)(-2,3,6,8,R,3W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3.

Consult with SMC regarding water resistant types with the above model numbers. * Solid state auto switches marked with are produced upon receipt of order. ** Since D-A9and D-A9V cannot be mounted on 50, use of D-Z7 or D-Z80 is recommended. * Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ D* Since there are other applicable

) 3-M3 X 0.5 thread depth 6 44 MDHR2-15E port position 42 B 45 120o 11 120o A C 36 M3 X 0.5 M3 X 0.5 Finger opening port Finger closing port 10 M3 X 0.5 Finger opening port M3 X 0.5 Finger closing port 25o 25o MHZ2 MHZJ2 6-M3 X 0.5 thread depth 6 (A, B, C common view) MHQ 3-3 depth 6 +0.02 0 34 (A, B, C common view) MHL2 12h9 0 -0.043 Auto switch mounting groove MHR 1.5 .

G Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P O A F D Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60

Part number Description Remarks Weight ZS-26-A Power and output cable Length: 2 m 65 g ZS-26-B Panel mount adapter with waterproof seal, with Mounting screw (3.0 x 8 L) 2 pcs. 10 g ZS-26-C Panel mount adapter + front protective cover with waterproof seal, with Mounting screw (3.0 x 8 L) 2 pcs. 15 g ZS-26-01 Front protective cover only 5 g ZS-26-D 48 mm conversion adapter 5 g The panel which

8 F 24 VDC 5 G DIN terminal 24 VDC With surge voltage suppressor A B D E H J L M 4 H 100 VAC Size 2 2 1/4 N.C. 7 J 110 VAC Aluminum 4 5 N.O. 3/8 K 200 VAC 7 L 230 VAC 4 8 7 Resin (With bracket) M Conduit terminal 24 VDC With surge voltage suppressor 4 N 100 VAC 10 7 P 110 VAC A B C D E F G H J K L M N 5 Q 200 VAC Size 3 3 N.C. 8 1/4 R 230 VAC 10 (N.C. only) 6 N.O.

3/min 1.09 1.02 1.06 3.3 m 3/min 7.2 GWP 1 (GWP) GWP Regulation EU No 517/2014 Regulation (EU) No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 R410A 2,088 2,090 IDFC60/70/80/90 Series 7-2 IDX-OM-W095 7.3 Port size Compressed air inlet Compressed air outlet Port size B A E D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFC60 R1 307 745 605 161 405 681 71 330 704 355

EX140-SMJ1 Applicable system CC-Link Ver.1.10 Occupied station 1 station Station number setting range 1 to 64 (Set with a rotary switch) Communication specification Station type Remote I/O Communication speed 156 k/625 k/2.5 M/5 M/10 Mbps Cable length between stations 20 cm or more Max. cable length 1200/900/400/160/100 m Communication supply voltage 15 to 30 VDC Solenoid supply voltage 24

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

Series ZSE30A is a high-precision, 2-color display digital pressure switch for vacuum. It has raised rubber button controls that are clearly set apart, simple to operate and soft to the touch. Plug in type connectors take the burden out of wiring work and maintenance. Four different display settings are available. Settings can be copied to up to 10 slave sensors at once  , Possible to check

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized