Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 05 (3/16), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: N (Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE), Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)
Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 07 (1/4), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: N (Body: PFA, Actuator Endplate: PPS, Diaphragm: PTFE), Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)
Rated Pressure Range: 20 (0 to -101 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread)
Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread)
Clean Series: 21 (Copper, Fluorine and Silicon-free + Low Particle Generation), Stations: 04, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FU1 (w/1.5 m Cable, Top Entry), Option: N (w/Name Plate)
Clean Series: 10 (Clean Room), Stations: 04, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FU1 (w/1.5 m Cable, Top Entry), Option: N (w/Name Plate)
Clean Series: 21 (Copper, Fluorine and Silicon-free + Low Particle Generation), Stations: 08, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU2 (w/3 m Cable, Top Entry), Option: N (w/Name Plate)
Body Size: 60, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 10 (1), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa
Body Size: 30, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 03 (3/8), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa
Body Size: 40, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 03 (3/8), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa
Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 01 (1/8), Options: BE (B+E), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa
Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 01 (1/8), Options: EH (E+H), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa
Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 01 (1/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa
Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa
Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: E1 (Output: NPN; Electrical Entry: Wiring Bottom Entry), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa
Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: EH (E+H), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa
Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa
Body Size: 20, Backflow: w/o Backflow Function, Thread: F (G), Port Size: 01 (1/8), Options: BE (B+E), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa
Body Size: 20, Backflow: w/o Backflow Function, Thread: F (G), Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa
Body Size: 20, Backflow: w/o Backflow Function, Thread: F (G), Port Size: 02 (1/4), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa