Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -
Capacity: 1kVA (IDF11E-10, IDF15E-10, IDU6E-10, IDU11E-10, IDU15E-10), Inlet Voltage: 1-phase: 110VAC, 50Hz; 110-120VAC, 60Hz
Capacity: 500VA (IDF1E-10 to IDF8E-10, IDU3E10, IDU4E-10, IDU8E-10), Inlet Voltage: 1-phase: 110VAC, 50Hz; 110-120VAC, 60Hz
Body Class: Orifice Diameter ø4, Valve Type: Normally Closed, Applicable Tube OD: Rcø3, NPT1/8, Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -
Body Class: Orifice Diameter ø4, Valve Type: Normally Closed, Applicable Tube OD: 3/16, Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -
Body Class: Orifice Diameter ø4, Valve Type: Normally Open, Applicable Tube OD: 1/4, Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -
Body Class: Orifice Diameter ø22, Valve Type: Normally Closed, Applicable Tube OD: Rcø25, NPT 1", Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -
Body Class: Orifice Diameter ø4, Valve Type: Normally Closed, Applicable Tube OD: Rcø3, NPT1/8, Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 3, 4, 5, 6 - NPT 1/8", Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -
Body Class: Orifice Diameter ø4, Valve Type: Normally Closed, Applicable Tube OD: ø4, Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -
Body Class: Orifice Diameter ø4, Valve Type: Normally Closed, Applicable Tube OD: ø6, Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -
Body Class: Orifice Diameter ø4, Valve Type: Double Acting, Applicable Tube OD: Rcø3, NPT1/8, Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -
Body Class: Orifice Diameter ø10, Valve Type: Normally Closed, Applicable Tube OD: ø10, Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -
Body Class: Orifice Diameter ø4, Valve Type: Normally Closed, Applicable Tube OD: ø4, Port B OUT: Rcø6, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -
Body Class: Orifice Diameter ø8, Valve Type: Normally Closed, Applicable Tube OD: ø10, Port B OUT: Rcø8, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -
Body Class: Orifice Diameter ø4, Valve Type: Normally Closed, Applicable Tube OD: Rcø3, NPT1/8, Port B OUT: NPT3/16, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -
Body Class: Orifice Diameter ø4, Valve Type: Normally Closed, Applicable Tube OD: 1/4, Port B OUT: NPT1/8, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -