Aluminum High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1.

Non-contact Gripper

Bernoulli Type Cyclone Type High lift Vibration reducing High lifting force: Max. 44 N* Amplitude of the workpiece during gripping: 0.01 mm*or less * Solar battery silicon cell (l125 mm, t = 250 m) * In SMC conditions (How to calculate: Page 730) Non-contact gripper * Outer body diameter: 100 Lifting force (Supply pressure: 0.4 MPa) Workpiece (Solar battery silicon cell) Amplitude 50 40

Compact and Lightweight

100 250 100 100 100 Vacuum pressure Vacuum pressure ZL Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 200 80 200 80 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] ZH ZH Air consumption 150 60 60 150 60 60 ZH Air consumption Suction flow rate 100 40 40 100 40 40 ZH -

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ C D MRQ D(Picture of MSQB1A) 20Measurements mm Size Model Mass (g) 70 105 150 250 A B C D MSQB1A 50.5 28 25 16 1 MSQB2A 56 30 28 18 2 MSQB3A 60 34.5 30.5 20.5 3 MSQB7A 73.5 41 34.5 23 7 Variety of installation options for space-saving Offers

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Note 6) Block, Auto switch capable, S and T only available as special. 6-14-3 4 Series NCM Specifications: Double Acting, Single Rod/Double Rod Specifications 075 (3/4") 088 (7/8") 125 (1 1/4") 200 (2") 106 (1 1/16") 150 (1 1/2") Bore size (in) Fluid Air Maximum operating pressure 250 PSI/1.7 MPa 8 PSI/0.06 MPa Minimum operating pressure 40 to 140F/5 to 60 F Ambient and fluid temperature

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

08-cs1-e

CS1N180A-PS CS1N200A-PS CS1N250A-PS CS1N300A-PS Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g). Order with the following part number when only the grease pack is needed.

10-cls-e

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.

LMU100/200 Series Mist Spray Unit

30 300 35 350 LMV20/Without air blow circuit T0806 (8 x 6) Applicable tubing Symbol Length T0425 (4 x 2.5) Applicable tubing Air adjusting needle for mist T0604 (6 x 4) Applicable tubing Oil adjusting needle Mixing valve (LMV20-) LMV201 L 46 (24) Double pipe nozzle AIR OIL D C B 12 E A 24 9.5 2 3 57(Max.) 12.5 AIR SMC 27.5 4 10 40 23.5 OIL L Dimension (mm) 20 200 25 250 30 300 35 350 7.5

Thermo-con/Rack Mount Type

Model Air flow [m3/min] Heat generation [W] HECR002-A 2 600 HECR004-A 5 1300 HECR006-A 5 1400 HECR008-A 7 1700 HECR010-A 7 2500 HECR008-W 0.2 200 HECR012-W 0.4 250 Operating Environment/Storage Environment Warning Facility Water Caution 1. Keep within the specified ambient temperature and humidity range.

HRL

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering

Compressed Air Preparation Filter

14 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 12 10 Inlet pressure 0.5 MPa 6 10 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 6 4 6 4 4 2 2 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 150 0 50 0 300 250

Series AP3100

Please contact SMC. 2) Tested with Helium gas inlet pressure 250 psig (1.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 4) Optional lever color available. Please contact SMC. 5) Handle must be pulled to turn open from closed. 6) Refer to the specification for options.

HRX-OM-X037

Table 3.1-1 Weight of the product Model Weight kg Option increase HRL100-A-40 Approx.240 Option-D1:+1kg HRL200-A-40 Approx.260 Option-T2:+1kg HRL300-A-40 Approx.330 Option-T3:+18kg* HRL100-W-40 Approx.250 HRL200-W-40 Approx.250 *Applicable only to HRL300-A*-40. 3.1 Transport HRL Series 3-2 HRX-OM-X037 Chapter 3 Transport and Setting Up 3.1.2 Transportation using casters This is a heavy product

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

ITV

or less Current type IR Input impedance Approx. 6.5k Voltage type Straight type Right angle type Approx. 2.7k Preset input VEX 1 to 5V DC (load impedance: 1k or more) 4 to 20mA (sink type) (load impedance: 250 or less) Analog output (2) AW Output signal (monitor output) Switch output NPN open collector output: Max. 30V, 30mA PNP open collector output: Max. 30mA AMR Symbol Linearity Within

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.016 0.043 +0.043 0 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 255 M16 x 1.5 25 22 18 7 14 55 250 0.025 0.064 0.020 0.053 +0.052 0 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 285 M20 x 1.5 30 27 22.4 9 19 60 280 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 337.5 M24 x 1.5 35 32 28 11 24 70 327.5 0.030 0.076 0.025 0.064 +0.062 0 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 382.5 M30 x 1.5

Sine Rodless Cylinder Series REBR Direct Mount Type

, 300, 350, 400 450, 500 15 1000 750 25 32 200, 250, 300, 350, 400, 450 500, 600, 700, 800 2000 1500 Note) Intermediate strokes can be arranged in 1mm increments.

Rotary Table/

Measure B Moment of inertia (kgm2) Size 7 3 2 1 0.0001 0.001 0.01 0.1 MSQB7A MSQB3A MSQB2A MSQB1A 1 0.2 0.3 0.4 0.6 0.5 1.0 0.9 0.8 0.7 Rotation time (s/90) Model With external shock absorber Full size (Picture of MSQB1A) With internal shock absorber 73.5 50.5 60 56 A 34.5 41 30 28 A B For high energy 34.5 30.5 28 25 C For low energy With adjustment bolt 20.5 23 18 16 D mm Mass (g) 70 105 150 250

Vacuum Equipment

) Selection Graph (2)-2 Pad Diameter Selection Graph by Lifting Force Vertical Lifting (50 to 250) Pad diameter (mm) -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Lifting force (N) Lifting force (N) How to read the graph Example: Workpiece weight 1 kg (Lifting force: 9.8 N) : Conditions/Number of pads: 5 pcs.