Cylinder Port: G, Arm Opening Angle: 120°, Arm Position: Both Sides, Switch Type: P & F, R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: Mounting Position D, L Arm Style: 25mm Offset Machined ref NAAMS ACA133M, Painted Arm: Paint

Cylinder Port: G, Arm Opening Angle: 90°, Arm Position: Both Sides, Switch Type: P & F, R Arm Mtg Position: Mounting Position D, R Arm Style: 25mm Offset Machined ref NAAMS ACA130M, L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], Painted Arm: Paint

Cylinder Port: G, Arm Opening Angle: 90°, Arm Position: Both Sides, Switch Type: P & F, R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: Mounting Position D, L Arm Style: 25mm Offset Machined ref NAAMS ACA130M, Painted Arm: Paint

Cylinder Port: G, Arm Opening Angle: 120°, Arm Position: Both Sides, Switch Type: P & F, R Arm Mtg Position: Mounting Position D, R Arm Style: 25mm Offset Machined ref NAAMS ACA130M, L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], Painted Arm: Paint

Cylinder Port: G, Arm Opening Angle: 120°, Arm Position: Both Sides, Switch Type: P & F, R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: Mounting Position D, L Arm Style: 25mm Offset Machined ref NAAMS ACA130M, Painted Arm: Paint

Cylinder Port: G, Arm Opening Angle: 120°, Arm Position: Both Sides, Switch Type: P & F, R Arm Mtg Position: Mounting Position D, R Arm Style: 25mm Offset Machined ref NAAMS ACA136M, L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], Painted Arm: Paint

Cylinder Port: G, Arm Opening Angle: 105°, Arm Position: Both Sides, Switch Type: P & F, R Arm Mtg Position: Mounting Position D, R Arm Style: 25mm Offset Machined ref NAAMS ACA131M, L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], Painted Arm: -

Cylinder Port: G, Arm Opening Angle: 105°, Arm Position: Both Sides, Switch Type: P & F, R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: Mounting Position D, L Arm Style: 25mm Offset Machined ref NAAMS ACA131M, Painted Arm: -

Cylinder Port: G, Arm Opening Angle: 30°, Arm Position: Both Sides, Switch Type: P & F, R Arm Mtg Position: Mounting Position D, R Arm Style: 25mm Offset Machined ref NAAMS ACA133M, L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], Painted Arm: Paint

High Vacuum L Type Valve

Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used, changing only the seal may prove inadequate.

High Vacuum L Type Valve

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 6 XL*-OMI0011-E 3.

LUBRICATOR

AL-OMQ0006-C PRODUCT NAME LUBRICATOR MODEL / Series / Product Number AL10-M5(-2,3,6,R,Z)-A AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-A AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)06(B)(-2,3,6,8,R,3W,Z)-A AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,3W,Z)-A AL60-(F,N)10(B)(-2,3,6,8,R,3W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3.

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

y n e io at k ot R Angle adjustment range 3 of e g n a r n R io ot at Size Foot bracket Contents Mounting screw size included in foot bracket 30 CRA1L 30-Y-1Z Foot bracket : 2 pcs.

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

Direct Operated 3-port solenoid valve

(surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit.

MXW

R: Right (OUT side) L: Left (IN side) Made to Order Specifications (For details, refer to pages 1955 to 2021.) MXP L R MXY Theoretical Output Dual rod cylinder produces double the thrust of standard cylinder.

Rectangular Multi-Connector Series KDM

ii'lri-tr'i"d'..r..t to the inside. Panel mount bracket Phillips type screwonver Removing Tube Installing Tube OPush in evenly on the release button. (DCul the tube perpendicularly, being caretul not to damage the oulside sulace, use tube culler TKA-1.

0.5

Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.