Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators Operating port 2 x M5 x 0.8 6.3 26 12 5.5 12.5 12 Other dimensions are the same as basic type. 802 MXQ 1322Air Slide Table Dimensions: MXQ6L / Symmetric Type 1322Basic ZZ Z Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

100

Pressure switch for vacuum with energy saving function Circuit diagram ZL6 -K2 B2 5 Z -E F ZL6 -K2 B2 5 Z With supply valve and release valve With pressure switch for vacuum with energy saving function ZL6 -K1 B1 5 Z ZL6 -K15L0Z-V W With supply valve With supply valve and vacuum pressure switch Specific Product Precautions 30 A ZL1/ZL3/ZL6 Series Specific Product Precautions 1 Be sure to

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

+ 1/2 stroke Z + 1/2 stroke Width across flats KA S + Stroke H + Stroke ZZ + 2 Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com With rod boot Z + l + 1/2 stroke l l ZZ + l + 2 stroke (With rod boot on one side) ZZ + 2l + 2 stroke (With rod boot on both sides

CL

Without rod boot Z 190 207 214 241 With rod boot ZZ 211 228 238 269 Bore size (mm) Z 210 229 236 261 ZZ 231 250 260 289 20 25 32 40 9-2-31 30 Series CLG1 Basic Style with Air Cushion: CLG1BA Refer to page 9-2-31 for mounting bracket, since the dimensions except GA, P , WA, WB, WH, WW, W are the same.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFN 48 V DC None Z Precautions Plug a connector in or out vertically, never at an angle. How to Calculate the Flow Rate S 6 V For obtaining the flow rate, refer to page 3-1-10.

ISA2

ZSE ISE PSE Z I SE3 2 Port Solenoid Valve Series VCA PS Precautions on Design Warning Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1.

Stopper Cylinder

Stroke 2 x P (Rc, NPT, G) M E J Q F Z Stroke 32 40 50 RSQB -DZ (Double acting) Bore size: 32, 40, 50 M E J 2 x P (Rc, NPT, G) T 0 0.1 D Q F Z Stroke M E J T 0 0.1 D Width across flats K A + 2 stroke B + Stroke V H + Stroke 2 x P (Rc, NPT, G) E M 4 x N through 8 x O counterbore Q F Z Stroke T 0 0.1 Width across flats K A + 2 stroke B + Stroke V H + Stroke D M E J E M 4 x N through 8 x O counterbore

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Nil N NPT Rc T NPTF SJ F G Option SY 03 F Plug-in VFS4 5 0 2 0 SV SYJ E Non plug-in VFS4 03 1 1 1 2 0 2 SZ Pilot valve Manual override Option VP4 Nil: Non-locking push type (Flush) Nil Z P None With light/surge voltage suppressor Non-rotating DIN terminal S0700 In the case of w/ Z, enter ZP. Type P is available for DIN type only.

0.55

VPmmm m1 mmm Valve model: 5 G Z Select from the below in accordance with the valve used.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

LECSS 2-T A/B/Z-phase differential output linear encoder, the wiring of the linear encoder is incorrect. It is not disconnected or shorted.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

"* (23 6 1 7"/" 8 MVGQM, MVGQL Common Dimensions $%%& B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z -,.09-" -"/,* !0-!" !"

MGG

C 4-O D Q 2-P T U W E S K L B AA A X AB I J R AP Y + Stroke V Z + Stroke Non-locking type Locking type 8-AF AC AD AE With rod side locking Q Y + Stroke R With head side locking For standard strokes Dimensions not marked with an "" are the same as standard.

21

LRod Trunnion (U) LHead Trunnion (T) TX Z TD Z + Stroke TX TD 3.2 40 51 51 40 3.2 6.8 20.5 7.5 40 57 6.8 x 3.4 6.8 20.5 LX LZ LX LZ 7.5 40 57 6.8 x 3.4 (mm) Head trunnion Z + Stroke Applicable bore size Rod trunnion Z TX TD LX LZ Mounting Part no.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Z is +COM. spec.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 Cylinder series 16 BQ-1 20 BQ-1 25 BQ-1 32 BQ-2 40 BQ-2 50 BQ-2 63 BQ-2 80 BQ-2 100 BQ-2 125 BQ-2 140 BQ-2 160 BQ-2 CDQ2 (Except Z), CDQP2B CDQ2 (Large bore size: Except Z) CDQ2X, CDQ2Y CDLQ, CDQM RDQ RDLQ, RZQ RSDQ MK (Except Z), MK2 CE1 CXT MDU (Except Z) MDLU BQ-2 BQ-2 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 BQ-1 BQ-1 BQ

Modular Type Filter Regulator Series AW

Note 8) AW30, 40 Z Note 7) AW20 to 40 When more than one specification is required, indicate in ascending alphanumeric order.

ISO Standard Hydraulic Cylinder

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order. Besides the models in the above table, there are some other auto switches that are applicable.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

ZZ (NN 1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4

SMC

ZZ (NN1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 depth 3.5 +0.030 0 5 B A NN-M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 HA 40 40 40