VFR6000-OMQ0001 () C-R DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() ( ) () () 3 ( ) () 3 4 VFR6000-OMQ0001 VFR6000 Series 5 / -10 1 1 ( ) Rc Nm Rc 1/8 7~9 Rc 3/4 28~30 Rc 1 36~38 5 VFR6000-OMQ0001 VFR6000 Series 5 / 1) 2)1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 \ ( ) 5m 6 VFR6000-OMQ0001 VFR6000 Series 5 / ( ) 3 30 () 1 ( )VG32 2 ()ISO VG32 7 VFR6000-OMQ0001 VFR6000 Series/ / / / DIN DIN DIN DIN DIN
Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as follows. 4.
For common exhaust type, exhaust from both R ports. 2. P and R ports can be 3/8 by mounting the optional mounting bracket to the manifold base. Mounting When mounting valves on the manifold base, the mounting orientation is decided. If it is mounted in the wrong direction, connected equipment may malfunction.
OUT IN BUS COM A COM B COM C COM D F R P B U S O I R DIA BF SOL RUN GATEWAY UNIT EX500 SERIES 18 19 Switch setting Open the station number switch protective cover and set the switches with a sharp-pointed watchmakers screwdriver etc. NOTE 1. Be sure to turn off the power before setting the switches. 2. Be sure to set these switches before use.
NBR External FKM R H Material Symbol Needle scraper NBR 2 (FKM can be selected.) 19 is a non-replaceable part, so it is not included in the seal kit. NBR External FKM R H External seal: Rod seal, the tube gasket and needle scraper are made from FKM. Seal kit includes !5, !6, !7, !8 and @1. Order the seal kit based on each bore size.
Inch Size One-touch Fittings Series KQ2 Applicable Tubing: Inch Size, Connection Thread: UNF, NPT How to Order A S 05 34 KQ2 H Threaded Type Male thread seal method One-touch fittings Metric Size M, R, Rc Seal method None With thread sealant Symbol Nil S Symbol Model Model Male connector Hexagon socket head male connector Female union Male elbow 45n male elbow Universal male elbow Hexagon
Note 5) For external pilot option, -R, indicate the external pilot specification R for the applicable valves as well. Note 6) Built-in silencer type does not satisfy IP67. Note 7) When Without SI unit (SD0, SD60) is specified, With DIN rail (D) cannot be selected. Note 8) When changing the specifications of the EX600 from no DIN rail to DIN rail mounting, please consult SMC.
Note 8) Not available with 7/8" bore, or with C, R mount, or non-rotating rod (K). Note 9) Stainless steel rod standard on 7/16", 9/16", 3/4" and 7/8". Note 10) Exclude 7/16" and 9/16". Note 11) Exclude 2".
6 q r !1 !0 !2 Normally closed Closed condition !4 !3 Component Parts Material Note Description Material Note No. No.
Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket
Taper ring Steel balls P f R R Enhanced locking efficiency Greater locking efficiency as well as stable locking and unlocking operation has been achieved by arranging a large number of steel ball bearings in circular rows. The floating taper ring provides alignment and stable locking force with respect to piston rod eccentricity.
P P P Lock position Z80 P P H R Rear lock Front lock Y59A Y69A P p P Manual release Y7PV Y7P P P p N L Non-locking type Locking type Y59B Y69B P p P Solid state switch Y7NW Y7NWV P P p Y7PW Y7PWV P P p Y7BW Y7BWV P P p Y7BA P p Lead wire symbols 0.5m . Nil (Example) Y69B 3m . L Y69BL 5m . Z Y69BZ Solid state switches marked with a "p" are produced upon receipt of order.
0 r !4 u !5 !7 y !3 !2 Parts list No. Description Parts list No.
\ i n r t l l i r r ' t t l o n l qsilrrc NEW PRODUCT GUIDE Sil"Tivrc ,rt{ ll,( '!\'orlJ \ l.tf!
H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 +0.027 0 +0.027 0 +0.027 0 +0.027 0 9 9 16 16 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30
Note 1) Lock position F9BWV F9BW F7BWV J79W F9BA F7BA H R Rear lock Front lock Bore size (mm) Foot Note 2) Flange Double clevis F7NT F79F 32 40 50 63 CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-L032 CQ-L040 CQ-L050 CQ-L063 Manual release type F7LF Lead wire length symbols 0.5m . Nil (Example) A80C 3m . L (Example) A80CL 5m . Z (Example) A80CZ None .
The tightening torque should be 0.1 to 0.2 Nm. 5 to 6 14 e-Rodless Actuator Series E-MY2 Names and Functions of Individual Part Controller detail w t q u End Motor I/O cable Controller Power supply cable Slider i y e r Switch FG terminal Motor side end Description Content/Function q w e r t y u i Stroke learning switch Description Content/Function Switch to move the actuator to intermediate
Series LQ3 High Purity Fluororesin Fitting Grip seal construction with 3-point seal Easy to assemble & construct Greater swept flow characteristics Excellent heat resistance 150C operating temperature How to Order LQ3 H M 1A Threaded connection Thread Type Symbol Nil N Type R, Rc NPT Fitting Style Symbol H L Style Straight Elbow Piping Type Symbol M Type Male Class Size Combination