Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200

Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200

Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200

Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200

Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200

Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200

Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200

Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200

Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200

Note 3)Actuation typeGuide typeOperating temperature range [nC]Operating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalLEFB25A300, 500, 600, 700, 800, 9001000, 1200

Soft Start-up Valve AV2000/3000/4000/5000 1

Piston B Switching Pressure (Open Closed) 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 Type Y DIN terminal 0.1 0 0.6 0.1 0.2 0.3 0.4 0.5 0.7 0.8 0.9 1.0 Inlet pressure (MPa) Needle Valve Flow Characteristics Inlet pressure 0.5 MPa JIS Symbol 2000 1800 AV5000 1600 Air flow rate (/min (ANR)) 1400 2 1(P) 2(A) AV4000 1200 1 1000 800 AV3000 3(R) 600 AV2000 400 Accessory/Pressure Gauge 200 0 Pressure

Table of Contents

Piston B Switching Pressure (Open Closed) 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 Type Y DIN terminal 0.1 0 0.6 0.1 0.2 0.3 0.4 0.5 0.7 0.8 0.9 1.0 Inlet pressure (MPa) Needle Valve Flow Characteristics Inlet pressure 0.5 MPa JIS Symbol 2000 1800 AV5000 1600 Air flow rate (/min (ANR)) 1400 2 1(P) 2(A) AV4000 1200 1 1000 800 AV3000 3(R) 600 AV2000 400 Accessory/Pressure Gauge 200 0 Pressure

Booster Regulator Series VBA1110 to 4200 1

P1=0.5MPa =0.5MPa P1=0.5MPa =0.5MPa P1=0.4MPa P1=0.5MPa P1=0.5MPa 0.4 P1=0.4MPa =0.4MPa VBA2 VBA2 VBA4 VBA4 VBA2 VBA4 AV 0.3 P1=0.3MPa =0.3MPa P1=0.4MPa =0.4MPa P1=0.3MPa =0.3MPa P1=0.3MPa P1=0.4MPa P1=0.3MPa 0.2 AU 0.1 AF 0 200 400 600 800 1000 1200 1400 1600 1800 2000 Outlet air flow (l/min (AMR)) Outlet air flow (l/min (AMR)) Outlet air flow (l/min (ANR)) Pressure Characteristics Inlet

Vacuum System Peripherals:

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Modular, Regulator Series AR Flow rate (l/min (ANR)) Set pressure (MPa) Pressure gauge connection port Rc Construction Port size Rc Model ZL AR10 AR20 1 16 1 8 1 8 1 8 1 4 1 4 1 4 1 4 100 0.05 to 0.7 600 M5 x 0.8 1 8 1 4 , ZY AR25 , 1200 1 4 3 8 AR30

W2M/4M

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

,,: ,.

D0I/$[E lln fiee|ficrilotr ltr tdts ltU ||UT & $lt tmwoil fi[hry 1200 psi (8.3 Mpa) Proof Pressur 450 psi (3.1 Mpa) -40.F 200'F G40'C 93'C) 7 Ncm3/min, or less ANSUASME 1.20, 1-1983 (NPT thread) Applicable Tubing hftEllf,] elcmenfi mobrlNl SIVIC CorDoration of America has a policy of continual product dsvlopment and resrws rhe dgm to change diflEnsions or specilications without prior notilication

Process Pump

0.6 Discharge pressure (MPa) Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.5 MPa 0.5 0.5 0.5 SUP = 0.35 MPa SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.2 MPa 0.4 0.4 0.4 SUP = 0.35 MPa SUP = 0.35 MPa 0.3 0.3 0.3 SUP = 0.2 MPa SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 250 500 1000 1500 2000 0 Discharge (mL/min) 0 Discharge (mL/min) 400 800 1200

25

pressure (MPa) Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.5 MPa 0.5 0.5 0.5 SUP = 0.35 MPa SUP = 0.5 MPa SUP = 0.5 MPa PA(P) SUP = 0.2 MPa 0.4 0.4 0.4 SUP = 0.35 MPa SUP = 0.35 MPa PAX 0.3 0.3 0.3 SUP = 0.2 MPa SUP = 0.2 MPa 0.2 0.2 0.2 PB PB 0.1 0.1 0.1 PAF 0 0 0 50 100 150 200 250 500 1000 1500 2000 0 Discharge (mL/min) 0 Discharge (mL/min) 400 800 1200

3

rated flow range Pressure Loss (Reference Data) PFMC7501 (for 500 L/min) PFMC7102 (for 1000 L/min) PFMC7202 (for 2000 L/min) 50 50 50 Supply pressure 200 kPa Supply pressure 400 kPa Supply pressure 200 kPa Supply pressure 400 kPa 40 40 40 Pressure loss [kPa] Pressure loss [kPa] Pressure loss [kPa] Supply pressure 200 kPa Supply pressure 400 kPa 30 30 30 20 20 20 10 10 10 0 0 0 0 400 800 1200

Rotary Table/

The range of angles within which the shock absorber operates is between the rotation end and the values shown below. 10 20 30 50 Size 7.1 6.9 6.2 9.6 For low energy 8.6 8.0 7.3 10.5 For high energy Weights (g) 10 630 20 30 50 Size 90 specification 2480 1520 1200 Basic type 180 specification 2370 1450 1140 600 90 specification 2810 1750 1390 700 High precision type 180 specification 2690 1680